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Method for fabricating semiconductor device Grant 8,991,042 - Sakamoto , et al. March 31, 2 | 2015-03-31 |
Method for manufacturing semiconductor device Grant 8,658,529 - Idani February 25, 2 | 2014-02-25 |
Semiconductor device manufacture method and semiconductor device Grant 8,614,146 - Takesako , et al. December 24, 2 | 2013-12-24 |
Cleaning apparatus and cleaning method for wafer Grant 8,496,758 - Idani July 30, 2 | 2013-07-30 |
Method For Fabricating Semiconductor Device App 20130012019 - SAKAMOTO; Manabu ;   et al. | 2013-01-10 |
Method For Manufacturing Semiconductor Device App 20120276736 - Idani; Naoki | 2012-11-01 |
Method for fabricating semiconductor device Grant 8,286,344 - Sakamoto , et al. October 16, 2 | 2012-10-16 |
Polishing Method, Polishing Apparatus, And Method For Manufacturing Semiconductor Device App 20120171931 - Idani; Naoki | 2012-07-05 |
Polishing method, polishing apparatus, and method for manufacturing semiconductor device Grant 8,153,525 - Idani April 10, 2 | 2012-04-10 |
Semiconductor Device Manufacture Method And Semiconductor Device App 20120001344 - TAKESAKO; Satoshi ;   et al. | 2012-01-05 |
Cleaning apparatus and cleaning method for wafer App 20110138553 - IDANI; Naoki | 2011-06-16 |
Semiconductor device fabrication method Grant 7,951,715 - Watanabe , et al. May 31, 2 | 2011-05-31 |
Cleaning apparatus and cleaning method for wafer Grant 7,908,698 - Idani March 22, 2 | 2011-03-22 |
Method of manufacturing a semiconductor device and a semiconductor manufacturing equipment Grant 7,879,724 - Idani February 1, 2 | 2011-02-01 |
Method Of Manufacturing Semiconductor Device App 20090215267 - SHIBATA; Seiichi ;   et al. | 2009-08-27 |
Method Of Manufacturing Semiconductor Device App 20090075477 - KAWAMURA; Kazuo ;   et al. | 2009-03-19 |
Method For Fabricating Semiconductor Device App 20090056102 - SAKAMOTO; Manabu ;   et al. | 2009-03-05 |
Polishing Method, Polishing Apparatus, And Method For Manufacturing Semiconductor Device App 20080242081 - IDANI; Naoki | 2008-10-02 |
Method Of Manufacturing A Semiconductor Device And A Semiconductor Manufacturing Equipment App 20080233753 - IDANI; Naoki | 2008-09-25 |
Designing and fabrication of a semiconductor device Grant 7,424,688 - Idani , et al. September 9, 2 | 2008-09-09 |
Polishing apparatus and manufacturing method of an electronic apparatus App 20080064308 - Idani; Naoki | 2008-03-13 |
Method of fabricating semiconductor device App 20070215975 - Idani; Naoki ;   et al. | 2007-09-20 |
Electronic device and method for designing the same Grant 7,250,644 - Idani July 31, 2 | 2007-07-31 |
Cleaning apparatus and cleaning method for wafer App 20070163619 - Idani; Naoki | 2007-07-19 |
Manufacture of semiconductor device with CMP App 20070007246 - Idani; Naoki | 2007-01-11 |
Electronic device and method for designing the same App 20060131610 - Idani; Naoki | 2006-06-22 |
Designing and fabrication of a semiconductor device App 20060113628 - Idani; Naoki ;   et al. | 2006-06-01 |
Designing a semiconductor device layout using polishing regions Grant 7,017,133 - Idani , et al. March 21, 2 | 2006-03-21 |
Semiconductor device fabrication method App 20050215180 - Idani, Naoki | 2005-09-29 |
Designing and fabrication of a semiconductor device App 20050160381 - Idani, Naoki ;   et al. | 2005-07-21 |
Designing method and a manufacturing method of an electronic device Grant 6,854,095 - Idani February 8, 2 | 2005-02-08 |
Semiconductor device fabrication method App 20050026439 - Watanabe, Takashi ;   et al. | 2005-02-03 |
Designing method and a manufacturing method of an electronic device App 20030226127 - Idani, Naoki | 2003-12-04 |