Patent | Date |
---|
Thin film type solar cell and method for manufacturing the same Grant 8,889,470 - Kim , et al. November 18, 2 | 2014-11-18 |
Thin film type solar cell and method for manufacturing the same App 20090308436 - Kim; Jae Ho ;   et al. | 2009-12-17 |
Semiconductor substrate, semiconductor device and method of manufacturing the same Grant 7,391,098 - Hwang June 24, 2 | 2008-06-24 |
Semiconductor substrate, semiconductor device and method of manufacturing the same App 20060118915 - Hwang; Chul Ju | 2006-06-08 |
Atomic layer deposition method Grant 6,872,421 - Hwang , et al. March 29, 2 | 2005-03-29 |
Apparatus for semiconductor device and method using the same App 20050000453 - Hwang, Chul-Ju ;   et al. | 2005-01-06 |
Gas injector adapted for ALD process Grant 6,769,629 - Hwang , et al. August 3, 2 | 2004-08-03 |
Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors App 20040035362 - Hwang, Chul-Ju ;   et al. | 2004-02-26 |
Semiconductor device manufacturing apparatus having rotatable gas injector and thin film deposition method using the same Grant 6,656,284 - Hwang , et al. December 2, 2 | 2003-12-02 |
Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors Grant 6,634,314 - Hwang , et al. October 21, 2 | 2003-10-21 |
Gas injector adapted for ALD process App 20030116652 - Hwang, Chul Ju ;   et al. | 2003-06-26 |
Cluster tool for fabricating semiconductor device Grant 6,530,993 - Hwang , et al. March 11, 2 | 2003-03-11 |
Apparatus for fabricating a semiconductor device App 20030015292 - Hwang, Chul Ju ;   et al. | 2003-01-23 |
Apparatus for fabricating a semiconductor device App 20030015142 - Hwang, Chul Ju ;   et al. | 2003-01-23 |
Apparatus for fabricating semiconductor device and method for fabricating semiconductor using the same Grant 6,383,953 - Hwang May 7, 2 | 2002-05-07 |
Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors App 20020043216 - Hwang, Chul-Ju ;   et al. | 2002-04-18 |
High vacuum apparatus for fabricating semiconductor device and method for forming epitaxial layer using the same App 20010051429 - Hwang, Chul-Ju ;   et al. | 2001-12-13 |
Apparatus for fabricating semiconductor device and method for fabricating semiconductor using the same App 20010022295 - Hwang, Chul Ju | 2001-09-20 |
Method for fabricating gate oxide film of semiconductor device App 20010023136 - Yang, Doo Young ;   et al. | 2001-09-20 |
High density plasma chemical vapor deposition apparatus and gap filling method using the same App 20010021592 - Lee, Young Suk ;   et al. | 2001-09-13 |
Apparatus for low pressure chemical vapor depostion Grant 6,190,460 - Hwang February 20, 2 | 2001-02-20 |
Method for forming a high-permittivity dielectric film use in a semiconductor device Grant 6,180,542 - Hwang January 30, 2 | 2001-01-30 |
Apparatus for low pressure chemical vapor deposition Grant 6,026,764 - Hwang February 22, 2 | 2000-02-22 |
Apparatus for low pressure chemical vapor deposition Grant 6,009,831 - Hwang January 4, 2 | 2000-01-04 |
Apparatus for low pressure chemical vapor deposition Grant 5,928,427 - Hwang July 27, 1 | 1999-07-27 |
Apparatus for low pressure chemical vapor deposition Grant 5,441,570 - Hwang August 15, 1 | 1995-08-15 |