IIDA; Naruaki

Patent Applications and Registrations

Patent applications and USPTO patent grants for IIDA; Naruaki.The latest application filed is for "substrate transfer mechanism and substrate transferring method".

Company Profile

3.40.27

IIDA; Naruaki - Kumamoto JP
IIDA; Naruaki - Koshi City JP
Iida; Naruaki - Koshi JP
IIDA; Naruaki - Koshi-Shi JP
Iida; Naruaki - Kikuchi-Gun JP
Iida; Naruaki - Koshi-machi JP
Iida; Naruaki - Kumamoto-Ken JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Transfer Mechanism And Substrate Transferring Method App 20220270912 - IDE; Kousei ; et al.	2022-08-25
Coating Apparatus And Coating Method App 20200391238 - KAJIWARA; Hideki ; et al.	2020-12-17
Substrate processing apparatus, substrate processing method, and storage medium Grant 10,795,265 - Koga , et al. October 6, 2	2020-10-06
Substrate Processing Apparatus, Substrate Processing Method, And Storage Medium App 20200041913 - KOGA; Norihisa ; et al.	2020-02-06
Substrate processing apparatus, method for correcting positional displacement, and storage medium Grant 10,042,356 - Iida , et al. August 7, 2	2018-08-07
Substrate processing apparatus and substrate processing method Grant 9,818,654 - Hayashi , et al. November 14, 2	2017-11-14
Substrate Processing Apparatus And Substrate Processing Method App 20160358829 - HAYASHI; Masato ; et al.	2016-12-08
Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position Grant 9,299,599 - Douki , et al. March 29, 2	2016-03-29
Substrate transfer device, substrate transfer method, and storage medium Grant 9,214,370 - Iida , et al. December 15, 2	2015-12-15
Substrate Processing Apparatus, Method For Correcting Positional Displacement, And Storage Medium App 20150235888 - IIDA; Naruaki ; et al.	2015-08-20
Substrate treatment system, substrate transfer method and non-transitory computer-readable storage medium Grant 9,082,800 - Enokida , et al. July 14, 2	2015-07-14
Substrate processing apparatus, substrate processing method and storage medium Grant 8,985,929 - Enokida , et al. March 24, 2	2015-03-24
Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position App 20140234991 - DOUKI; Yuichi ; et al.	2014-08-21
Substrate holder positioning method and substrate processing system Grant 8,755,935 - Douki , et al. June 17, 2	2014-06-17
Substrate holding device Grant 8,720,873 - Hayashi , et al. May 13, 2	2014-05-13
Transfer apparatus and transfer method Grant 8,707,805 - Maki , et al. April 29, 2	2014-04-29
Arm for wafer transportation for manufacturing semiconductor Grant D701,498 - Iida , et al. March 25, 2	2014-03-25
Arm for wafer transportation for manufacturing semiconductor Grant D695,240 - Iida , et al. December 10, 2	2013-12-10
Substrate Transfer Device, Substrate Transfer Method, And Storage Medium App 20130272824 - Iida; Naruaki ; et al.	2013-10-17
Device and method for supporting a substrate Grant 8,528,889 - Nakano , et al. September 10, 2	2013-09-10
Transfer Apparatus And Transfer Method App 20130166064 - Maki; Junnosuke ; et al.	2013-06-27
Substrate transfer method and apparatus Grant 8,441,618 - Nakaharada , et al. May 14, 2	2013-05-14
Substrate Processing Apparatus, Substrate Processing Method And Storage Medium App 20130078059 - ENOKIDA; Suguru ; et al.	2013-03-28
Substrate Treatment System, Substrate Transfer Method And Non-transitory Computer-readable Storage Medium App 20130078061 - ENOKIDA; Suguru ; et al.	2013-03-28
Wafer holding member Grant D674,761 - Iida , et al. January 22, 2	2013-01-22
Substrate carrying device, substrate carrying method and computer-readable storage medium Grant 8,292,549 - Iida October 23, 2	2012-10-23
Substrate Holding Device App 20120235335 - Hayashi; Shinichi ; et al.	2012-09-20
Substrate Holder Positioning Method And Substrate Processing System App 20120224945 - DOUKI; Yuichi ; et al.	2012-09-06
Substrate Carrying Device, Substrate Carrying Method And Computer-readable Storage Medium App 20110268511 - IIDA; Naruaki	2011-11-03
Substrate carrying device, substrate carrying method and computer-readable storage medium Grant 7,993,081 - Iida August 9, 2	2011-08-09
Substrate Transfer Method And Apparatus App 20100321648 - NAKAHARADA; Masahiro ; et al.	2010-12-23
Device And Method For Supporting A Substrate App 20100243168 - Nakano; Seiji ; et al.	2010-09-30
Heating device and heating method Grant 7,758,340 - Akimoto , et al. July 20, 2	2010-07-20
Detecting apparatus and detecting method Grant 7,470,098 - Iida December 30, 2	2008-12-30
Detecting Apparatus And Detecting Method App 20080100852 - IIDA; Naruaki	2008-05-01
Substrate Carrying Device, Substrate Carrying Method And Computer-readable Storage Medium App 20070160454 - Iida; Naruaki	2007-07-12
Substrate Processing Apparatus And Substrate Processing Method App 20070128356 - Matsuyama; Yuji ; et al.	2007-06-07
Substrate Processing Apparatus And Substrate Processing Method App 20070127916 - Kitano; Junichi ; et al.	2007-06-07
Substrate processing apparatus and substrate processing method Grant 7,208,066 - Kitano , et al. April 24, 2	2007-04-24
Substrate processing apparatus and method of aligning substrate carrier apparatus Grant 6,915,183 - Iida , et al. July 5, 2	2005-07-05
Substrate processing apparatus and method of aligning substrate carrier apparatus App 20040253091 - Iida, Naruaki ; et al.	2004-12-16
Substrate processing apparatus and substrate processing method Grant 6,709,545 - Iida March 23, 2	2004-03-23
Substrate processing apparatus and substrate processing method App 20040050321 - Kitano, Junichi ; et al.	2004-03-18
Substrate processing apparatus and substrate processing method Grant 6,672,779 - Ueda , et al. January 6, 2	2004-01-06
Method of determining retreat permission position of carrier arm and teaching device thereof Grant 6,643,564 - Kataoka , et al. November 4, 2	2003-11-04
Method of determining retreat permission position of carrier arm and teaching device thereof App 20030139852 - Kataoka, Yukinori ; et al.	2003-07-24
Substrate processing apparatus and substrate processing method App 20030012575 - Ueda, Issei ; et al.	2003-01-16
Substrate processing apparatus and substrate processing method Grant 6,471,422 - Ueda , et al. October 29, 2	2002-10-29
Substrate processing apparatus and substrate processing method App 20020118973 - Ueda, Issei ; et al.	2002-08-29
Substrate processing apparatus and substrate processing method App 20020092615 - Iida, Naruaki	2002-07-18
Substrate processing apparatus and substrate processing method Grant RE37,470 - Ohkura , et al. December 18, 2	2001-12-18
Substrate processing apparatus and substrate processing method App 20010013161 - Kitano, Junichi ; et al.	2001-08-16
Substrate holding apparatus and substrate process system Grant 6,168,669 - Yasuda , et al. January 2, 2	2001-01-02
Method of substrate processing to form a film on multiple target objects Grant 6,054,181 - Nanbu , et al. April 25, 2	2000-04-25
Substrate processing system Grant 5,826,129 - Hasebe , et al. October 20, 1	1998-10-20
Semiconductor wafer processing apparatus including localized humidification between coating and heat treatment sections Grant 5,725,664 - Nanbu , et al. March 10, 1	1998-03-10
Method for processing wafer-shaped substrates Grant 5,460,478 - Akimoto , et al. October 24, 1	1995-10-24
Apparatus for processing wafer-shaped substrates Grant 5,364,222 - Akimoto , et al. November 15, 1	1994-11-15