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name:-0.029839038848877
name:-0.019999027252197
name:-0.0091359615325928
Ichinose; Go Patent Filings

Ichinose; Go

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ichinose; Go.The latest application filed is for "measurement system, substrate processing system, and device manufacturing method".

Company Profile
8.21.25
  • Ichinose; Go - Fukaya JP
  • ICHINOSE; Go - Fukaya-shi JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Measurement system, substrate processing system, and device manufacturing method
Grant 11,430,684 - Ichinose , et al. August 30, 2
2022-08-30
Measurement System, Substrate Processing System, And Device Manufacturing Method
App 20220155062 - ICHINOSE; Go ;   et al.
2022-05-19
Suction device, carry-in method, carrier system and exposure apparatus, and device manufacturing method
Grant 11,289,362 - Ichinose , et al. March 29, 2
2022-03-29
Measurement system, substrate processing system, and device manufacturing method
Grant 11,274,919 - Ichinose , et al. March 15, 2
2022-03-15
Measurement System, Substrate Processing System, And Device Manufacturing Method
App 20210272833 - ICHINOSE; Go ;   et al.
2021-09-02
Measurement system, substrate processing system, and device manufacturing method
Grant 11,107,718 - Ichinose , et al. August 31, 2
2021-08-31
Measurement system, substrate processing system, and device manufacturing method
Grant 11,069,552 - Ichinose , et al. July 20, 2
2021-07-20
Substrate holding method, substrate holding apparatus, exposure apparatus and exposure method
Grant RE48,429 - Ichinose February 9, 2
2021-02-09
Measurement system, substrate processing system, and device manufacturing method
Grant 10,777,441 - Ichinose , et al. Sept
2020-09-15
Measurement System, Substrate Processing System, And Device Manufacturing Method
App 20200266087 - ICHINOSE; Go ;   et al.
2020-08-20
Suction Device, Carry-in Method, Carrier System And Exposure Apparatus, And Device Manufacturing Method
App 20200176298 - ICHINOSE; Go ;   et al.
2020-06-04
Suction device, carry-in method, carrier system and exposure apparatus, and device manufacturing method
Grant 10,586,728 - Ichinose , et al.
2020-03-10
Measurement System, Substrate Processing System, And Device Manufacturing Method
App 20190287837 - ICHINOSE; Go ;   et al.
2019-09-19
Measurement System, Substrate Processing System, And Device Manufacturing Method
App 20190257647 - ICHINOSE; Go ;   et al.
2019-08-22
Suction Device, Carry-in Method, Carrier System And Exposure Apparatus, And Device Manufacturing Method
App 20190172745 - ICHINOSE; Go ;   et al.
2019-06-06
Suction device, carry-in method, carrier system and exposure apparatus, and device manufacturing method
Grant 10,242,903 - Ichinose , et al.
2019-03-26
Substrate Holding Method, Substrate Holding Apparatus, Exposure Apparatus And Exposure Method
App 20180174884 - ICHINOSE; Go
2018-06-21
Substrate holding method, substrate holding apparatus, exposure apparatus and exposure method
Grant 9,865,494 - Ichinose January 9, 2
2018-01-09
Substrate Holding Method, Substrate Holding Apparatus, Exposure Apparatus And Exposure Method
App 20160111318 - ICHINOSE; Go
2016-04-21
Suction Device, Carry-in Method, Carrier System And Exposure Apparatus, And Device Manufacturing Method
App 20160005636 - ICHINOSE; Go ;   et al.
2016-01-07
Manufacturing method of exposure apparatus and device manufacturing method
Grant 8,841,065 - Ichinose September 23, 2
2014-09-23
Movable body apparatus, exposure apparatus and device manufacturing method
Grant 8,472,008 - Ichinose June 25, 2
2013-06-25
Exposure apparatus, exposure method and device manufacturing method
Grant 8,446,569 - Ichinose May 21, 2
2013-05-21
Exposure Apparatus, Exposure Method, Device-manufacturing Method, Program, And Recording Medium
App 20130057837 - ICHINOSE; Go ;   et al.
2013-03-07
Exposure apparatus and device manufacturing method
Grant 8,355,114 - Ichinose January 15, 2
2013-01-15
Exposure apparatus and device manufacturing method
Grant 8,355,116 - Ichinose January 15, 2
2013-01-15
Exposure apparatus and device manufacturing method
Grant 8,294,878 - Ichinose October 23, 2
2012-10-23
Manufacturing Method Of Exposure Apparatus And Device Manufacturing Method
App 20110200944 - ICHINOSE; Go
2011-08-18
Exposure Apparatus And Device Manufacturing Method
App 20110102762 - ICHINOSE; Go
2011-05-05
Exposure Apparatus, Exposure Method, And Device Manufacturing Method
App 20110085150 - ICHINOSE; Go
2011-04-14
Exposure Apparatus, Exposure Method, And Device Manufacturing Method
App 20110086315 - ICHINOSE; Go
2011-04-14
Exposure Apparatus, Exposure Method, And Device Manufacturing Method
App 20110075120 - ICHINOSE; Go
2011-03-31
Exposure Apparatus and Device Manufacturing Method
App 20110007291 - Ichinose; Go
2011-01-13
Movable Body Apparatus, Exposure Apparatus And Device Manufacturing Method
App 20110007295 - ICHINOSE; Go
2011-01-13
Exposure Apparatus And Device Manufacturing Method
App 20110007325 - ICHINOSE; Go
2011-01-13
Exposure Apparatus And Device Manufacturing Method
App 20110008734 - Ichinose; Go
2011-01-13
Exposure Apparatus And Device Manufacturing Method
App 20110007290 - ICHINOSE; Go
2011-01-13
Exposure Apparatus, Exposure Method And Device Manufacturing Method
App 20110008717 - ICHINOSE; Go
2011-01-13
Maintenance method, exposure method and apparatus, and device manufacturing method
App 20090109413 - Shibazaki; Yuichi ;   et al.
2009-04-30
Support Apparatus, Stage Apparatus, Exposure Apparatus, And Device Manufacturing Method
App 20080013060 - Ichinose; Go ;   et al.
2008-01-17

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