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Patent applications and USPTO patent grants for Ibe; Taisuke.The latest application filed is for "suction device, carry-in method, carrier system and exposure apparatus, and device manufacturing method".
Patent | Date |
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Suction device, carry-in method, carrier system and exposure apparatus, and device manufacturing method Grant 11,289,362 - Ichinose , et al. March 29, 2 | 2022-03-29 |
Suction Device, Carry-in Method, Carrier System And Exposure Apparatus, And Device Manufacturing Method App 20200176298 - ICHINOSE; Go ;   et al. | 2020-06-04 |
Suction device, carry-in method, carrier system and exposure apparatus, and device manufacturing method Grant 10,586,728 - Ichinose , et al. | 2020-03-10 |
Suction Device, Carry-in Method, Carrier System And Exposure Apparatus, And Device Manufacturing Method App 20190172745 - ICHINOSE; Go ;   et al. | 2019-06-06 |
Suction device, carry-in method, carrier system and exposure apparatus, and device manufacturing method Grant 10,242,903 - Ichinose , et al. | 2019-03-26 |
Suction Device, Carry-in Method, Carrier System And Exposure Apparatus, And Device Manufacturing Method App 20160005636 - ICHINOSE; Go ;   et al. | 2016-01-07 |
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