Iijima; Kiyohito

Patent Applications and Registrations

Patent applications and USPTO patent grants for Iijima; Kiyohito.The latest application filed is for "substrate processing method and substrate processing system".

Company Profile

2.10.14

Iijima; Kiyohito - Miyagi JP
Iijima; Kiyohito - Nirasaki JP
Iijima; Kiyohito - Yamanashi JP
IIJIMA; Kiyohito - Nirasaki City JP
Iijima; Kiyohito - Nirasaki-shi JP
Iijima, Kiyohito - Nirasaki-Shi Yamanashi-Ken JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate processing method and substrate processing system Grant 11,069,548 - Nishino , et al. July 20, 2	2021-07-20
Substrate Processing Method And Substrate Processing System App 20190362996 - NISHINO; Toru ; et al.	2019-11-28
Substrate processing method and substrate processing system Grant 10,403,525 - Nishino , et al. Sep	2019-09-03
Substrate Processing Method And Substrate Processing System App 20180061692 - NISHINO; Toru ; et al.	2018-03-01
Cleaning method for substrate processing system, storage medium, and substrate processing system Grant 8,382,910 - Numakura , et al. February 26, 2	2013-02-26
Substrate processing apparatus and substrate transfer method adopted therein Grant 8,145,339 - Iijima , et al. March 27, 2	2012-03-27
Control device and control method of plasma processing system, and storage medium storing control program Grant 8,055,368 - Iijima , et al. November 8, 2	2011-11-08
Method for cleaning substrate processing apparatus, substrate processing apparatus, program and recording medium having program recorded therein Grant 7,846,257 - Nakamura , et al. December 7, 2	2010-12-07
Cleaning Method And Storage Medium App 20100089423 - IIJIMA; Kiyohito ; et al.	2010-04-15
Semiconductor Manufacturing Apparatus, Method Of Managing Apparatus Operation Parameters, And Program App 20100087944 - Kanaya; Noriaki ; et al.	2010-04-08
Control device and method for a substrate processing apparatus Grant 7,681,055 - Iijima March 16, 2	2010-03-16
Control Device And Control Method Of Plasma Processing System, And Storage Medium Storing Control Program App 20100010658 - IIJIMA; Kiyohito ; et al.	2010-01-14
Substrate Processing Apparatus And Substrate Transfer Method Adopted Therein App 20090269171 - IIJIMA; Kiyohito ; et al.	2009-10-29
Cleaning Method For Substrate Processing System, Storage Medium, And Substrate Processing System App 20090229635 - NUMAKURA; Masahiro ; et al.	2009-09-17
Cleaning Method Of Substrate Processing Equipment, Substrate Processing Equipment, And Recording Medium For Recording Program Thereof App 20070215180 - IIJIMA; Kiyohito	2007-09-20
Control Device And Method For A Substrate Processing Apparatus App 20070213864 - Iijima; Kiyohito	2007-09-13
Cluster tool and transfer control method Grant 7,245,987 - Iijima , et al. July 17, 2	2007-07-17
Method For Cleaning Substrate Processing Apparatus,substrate Processing Apparatus, Program Andrecording Medium Having Program Recorded Therein App 20070131253 - Nakamura; Hiroshi ; et al.	2007-06-14
Semiconductor processing system and method of transferring workpiece Grant 6,983,195 - Iijima , et al. January 3, 2	2006-01-03
Cluster tool and transfer control method App 20050220577 - Iijima, Kiyohito ; et al.	2005-10-06
Cluster tool and method for controlling transport App 20040117059 - IIjima, Kiyohito ; et al.	2004-06-17
Method of transferring processed body and processing system for processed body App 20040043513 - Ishizawa, Shigeru ; et al.	2004-03-04
Semiconductor processing system and method of transferring workpiece App 20040029300 - Iijima, Kiyohito ; et al.	2004-02-12

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