Iguchi; Etsuko

Patent Applications and Registrations

Patent applications and USPTO patent grants for Iguchi; Etsuko.The latest application filed is for "method for filling fine hole".

Company Profile

0.7.7

Iguchi; Etsuko - Machida JP
Iguchi; Etsuko - Tokyo JP
Iguchi, Etsuko - Machida-shi JP
Iguchi, Etsuko - Tokyo-to JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Protective coating composition for dual damascene process Grant 6,734,258 - Iguchi , et al. May 11, 2	2004-05-11
Method for filling fine hole Grant 6,693,049 - Iguchi , et al. February 17, 2	2004-02-17
Anti-reflective coating composition, multilayer photoresist material using the same, and method for forming pattern Grant 6,689,535 - Iguchi , et al. February 10, 2	2004-02-10
Method for forming a finely patterned photoresist layer Grant 6,599,682 - Iguchi , et al. July 29, 2	2003-07-29
Method for filling fine hole App 20030032280 - Iguchi, Etsuko ; et al.	2003-02-13
Protective coating composition for dual damascene process App 20020077426 - Iguchi, Etsuko ; et al.	2002-06-20
Anti-reflective coating composition, multilayer photoresist material using the same, and method for forming pattern App 20020055064 - Iguchi, Etsuko ; et al.	2002-05-09
Undercoating composition for photolithographic resist App 20010049072 - Hirosaki, Takako ; et al.	2001-12-06
Method for forming a finely patterned photoresist layer App 20010044080 - Iguchi, Etsuko ; et al.	2001-11-22
Undercoating composition for photolithographic resist App 20010018163 - Hirosaki, Takako ; et al.	2001-08-30
Composition for forming antireflective coating film and method for forming resist pattern using same Grant 6,268,108 - Iguchi , et al. July 31, 2	2001-07-31
Method for the formation of a planarizing coating film on substrate surface App 20010003068 - Iguchi, Etsuko ; et al.	2001-06-07
Undercoating composition for photolithography Grant 5,756,255 - Sato , et al. May 26, 1	1998-05-26
Negative-working photoresist composition Grant 5,700,625 - Sato , et al. December 23, 1	1997-12-23

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