Ichijo; Mitsuhiro
Patent Applications and Registrations
Patent applications and USPTO patent grants for Ichijo; Mitsuhiro.The latest application filed is for "semiconductor device and manufacturing method thereof".
Company Profile
8.105.94
- Ichijo; Mitsuhiro - Tochigi JP
- ICHIJO; Mitsuhiro - Zama JP
- Ichijo; Mitsuhiro - Kanagawa JP
- Ichijo; Mitsuhiro - Atsugi JP
- Ichijo; Mitsuhiro - Kangawa JP
- Ichijo; Mitsuhiro - Atsugi-shi JP
Patent Activity
| Patent | Date |
|---|---|
| Display device and method for manufacturing the same Grant 11,310,457 - Yamazaki , et al. April 19, 2 | 2022-04-19 |
| Semiconductor Device And Manufacturing Method Thereof App 20210184042 - TANAKA; Tetsuhiro ; et al. | 2021-06-17 |
| Semiconductor device and manufacturing method thereof Grant 10,950,734 - Tezuka , et al. March 16, 2 | 2021-03-16 |
| Semiconductor device and manufacturing method thereof Grant 10,923,600 - Tanaka , et al. February 16, 2 | 2021-02-16 |
| Display Device And Method For Manufacturing The Same App 20200059625 - YAMAZAKI; Shunpei ; et al. | 2020-02-20 |
| Manufacturing method of semiconductor device Grant 10,522,397 - Endo , et al. Dec | 2019-12-31 |
| Semiconductor device and manufacturing method of the same Grant 10,468,531 - Kimura , et al. No | 2019-11-05 |
| Manufacturing Method Of Semiconductor Device App 20190237586 - ENDO; Yuta ; et al. | 2019-08-01 |
| Semiconductor Device And Manufacturing Method Thereof App 20190165179 - TEZUKA; Sachiaki ; et al. | 2019-05-30 |
| Manufacturing method of semiconductor device Grant 10,236,389 - Endo , et al. | 2019-03-19 |
| Semiconductor device and manufacturing method thereof Grant 10,192,995 - Tezuka , et al. Ja | 2019-01-29 |
| Semiconductor Device And Manufacturing Method Thereof App 20180350997 - TANAKA; Tetsuhiro ; et al. | 2018-12-06 |
| Semiconductor device Grant 10,141,337 - Yamazaki , et al. Nov | 2018-11-27 |
| Luminescent device having light-emitting element and transistor Grant 10,103,211 - Murakami , et al. October 16, 2 | 2018-10-16 |
| Semiconductor device and manufacturing method thereof Grant 10,056,497 - Tanaka , et al. August 21, 2 | 2018-08-21 |
| Method for manufacturing semiconductor device Grant 10,050,132 - Yamazaki , et al. August 14, 2 | 2018-08-14 |
| Transistor and semiconductor device Grant 10,020,322 - Ito , et al. July 10, 2 | 2018-07-10 |
| Manufacturing Method Of Semiconductor Device App 20180182899 - ENDO; Yuta ; et al. | 2018-06-28 |
| Manufacturing method of semiconductor device including step of forming trench over semiconductor Grant 9,917,209 - Endo , et al. March 13, 2 | 2018-03-13 |
| Semiconductor Device App 20180047753 - YAMAZAKI; Shunpei ; et al. | 2018-02-15 |
| Electrode, power storage device, electronic device, and vehicle Grant 9,852,850 - Inoue , et al. December 26, 2 | 2017-12-26 |
| Luminescent Device And Process Of Manufacturing The Same App 20170358638 - MURAKAMI; Satoshi ; et al. | 2017-12-14 |
| Semiconductor device Grant 9,842,939 - Endo , et al. December 12, 2 | 2017-12-12 |
| Semiconductor Device App 20170352746 - YAMAZAKI; Shunpei ; et al. | 2017-12-07 |
| Semiconductor device Grant 9,806,201 - Yamazaki , et al. October 31, 2 | 2017-10-31 |
| Semiconductor device Grant 9,793,295 - Yamazaki , et al. October 17, 2 | 2017-10-17 |
| Method for evaluating semiconductor film and method for manufacturing semiconductor device Grant 9,786,495 - Shimomura , et al. October 10, 2 | 2017-10-10 |
| Luminescent device having light emitting element and transistor Grant 9,761,645 - Murakami , et al. September 12, 2 | 2017-09-12 |
| Method for manufacturing semiconductor device Grant 9,722,056 - Yamazaki , et al. August 1, 2 | 2017-08-01 |
| Transistor And Semiconductor Device App 20170186779 - ITO; Daigo ; et al. | 2017-06-29 |
| Method for manufacturing a semiconductor device Grant 9,685,561 - Ichijo , et al. June 20, 2 | 2017-06-20 |
| Display Device And Method For Manufacturing The Same App 20170054934 - YAMAZAKI; Shunpei ; et al. | 2017-02-23 |
| Semiconductor Device And Manufacturing Method Of The Same App 20170033234 - KIMURA; Kunio ; et al. | 2017-02-02 |
| Semiconductor Device App 20170018631 - YAMAZAKI; Shunpei ; et al. | 2017-01-19 |
| Active material, electrode including the active material and manufacturing method thereof, and secondary battery Grant 9,543,577 - Kuriki , et al. January 10, 2 | 2017-01-10 |
| Manufacturing Method Of Semiconductor Device App 20170005203 - ENDO; Yuta ; et al. | 2017-01-05 |
| Semiconductor Device App 20160380106 - ENDO; Yuta ; et al. | 2016-12-29 |
| Semiconductor Device App 20160372492 - YAMAZAKI; Shunpei ; et al. | 2016-12-22 |
| Display device and method for manufacturing the same Grant 9,520,410 - Yamazaki , et al. December 13, 2 | 2016-12-13 |
| Method for manufacturing semiconductor device Grant 9,496,376 - Yamazaki , et al. November 15, 2 | 2016-11-15 |
| Semiconductor device and manufacturing method of the same Grant 9,490,368 - Kimura , et al. November 8, 2 | 2016-11-08 |
| Semiconductor Device And Manufacturing Method Thereof App 20160322503 - TEZUKA; Sachiaki ; et al. | 2016-11-03 |
| Semiconductor device Grant 9,478,664 - Yamazaki , et al. October 25, 2 | 2016-10-25 |
| Method For Manufacturing Semiconductor Device App 20160307776 - ICHIJO; Mitsuhiro ; et al. | 2016-10-20 |
| Semiconductor Device And Manufacturing Method Thereof App 20160308060 - TANAKA; Tetsuhiro ; et al. | 2016-10-20 |
| Luminescent Device And Process Of Manufacturing The Same App 20160293684 - MURAKAMI; Satoshi ; et al. | 2016-10-06 |
| Semiconductor device Grant 9,443,988 - Endo , et al. September 13, 2 | 2016-09-13 |
| Semiconductor device Grant 9,437,594 - Yamazaki , et al. September 6, 2 | 2016-09-06 |
| Semiconductor Device App 20160225909 - ICHIJO; Mitsuhiro ; et al. | 2016-08-04 |
| Method for manufacturing semiconductor device Grant 9,384,976 - Ichijo , et al. July 5, 2 | 2016-07-05 |
| Luminescent device having light-emitting element and transistor Grant 9,368,561 - Murakami , et al. June 14, 2 | 2016-06-14 |
| Method for manufacturing semiconductor device Grant 9,349,820 - Ichijo , et al. May 24, 2 | 2016-05-24 |
| Method for Manufacturing Semiconductor Device App 20160087085 - YAMAZAKI; Shunpei ; et al. | 2016-03-24 |
| Method For Evaluating Semiconductor Film And Method For Manufacturing Semiconductor Device App 20160086792 - SHIMOMURA; Akihisa ; et al. | 2016-03-24 |
| Electrode, Power Storage Device, Electronic Device, And Vehicle App 20160020035 - INOUE; Nobuhiro ; et al. | 2016-01-21 |
| Semiconductor Device App 20150295061 - ICHIJO; Mitsuhiro ; et al. | 2015-10-15 |
| Semiconductor Device App 20150255534 - YAMAZAKI; Shunpei ; et al. | 2015-09-10 |
| Semiconductor device Grant 9,076,876 - Ichijo , et al. July 7, 2 | 2015-07-07 |
| Semiconductor Device App 20150179810 - Yamazaki; Shunpei ; et al. | 2015-06-25 |
| Method For Manufacturing Semiconductor Device App 20150140732 - ICHIJO; Mitsuhiro ; et al. | 2015-05-21 |
| Semiconductor Device App 20150053975 - ENDO; Yuta ; et al. | 2015-02-26 |
| Thin film transistor and method for manufacturing the same Grant 8,956,934 - Nakajima , et al. February 17, 2 | 2015-02-17 |
| Methods of removing contaminant impurities during the manufacture of a thin film transistor by applying water in which ozone is dissolved Grant 8,951,902 - Asami , et al. February 10, 2 | 2015-02-10 |
| Method for manufacturing semiconductor device Grant 8,927,351 - Ichijo , et al. January 6, 2 | 2015-01-06 |
| Luminescent Device And Process Of Manufacturing The Same App 20140346489 - MURAKAMI; Satoshi ; et al. | 2014-11-27 |
| Display Device And Method For Manufacturing The Same App 20140332819 - YAMAZAKI; Shunpei ; et al. | 2014-11-13 |
| Semiconductor device Grant 8,853,684 - Endo , et al. October 7, 2 | 2014-10-07 |
| Display device and method for manufacturing the same Grant 8,829,527 - Yamazaki , et al. September 9, 2 | 2014-09-09 |
| Display device and method for manufacturing the same Grant 8,823,009 - Yamazaki , et al. September 2, 2 | 2014-09-02 |
| Method for manufacturing semiconductor device using a microwave plasma CVD apparatus Grant 8,809,203 - Ichijo , et al. August 19, 2 | 2014-08-19 |
| Luminescent device and process of manufacturing the same Grant 8,803,152 - Murakami , et al. August 12, 2 | 2014-08-12 |
| Semiconductor Device App 20140027764 - YAMAZAKI; Shunpei ; et al. | 2014-01-30 |
| Semiconductor Device App 20140001470 - ICHIJO; Mitsuhiro ; et al. | 2014-01-02 |
| Method of manufacturing a semiconductor device Grant 8,603,899 - Asami , et al. December 10, 2 | 2013-12-10 |
| Semiconductor substrate and manufacturing method of semiconductor device Grant 8,592,908 - Yamazaki , et al. November 26, 2 | 2013-11-26 |
| Method for manufacturing thin film transistor Grant 8,569,120 - Takahashi , et al. October 29, 2 | 2013-10-29 |
| Method for forming microcrystalline semiconductor film and method for manufacturing thin film transistor Grant 8,557,687 - Tajima , et al. October 15, 2 | 2013-10-15 |
| Semiconductor device Grant 8,552,425 - Ichijo , et al. October 8, 2 | 2013-10-08 |
| Luminescent Device And Process Of Manufacturing The Same App 20130228784 - MURAKAMI; Satoshi ; et al. | 2013-09-05 |
| Method for manufacturing microcrystalline semiconductor and thin film transistor Grant 8,486,777 - Ichijo , et al. July 16, 2 | 2013-07-16 |
| Plasma CVD apparatus Grant 8,476,638 - Toriumi , et al. July 2, 2 | 2013-07-02 |
| Luminescent device and process of manufacturing the same Grant 8,450,741 - Murakami , et al. May 28, 2 | 2013-05-28 |
| Semiconductor device Grant 8,441,010 - Ichijo , et al. May 14, 2 | 2013-05-14 |
| Thin Film Transistor And Method For Manufacturing The Same App 20130095617 - NAKAJIMA; Miyako ; et al. | 2013-04-18 |
| Method of Manufacturing A Semiconductor Device App 20130059404 - Asami; Taketomi ; et al. | 2013-03-07 |
| Display Device And Method For Manufacturing The Same App 20130001571 - YAMAZAKI; Shunpei ; et al. | 2013-01-03 |
| Thin film transistor and method for manufacturing the same Grant 8,344,378 - Nakajima , et al. January 1, 2 | 2013-01-01 |
| Method For Manufacturing Microcrystalline Semiconductor Film And Method For Manufacturing Semiconductor Device App 20120304932 - Toriumi; Satoshi ; et al. | 2012-12-06 |
| Method for manufacturing semiconductor device Grant 8,324,699 - Ichijo , et al. December 4, 2 | 2012-12-04 |
| Method of manufacturing a semiconductor device Grant 8,304,327 - Asami , et al. November 6, 2 | 2012-11-06 |
| Display device comprising an antioxidant film formed on a microcrystalline semiconductor film wherein the antioxidant film has a recessed portion overlapping a channel region Grant 8,300,168 - Yamazaki , et al. October 30, 2 | 2012-10-30 |
| Display Device And Method For Manufacturing The Same App 20120248470 - YAMAZAKI; Shunpei ; et al. | 2012-10-04 |
| Method for manufacturing microcrystalline semiconductor film by plasma CVD apparatus Grant 8,252,669 - Toriumi , et al. August 28, 2 | 2012-08-28 |
| Plasma processing apparatus and method for manufacturing semiconductor device Grant 8,247,315 - Furuno , et al. August 21, 2 | 2012-08-21 |
| Display device comprising electrode layer contacting wiring in the connection region and extending to pixel region Grant 8,217,396 - Yamazaki , et al. July 10, 2 | 2012-07-10 |
| Active Material, Electrode Including The Active Material And Manufacturing Method Thereof, And Secondary Battery App 20120156556 - KURIKI; Kazutaka ; et al. | 2012-06-21 |
| Manufacturing Method For Semiconductor Device App 20120129329 - ASAMI; Taketomi ; et al. | 2012-05-24 |
| Method For Manufacturing Microcrystalline Semiconductor And Thin Film Transistor App 20120100677 - ICHIJO; Mitsuhiro ; et al. | 2012-04-26 |
| Plasma Treatment Apparatus And Plasma Cvd Apparatus App 20120100309 - MIYAIRI; Hidekazu ; et al. | 2012-04-26 |
| Manufacturing method for semiconductor device Grant 8,138,101 - Asami , et al. March 20, 2 | 2012-03-20 |
| Method for manufacturing microcrystalline semiconductor and thin film transistor Grant 8,114,760 - Ichijo , et al. February 14, 2 | 2012-02-14 |
| Semiconductor Device App 20120001168 - ICHIJO; Mitsuhiro ; et al. | 2012-01-05 |
| Luminescent Device And Process Of Manufacturing The Same App 20110315969 - MURAKAMI; Satoshi ; et al. | 2011-12-29 |
| Semiconductor Device App 20110309355 - ICHIJO; Mitsuhiro ; et al. | 2011-12-22 |
| Semiconductor Device And Manufacturing Method Of The Same App 20110284959 - KIMURA; Kunio ; et al. | 2011-11-24 |
| Semiconductor Device App 20110284854 - ENDO; Yuta ; et al. | 2011-11-24 |
| Semiconductor Substrate And Manufacturing Method Of Semiconductor Device App 20110260285 - YAMAZAKI; Shunpei ; et al. | 2011-10-27 |
| Luminescent device and process of manufacturing the same Grant 8,022,404 - Murakami , et al. September 20, 2 | 2011-09-20 |
| Semiconductor substrate and manufacturing method of semiconductor device Grant 7,989,273 - Yamazaki , et al. August 2, 2 | 2011-08-02 |
| Method For Manufacturing Semiconductor Device App 20110111557 - ICHIJO; Mitsuhiro ; et al. | 2011-05-12 |
| Method For Manufacturing Microcrystalline Semiconductor And Thin Film Transistor App 20110097877 - ICHIJO; Mitsuhiro ; et al. | 2011-04-28 |
| Method For Manufacturing Semiconductor Device App 20110089425 - ICHIJO; Mitsuhiro ; et al. | 2011-04-21 |
| Method For Manufacturing Microcrystalline Semiconductor Film And Method For Manufacturing Semiconductor Device App 20110053358 - TORIUMI; Satoshi ; et al. | 2011-03-03 |
| Method For Forming Microcrystalline Semiconductor Film And Method For Manufacturing Thin Film Transistor App 20110020989 - TAJIMA; Ryota ; et al. | 2011-01-27 |
| Thin Film Transistor And Method For Manufacturing The Same App 20100327281 - NAKAJIMA; Miyako ; et al. | 2010-12-30 |
| Method for manufacturing semiconductor device Grant 7,855,153 - Ichijo , et al. December 21, 2 | 2010-12-21 |
| Method of Manufacturing a Semiconductor Device App 20100151664 - Asami; Taketomi ; et al. | 2010-06-17 |
| Method For Manufacturing Thin Film Transistor App 20100124804 - TAKAHASHI; Erika ; et al. | 2010-05-20 |
| Method of manufacturing a semiconductor device Grant 7,670,881 - Asami , et al. March 2, 2 | 2010-03-02 |
| Plasma Processing Apparatus And Method For Manufacturing Semiconductor Device App 20090233425 - FURUNO; Makoto ; et al. | 2009-09-17 |
| Method For Manufacturing Semiconductor Device App 20090203174 - Ichijo; Mitsuhiro ; et al. | 2009-08-13 |
| Plasma CVD apparatus and dry cleaning method of the same Grant 7,569,256 - Ichijo August 4, 2 | 2009-08-04 |
| Method of manufacturing a semiconductor device Grant 7,538,011 - Yamazaki , et al. May 26, 2 | 2009-05-26 |
| Method For Manufacturing Semiconductor Device App 20090011611 - ICHIJO; Mitsuhiro ; et al. | 2009-01-08 |
| Display device and manufacturing method thereof App 20080308807 - Yamazaki; Shunpei ; et al. | 2008-12-18 |
| Film formation method and manufacturing method of semiconductor device Grant 7,465,966 - Ichijo , et al. December 16, 2 | 2008-12-16 |
| Semiconductor substrate and manufacturing method of semiconductor device App 20080296724 - Yamazaki; Shunpei ; et al. | 2008-12-04 |
| Manufacturing a semiconductor device Grant 7,442,592 - Ichijo , et al. October 28, 2 | 2008-10-28 |
| Luminescent device and process of manufacturing the same App 20080251792 - Murakami; Satoshi ; et al. | 2008-10-16 |
| Luminescent device and process of manufacturing the same Grant 7,408,191 - Murakami , et al. August 5, 2 | 2008-08-05 |
| Semiconductor film, semiconductor device and method of their production Grant 7,384,828 - Asami , et al. June 10, 2 | 2008-06-10 |
| Semiconductor device and method of manufacturing the same Grant 7,368,335 - Asami , et al. May 6, 2 | 2008-05-06 |
| Method of manufacturing a semiconductor device Grant 7,316,947 - Yamazaki , et al. January 8, 2 | 2008-01-08 |
| Method of manufacturing a semiconductor device App 20070298555 - Yamazaki; Shunpei ; et al. | 2007-12-27 |
| Method of manufacturing a semiconductor device Grant 7,306,982 - Yamazaki , et al. December 11, 2 | 2007-12-11 |
| Manufacturing method for semiconductor device App 20070254416 - Asami; Taketomi ; et al. | 2007-11-01 |
| Method of manufacturing a semiconductor device App 20070202667 - Asami; Taketomi ; et al. | 2007-08-30 |
| Plasma Cvd Apparatus And Dry Cleaning Method Of The Same App 20070181146 - ICHIJO; Mitsuhiro | 2007-08-09 |
| Plasma CVD apparatus and dry cleaning method of the same Grant 7,223,446 - Ichijo May 29, 2 | 2007-05-29 |
| Manufacturing method for semiconductor device Grant 7,220,613 - Asami , et al. May 22, 2 | 2007-05-22 |
| Method of manufacturing a semiconductor device with a fluorine concentration Grant 7,208,394 - Asami , et al. April 24, 2 | 2007-04-24 |
| Method of manufacturing a semiconductor film by plasma CVD using a noble gas and nitrogen Grant 7,199,027 - Ichijo , et al. April 3, 2 | 2007-04-03 |
| Method of manufacturing a semiconductor device Grant 7,169,689 - Yamazaki , et al. January 30, 2 | 2007-01-30 |
| Manufacturing a semiconductor device App 20070004109 - Ichijo; Mitsuhiro ; et al. | 2007-01-04 |
| Semiconductor Device and Method of Manufacturing the Same App 20060246638 - Asami; Taketomi ; et al. | 2006-11-02 |
| Method of manufacturing a semiconductor device Grant 7,109,074 - Ichijo , et al. September 19, 2 | 2006-09-19 |
| Semiconductor device and method of manufacturing the same Grant 7,034,337 - Asami , et al. April 25, 2 | 2006-04-25 |
| Display device and method for manufacturing the same App 20060043510 - Yamazaki; Shunpei ; et al. | 2006-03-02 |
| Method of manufacturing a semiconductor device App 20050202602 - Asami, Taketomi ; et al. | 2005-09-15 |
| Method of manufacturing a semiconductor device App 20050158922 - Yamazaki, Shunpei ; et al. | 2005-07-21 |
| Semiconductor device and method of manufacturing the same App 20050151132 - Nakazawa, Misako ; et al. | 2005-07-14 |
| Method of manufacturing a semiconductor device App 20050079656 - Ichijo, Mitsuhiro ; et al. | 2005-04-14 |
| Method of manufacturing a semiconductor device with fluorine concentration Grant 6,875,674 - Asami , et al. April 5, 2 | 2005-04-05 |
| Semiconductor device and method of manufacturing the same Grant 6,867,077 - Nakazawa , et al. March 15, 2 | 2005-03-15 |
| Method of manufacturing a semiconductor device App 20050032336 - Yamazaki, Shunpei ; et al. | 2005-02-10 |
| Manufacturing method for semiconductor device App 20050026320 - Asami, Taketomi ; et al. | 2005-02-03 |
| Semiconductor film, semiconductor device and method of their production App 20050020037 - Asami, Taketomi ; et al. | 2005-01-27 |
| Method of manufacturing a semiconductor device Grant 6,821,828 - Ichijo , et al. November 23, 2 | 2004-11-23 |
| Semiconductor film, semiconductor device, and manufacturing method thereof App 20040224486 - Ichijo, Mitsuhiro ; et al. | 2004-11-11 |
| Method of manufacturing a semiconductor device Grant 6,808,968 - Yamazaki , et al. October 26, 2 | 2004-10-26 |
| Film formation method and manufacturing method of semiconductor device App 20040185673 - Ichijo, Mitsuhiro ; et al. | 2004-09-23 |
| Manufacturing method for semiconductor device Grant 6,794,229 - Asami , et al. September 21, 2 | 2004-09-21 |
| Semiconductor device and method of manufacturing the same App 20040169177 - Asami, Taketomi ; et al. | 2004-09-02 |
| Luminescent device and process of manufacturing the same App 20040157564 - Murakami, Satoshi ; et al. | 2004-08-12 |
| Plasma CVD apparatus and dry cleaning method of the same App 20040139915 - Ichijo, Mitsuhiro | 2004-07-22 |
| Semiconductor film, semiconductor device and method of their production Grant 6,743,700 - Asami , et al. June 1, 2 | 2004-06-01 |
| Luminescent device having thin film transistor Grant 6,717,181 - Murakami , et al. April 6, 2 | 2004-04-06 |
| Semiconductor device and method of manufacturing the same Grant 6,703,265 - Asami , et al. March 9, 2 | 2004-03-09 |
| Plasma CVD apparatus and dry cleaning method of the same Grant 6,675,816 - Ichijo January 13, 2 | 2004-01-13 |
| Semiconductor device and method of manufacturing the same App 20030193052 - Nakazawa, Misako ; et al. | 2003-10-16 |
| Method of manufacturing a semiconductor device App 20030162334 - Yamazaki, Shunpei ; et al. | 2003-08-28 |
| Method of manufacturing a semiconductor device App 20030082859 - Ichijo, Mitsuhiro ; et al. | 2003-05-01 |
| Method of manufacturing a semiconductor device having a crystallized amorphous silicon film Grant 6,506,636 - Yamazaki , et al. January 14, 2 | 2003-01-14 |
| Luminescent device and process of manufacturing the same App 20020190256 - Murakami, Satoshi ; et al. | 2002-12-19 |
| Semiconductor film, semiconductor device and method of their production App 20020182828 - Asami, Taketomi ; et al. | 2002-12-05 |
| Method Of Manufacturing A Semiconductor Device App 20020151120 - Yamazaki, Shunpei ; et al. | 2002-10-17 |
| Method of manufacturing a semiconductor device App 20020115271 - Yamazaki, Shunpei ; et al. | 2002-08-22 |
| Semiconductor device and method of manufacturing the same App 20020014625 - Asami, Taketomi ; et al. | 2002-02-07 |
| Method of manufacturing a semiconductor device App 20020013022 - Yamazaki, Shunpei ; et al. | 2002-01-31 |
| Manufacturing method for semiconductor device App 20020004261 - Asami, Taketomi ; et al. | 2002-01-10 |
| Method of manufacturing a semiconductor device App 20020004262 - Asami, Taketomi ; et al. | 2002-01-10 |
| Plasma CVD apparatus and dry cleaning method of the same App 20010025606 - Ichijo, Mitsuhiro | 2001-10-04 |
| Plasma treatment apparatus Grant 5,330,578 - Sakama , et al. July 19, 1 | 1994-07-19 |
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