Patent | Date |
---|
Inspection system including parallel imaging paths with multiple and selectable spectral bands Grant 10,429,319 - Hwang , et al. October 1, 2 | 2019-10-01 |
Optical imaging system with catoptric objective; broadband objective with mirror; and refractive lenses and broadband optical imaging system having two or more imaging paths Grant 9,052,494 - Hwang , et al. June 9, 2 | 2015-06-09 |
Inspection System Including Parallel Imaging Paths with Multiple and Selectable Spectral Bands App 20140285657 - Hwang; Shiow-Hwei ;   et al. | 2014-09-25 |
Optical imaging system with laser droplet plasma illuminator Grant 8,575,576 - Solarz , et al. November 5, 2 | 2013-11-05 |
Optical Imaging System With Catoptric Objective; Broadband Objective With Mirror; And Refractive Lenses And Broadband Optical Imaging System Having Two Or More Imaging Paths App 20130155399 - Hwang; Shiow-Hwei ;   et al. | 2013-06-20 |
Methods and systems for inspection of a specimen using different inspection parameters Grant 8,384,887 - Lange , et al. February 26, 2 | 2013-02-26 |
Systems configured to generate output corresponding to defects on a specimen Grant 8,355,140 - Hwang , et al. January 15, 2 | 2013-01-15 |
Optical Imaging System With Laser Droplet Plasma Illuminator App 20120205546 - Solarz; Richard W. ;   et al. | 2012-08-16 |
Image collection Grant 8,178,860 - Kirk , et al. May 15, 2 | 2012-05-15 |
Optical Imaging System With Catoptric Objective; Broadband Objective With Mirror; And Refractive Lenses And Broadband Optical Imaging System Having Two Or More Imaging Paths App 20110242528 - Hwang; Shiow-Hwei ;   et al. | 2011-10-06 |
Systems Configured to Generate Output Corresponding to Defects on a Specimen App 20110181891 - Hwang; Shiow-Hwei ;   et al. | 2011-07-28 |
Systems configured to generate output corresponding to defects on a specimen Grant 7,924,434 - Hwang , et al. April 12, 2 | 2011-04-12 |
Image Collection App 20110043797 - Kirk; Gregory L. ;   et al. | 2011-02-24 |
Methods And Systems For Inspection Of A Specimen Using Different Inspection Parameters App 20100238433 - Lange; Steve R. ;   et al. | 2010-09-23 |
Methods and systems for inspection of a specimen using different inspection parameters Grant 7,738,089 - Lange , et al. June 15, 2 | 2010-06-15 |
System and method for coherent optical inspection Grant 7,327,464 - Hwang , et al. February 5, 2 | 2008-02-05 |
System And Method For Coherent Optical Inspection App 20070195332 - Hwang; Shiow-Hwei ;   et al. | 2007-08-23 |
System and method for performing bright field and dark field optical inspection Grant 7,259,869 - Hwang , et al. August 21, 2 | 2007-08-21 |
System and method for coherent optical inspection Grant 7,209,239 - Hwang , et al. April 24, 2 | 2007-04-24 |
Systems Configured to Generate Output Corresponding to Defects on a Specimen App 20070030477 - Hwang; Shiow-Hwei ;   et al. | 2007-02-08 |
Method and apparatus using microscopic and interferometric based detection Grant 7,095,507 - Hwang , et al. August 22, 2 | 2006-08-22 |
Method and apparatus using interferometric metrology for high aspect ratio inspection Grant 7,061,625 - Hwang , et al. June 13, 2 | 2006-06-13 |
System and method for performing bright field and dark field optical inspection App 20060007448 - Hwang; Shiow-Hwei ;   et al. | 2006-01-12 |
Methods and systems for inspection of a specimen using different inspection parameters App 20050052643 - Lange, Steve R. ;   et al. | 2005-03-10 |
System and method for coherent optical inspection App 20040130710 - Hwang, Shiow-Hwei ;   et al. | 2004-07-08 |