Hwung; Daniel
Patent Applications and Registrations
Patent applications and USPTO patent grants for Hwung; Daniel.The latest application filed is for "gas distribution assemblies and operation thereof".
- Hwung; Daniel - Los Gatos CA
| Patent | Date |
|---|---|
| Horizontal heat choke faceplate design Grant 10,907,252 - Zhang , et al. February 2, 2 | 2021-02-02 |
| Faceplate with embedded heater Grant 10,889,894 - Hwung , et al. January 12, 2 | 2021-01-12 |
| Gas Distribution Assemblies And Operation Thereof App 20200098547 - DASH; Priyanka ; et al. | 2020-03-26 |
| System and method for substrate processing chambers Grant 10,600,624 - Ghosh , et al. | 2020-03-24 |
| Faceplate With Embedded Heater App 20200040452 - HWUNG; Daniel ; et al. | 2020-02-06 |
| High Temperature Faceplate With Hybrid Material Design App 20190226089 - ZHANG; Yuxing ; et al. | 2019-07-25 |
| Heated Ceramic Faceplate App 20190226087 - ZHANG; Yuxing ; et al. | 2019-07-25 |
| High Temperature Faceplate With Thermal Choke And Cooling App 20190226088 - ZHANG; Yuxing ; et al. | 2019-07-25 |
| Horizontal Heat Choke Faceplate Design App 20190119816 - ZHANG; Yuxing ; et al. | 2019-04-25 |
| System And Method For Substrate Processing Chambers App 20190122872 - GHOSH; Kalyanjit ; et al. | 2019-04-25 |
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