| Patent | Date |
|---|
Methods of fabricating semiconductor devices including support patterns
Grant 10,438,799 - Park , et al. O | 2019-10-08 |
Semiconductor device and method of manufacturing the same
Grant 10,109,529 - Koh , et al. October 23, 2 | 2018-10-23 |
Semiconductor devices utilizing spacer structures
Grant 9,985,106 - Park , et al. May 29, 2 | 2018-05-29 |
Methods of manufacturing semiconductor devices
Grant 9,960,169 - Lee , et al. May 1, 2 | 2018-05-01 |
Semiconductor Devices Utilizing Spacer Structures
App 20180040707 - Park; Sang Jine ; et al. | 2018-02-08 |
Methods of Fabricating Semiconductor Devices Including Support Patterns
App 20180040483 - Park; Sang Jine ; et al. | 2018-02-08 |
Semiconductor device and method of manufacturing the same
Grant 9,659,940 - Park , et al. May 23, 2 | 2017-05-23 |
Semiconductor Device And Method Of Manufacturing The Same
App 20170084710 - Koh; Young-ho ; et al. | 2017-03-23 |
Semiconductor devices having plug insulators
Grant 9,390,961 - Lee , et al. July 12, 2 | 2016-07-12 |
Methods of Fabricating Semiconductor Devices
App 20160079260 - Bae; Jin-woo ; et al. | 2016-03-17 |
Methods of fabricating semiconductor devices
Grant 9,269,720 - Bae , et al. February 23, 2 | 2016-02-23 |
Semiconductor Devices Having Self-aligned Contact Pads
App 20160027786 - KIM; Young-Kuk ; et al. | 2016-01-28 |
Semiconductor devices having self-aligned contact pads
Grant 9,240,414 - Kim , et al. January 19, 2 | 2016-01-19 |
Methods of manufacturing semiconductor devices having self-aligned contact pads
Grant 9,184,227 - Kim , et al. November 10, 2 | 2015-11-10 |
Semiconductor Device And Method Of Forming Thereof
App 20150311297 - IM; Badro ; et al. | 2015-10-29 |
Semiconductor Devices Having Self-aligned Contact Pads And Methods Of Manufacturing The Same
App 20150311276 - KIM; YOUNG-KUK ; et al. | 2015-10-29 |
Semiconductor Device and Method of Fabricating the Same
App 20150171163 - LEE; Mong-Sup ; et al. | 2015-06-18 |
Method of fabricating semiconductor device
Grant 8,962,455 - Choi , et al. February 24, 2 | 2015-02-24 |
Method of manufacturing semiconductor device
Grant 8,748,254 - Lee , et al. June 10, 2 | 2014-06-10 |
Memory device
Grant 8,723,297 - Son , et al. May 13, 2 | 2014-05-13 |
Chemical-mechanical polishing apparatus for manufacturing semiconductor devices
Grant 8,662,958 - Ahn , et al. March 4, 2 | 2014-03-04 |
Method Of Fabricating Semiconductor Device
App 20130341710 - CHOI; Sang-Hyun ; et al. | 2013-12-26 |
Semiconductor devices including gate structure and method of fabricating the same
Grant 8,604,550 - Lee , et al. December 10, 2 | 2013-12-10 |
Apparatus and method for removing a photoresist structure from a substrate
Grant 8,551,288 - Kim , et al. October 8, 2 | 2013-10-08 |
Method Of Manufacturing Semiconductor Device
App 20130052787 - Lee; Kwang-wook ; et al. | 2013-02-28 |
Memory Device
App 20120025283 - Son; Yoon-Ho ; et al. | 2012-02-02 |
Semiconductor Devices Including Gate Structure And Method Of Fabricating The Same
App 20110284968 - Lee; Kwang-Wook ; et al. | 2011-11-24 |
Methods of fabricating recessed channel metal oxide semiconductor (MOS) transistors
Grant 8,058,128 - Lee , et al. November 15, 2 | 2011-11-15 |
Chemical-mechanical Polishing Apparatus For Manufacturing Semiconductor Devices
App 20110171882 - Ahn; Jong-sun ; et al. | 2011-07-14 |
Methods Of Fabricating Recessed Channel Metal Oxide Semiconductor (mos) Transistors
App 20100255649 - Lee; Keum-Joo ; et al. | 2010-10-07 |
Methods of forming a silicon oxide layer and methods of forming an isolation layer
App 20100173470 - Lee; Mong-Sup ; et al. | 2010-07-08 |
Method of fabricating integrated circuit semiconductor device having gate metal silicide layer
App 20100093165 - Bae; Ki-ho ; et al. | 2010-04-15 |
Wiring structure of a semiconductor device and method of forming the same
Grant 7,573,132 - Chung , et al. August 11, 2 | 2009-08-11 |
Apparatus And Method For Cleaning A Substrate
App 20090133722 - KOH; Jeong-Deog ; et al. | 2009-05-28 |
Apparatus and method for removing a photoresist structure from a substrate
App 20080264566 - Kim; In-Gi ; et al. | 2008-10-30 |
Methods of reworking a semiconductor substrate and methods of forming a pattern in a semiconductor device
App 20080220375 - Kim; Kyoung-Chul ; et al. | 2008-09-11 |
Methods Of Using Corrosion-inhibiting Cleaning Compositions For Metal Layers And Patterns On Semiconductor Substrates
App 20080214006 - Lee; Kwang-Wook ; et al. | 2008-09-04 |
Apparatus and method for removing a photoresist structure from a substrate
Grant 7,405,164 - Kim , et al. July 29, 2 | 2008-07-29 |
Etching Method For Manufacturing Semiconductor Device
App 20080102595 - LEE; Won-Jun ; et al. | 2008-05-01 |
Method for forming a capacitor for use in a semiconductor device
Grant 7,361,547 - Lee , et al. April 22, 2 | 2008-04-22 |
Etching method for manufacturing semiconductor device
Grant 7,338,610 - Lee , et al. March 4, 2 | 2008-03-04 |
Methods of forming a conductive structure
App 20070138126 - Lee; Keum-Joo ; et al. | 2007-06-21 |
Apparatus and method for removing a photoresist structure from a substrate
App 20070020943 - Kim; In-Gi ; et al. | 2007-01-25 |
Wiring structure of a semiconductor device and method of forming the same
App 20070020975 - Chung; Dae-Hyuk ; et al. | 2007-01-25 |
Method of cleaning a semiconductor device and method of manufacturing a semiconductor device using the same
App 20070004218 - Lee; Keum-Joo ; et al. | 2007-01-04 |
Methods of Forming Corrosion-Inhibiting Cleaning Compositions for Metal Layers and Patterns on Semiconductor Substrates
App 20060287208 - Lee; Kwang-Wook ; et al. | 2006-12-21 |
Method Of Removing A Photoresist Pattern And Method Of Manufacturing A Semiconductor Device Using The Same
App 20060270241 - Kim; Kyoung-Chul ; et al. | 2006-11-30 |
Chemical supply system and chemical mixing apparatus
Grant 7,025,493 - Min , et al. April 11, 2 | 2006-04-11 |
Method for forming a planarized layer of a semiconductor device
Grant 7,008,755 - Park , et al. March 7, 2 | 2006-03-07 |
Corrosion-inhibiting cleaning compositions for metal layers and patterns on semiconductor substrates
App 20050261151 - Lee, Kwang-Wook ; et al. | 2005-11-24 |
Cleaning solution including aqueous ammonia solution, acetic acid and deionized water for integrated circuit devices and methods of cleaning integrated circuit devices using the same
Grant 6,946,431 - Yeo , et al. September 20, 2 | 2005-09-20 |
Method of forming storage nodes comprising a base in a contact hole and related structures
Grant 6,943,081 - Lee , et al. September 13, 2 | 2005-09-13 |
Corrosion-inhibiting cleaning compositions for metal layers and patterns on semiconductor substrates
App 20050176604 - Lee, Kwang-Wook ; et al. | 2005-08-11 |
Method for forming a capacitor for use in a semiconductor device
App 20050170603 - Lee, Wook ; et al. | 2005-08-04 |
Cleaning solution and method of cleaning a semiconductor device using the same
App 20050139233 - Lee, Kwang-Wook ; et al. | 2005-06-30 |
One-cylinder stack capacitor and method for fabricating the same
Grant 6,911,364 - Oh , et al. June 28, 2 | 2005-06-28 |
Method for drying a wafer and apparatus for performing the same
Grant 6,889,447 - Lee , et al. May 10, 2 | 2005-05-10 |
Method of manufacturing void-free shallow trench isolation layer
App 20050079682 - Lee, Mi-Jin ; et al. | 2005-04-14 |
Cleaning solution and method of cleaning a semiconductor device using the same
Grant 6,875,706 - Lee , et al. April 5, 2 | 2005-04-05 |
Etching method for manufacturing semiconductor device
App 20050064674 - Lee, Won-Jun ; et al. | 2005-03-24 |
Method of cleaning a substrate and an apparatus thereof
App 20050028842 - Kim, Tae-Hyun ; et al. | 2005-02-10 |
Etching method for manufacturing semiconductor device
App 20050026452 - Lee, Won-Jun ; et al. | 2005-02-03 |
Method of fabricating shallow trench isolation structure and microelectronic device having the structure
App 20050023634 - Yoon, Byoung-Moon ; et al. | 2005-02-03 |
Method and apparatus for cleaning a semiconductor substrate
Grant 6,837,943 - Lee , et al. January 4, 2 | 2005-01-04 |
Method of forming a contact hole of a semiconductor device
Grant 6,838,330 - Moon , et al. January 4, 2 | 2005-01-04 |
Method for forming a silicide film of a semiconductor device
Grant 6,831,012 - Kang , et al. December 14, 2 | 2004-12-14 |
Etching compositions for silicon germanium and etching methods using the same
App 20040242015 - Kim, Kyoung-Chul ; et al. | 2004-12-02 |
Spin chuck for wafer or LCD processing
App 20040231711 - Park, Cheol-woo ; et al. | 2004-11-25 |
Method for cleaning damaged layers and polymer residue from semiconductor device
Grant 6,802,911 - Lee , et al. October 12, 2 | 2004-10-12 |
Method of forming a contact hole of a semiconductor device
App 20040121590 - Moon, Bong-Ho ; et al. | 2004-06-24 |
Method and apparatus for cleaning a semiconductor substrate
App 20040112405 - Lee, Kwang-wook ; et al. | 2004-06-17 |
Cleaning solution and method of cleaning a semiconductor device using the same
App 20040115909 - Lee, Kwang-Wook ; et al. | 2004-06-17 |
Cleaning solution including aqueous ammonia solution, acetic acid and deionized water for integrated circuit devices and methods of cleaning integratedd circuit devices using the same
App 20040097389 - Yeo, In-Joon ; et al. | 2004-05-20 |
One-cylinder stack capacitor and method for fabricating the same
App 20040085708 - Oh, Jung-Hwan ; et al. | 2004-05-06 |
Trench isolation regions having recess-inhibiting layers therein that protect against overetching
Grant 6,717,231 - Kim , et al. April 6, 2 | 2004-04-06 |
Method of forming a self-aligned contact pad for use in a semiconductor device
Grant 6,706,633 - Chung , et al. March 16, 2 | 2004-03-16 |
Shallow trench isolation type semiconductor device and method of forming the same
Grant 6,699,773 - Lee , et al. March 2, 2 | 2004-03-02 |
One-cylinder stack capacitor and method for fabricating the same
Grant 6,700,153 - Oh , et al. March 2, 2 | 2004-03-02 |
Method for forming a silicide film of a semiconductor device
App 20040029378 - Kang, Dae-Keun ; et al. | 2004-02-12 |
Method for forming a planarized layer of a semiconductor device
App 20040005518 - Park, Ki-Jong ; et al. | 2004-01-08 |
Method for drying a wafer and apparatus for performing the same
App 20030233764 - Lee, Kwang-Wook ; et al. | 2003-12-25 |
Method of forming storage nodes comprising a base in a contact hole and related structures
App 20030227045 - Lee, Won-Jun ; et al. | 2003-12-11 |
One-cylinder stack capacitor and method for fabricating the same
App 20030121132 - Oh, Jung-Hwan ; et al. | 2003-07-03 |
Wafer guide and cleaning apparatus having the same
App 20030106575 - Moon, Bong-Ho ; et al. | 2003-06-12 |
Cylindrical capacitors having a stepped sidewall and methods for fabricating the same
Grant 6,548,853 - Hwang , et al. April 15, 2 | 2003-04-15 |
Method for cleaning damaged layers and polymer residue from semiconductor device
App 20030056806 - Lee, Keum Joo ; et al. | 2003-03-27 |
Shallow trench isolation type semiconductor device and method of forming the same
App 20030042539 - Lee, Keum-Joo ; et al. | 2003-03-06 |
Trench isolation regions having recess-inhibiting layers therein that protect against overetching
App 20030038334 - Kim, Sung-eui ; et al. | 2003-02-27 |
Shallow trench isolation type semiconductor device and method of forming the same
Grant 6,500,726 - Lee , et al. December 31, 2 | 2002-12-31 |
Chemical supply system and chemical mixing apparatus
App 20020191486 - Min, Chung-Ki ; et al. | 2002-12-19 |
Method of forming a self-aligned contact pad for use in a semiconductor device
App 20020155687 - Chung, Dae-Hyuk ; et al. | 2002-10-24 |
Methods of forming trench isolation regions having recess-inhibiting layers therein that protect against overetching
Grant 6,461,937 - Kim , et al. October 8, 2 | 2002-10-08 |
Cleaning solutions for removing contaminants from the surfaces of semiconductor substrates and cleaning methods using the same
Grant 6,369,008 - Ha , et al. April 9, 2 | 2002-04-09 |
Shallow trench isolation type semiconductor device and method of forming the same
App 20020020887 - Lee, Keum-Joo ; et al. | 2002-02-21 |
Shallow trench isolation type semiconductor device and method of the same
App 20020003275 - Lee, Keum-Joo ; et al. | 2002-01-10 |
Method for forming self-aligned selective silicide layer using chemical mechanical polishing in merged DRAM logic
Grant 6,146,994 - Hwang November 14, 2 | 2000-11-14 |
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