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Semiconductor device including an embedded contact plug Grant 7,700,942 - Iijima April 20, 2 | 2010-04-20 |
Capacitor and process for manufacturing the same Grant 7,667,257 - Iijima February 23, 2 | 2010-02-23 |
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Semiconductor Device Including An Embedded Contact Plug App 20080296666 - IIJIMA; Shinpei | 2008-12-04 |
Semiconductor device with capacitor suppressing leak current Grant 7,382,014 - Iijima June 3, 2 | 2008-06-03 |
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Phase-change Memory Device And Method Of Manufacturing Same App 20070120106 - HAYAKAWA; Tsutomu ;   et al. | 2007-05-31 |
Capacitor and process for manufacturing the same App 20070108493 - Iijima; Shinpei | 2007-05-17 |
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Semiconductor memory device and method for manufacturing semiconductor memory device App 20060234510 - Iijima; Shinpei | 2006-10-19 |
Semiconductor integrated circuit device with capacitor of crown structure and method of manufacturing the same Grant 7,074,669 - Iijima , et al. July 11, 2 | 2006-07-11 |
Method of manufacturing semiconductor device Grant 7,071,071 - Iijima , et al. July 4, 2 | 2006-07-04 |
Semiconductor device having a stacked capacitor App 20060102983 - Iijima; Shinpei | 2006-05-18 |
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Semiconductor integrated circuit device and manufacturing method which avoids oxidation of silicon plug during thermal treatment of capacitor insulating film Grant 6,724,034 - Iijima , et al. April 20, 2 | 2004-04-20 |
Capacitor Structure And A Semiconductor Device With A First Metal Layer, A Second Metal Silicide Layer Formed Over The First Metal Layer And A Second Metal Layer Formed Over The Second Metal Silicide Layer Grant 6,720,603 - Iijima , et al. April 13, 2 | 2004-04-13 |
Method of forming a semiconductor device with a capacitor including a polycrystalline tantalum oxide film dielectric Grant 6,713,343 - Sugawara , et al. March 30, 2 | 2004-03-30 |
Semiconductor integrated circuit device and the method of producing the same Grant 6,664,157 - Iijima , et al. December 16, 2 | 2003-12-16 |
Semiconductor integrated circuit device with capacitor of crown structure and method of manufacturing the same App 20030224571 - Iijima, Shinpei ;   et al. | 2003-12-04 |
Integrated circuit capacitor Grant 6,653,676 - Tsu , et al. November 25, 2 | 2003-11-25 |
Process for manufacturing a semiconductor memory device including a memory cell selecting transistor and a capacitor with metal electrodes Grant 6,649,465 - Iijima , et al. November 18, 2 | 2003-11-18 |
Method of manufacturing semiconductor devices having capacitors with electrode including hemispherical grains Grant 6,632,721 - Iijima , et al. October 14, 2 | 2003-10-14 |
Semiconductor integrated circuit device and manufacturing method thereof App 20030173614 - Nakamura, Yoshitaka ;   et al. | 2003-09-18 |
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Semiconductor integrated circuit device and manufacturing method thereof App 20030141533 - Nakamura, Yoshitaka ;   et al. | 2003-07-31 |
Semiconductor integrated circuit device and method of manufacturing the same App 20030132462 - Iijima, Shinpei ;   et al. | 2003-07-17 |
Semiconductor integrated circuit device and process for manufacturing the same App 20030107073 - Iijima, Shinpei ;   et al. | 2003-06-12 |
Method of forming a semiconductor device including a capacitor with tantalum oxide (Ta2O5) Grant 6,544,834 - Sugawara , et al. April 8, 2 | 2003-04-08 |
Method Of Forming A Capacitor In A Semiconductor Integrated Circuit Device Using A Metal Silicon Nitride Layer To Protect An Underlying Metal Silicide Layer From Oxidation During Subsequent Processing Steps Grant 6,534,375 - Iijima , et al. March 18, 2 | 2003-03-18 |
Semiconductor device, a method of manufacturing the semiconductor device, and an apparatus for manufacturing the semiconductor device App 20030041803 - Kunitomo, Masato ;   et al. | 2003-03-06 |
Semiconductor integrated circuit device and method of manufacturing the same App 20030045067 - Iijima, Shinpei ;   et al. | 2003-03-06 |
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Semiconductor device with adhesion-improvement capacitor and process for producing the device App 20010050389 - Moriya, Hiroshi ;   et al. | 2001-12-13 |
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Semiconductor device, a method of manufacturing the semiconductor device, and an apparatus for manufacturing the semiconductor device App 20010029113 - Kunitomo, Masato ;   et al. | 2001-10-11 |
Integrated circuit capacitor Grant 6,294,420 - Tsu , et al. September 25, 2 | 2001-09-25 |
Method for manufacturing semiconductor integrated circuit device having a titanium electrode Grant 6,103,566 - Tamaru , et al. August 15, 2 | 2000-08-15 |
Semiconductor device having an arrangement of IGFETs and capacitors stacked thereover Grant 5,091,761 - Hiraiwa , et al. February 25, 1 | 1992-02-25 |
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Static random access memory having structure of first-, second- and third-level conductive films Grant 4,785,342 - Yamanaka , et al. November 15, 1 | 1988-11-15 |