Patent | Date |
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Apparatus For Supplying Gas And Apparatus For Processing Substrate Using The Same App 20220307136 - KIM; Ki Bum ;   et al. | 2022-09-29 |
Substrate supporting apparatus Grant 11,417,562 - Chun , et al. August 16, 2 | 2022-08-16 |
Substrate Processing Apparatus Having Exhaust Gas Decomposer, And Exhaust Gas Processing Method Therefor App 20220220613 - SEO; Dong Won ;   et al. | 2022-07-14 |
Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor Grant 11,371,142 - Seo , et al. June 28, 2 | 2022-06-28 |
Substrate Processing Device And Substrate Processing Method App 20210358719 - HWANG; Chul-Joo | 2021-11-18 |
Thin Film Forming Device And Thin Film Forming Method Using The Same App 20210296114 - KOO; Bun Hei ;   et al. | 2021-09-23 |
Substrate Supporting Apparatus App 20210082738 - CHUN; Dong Seok ;   et al. | 2021-03-18 |
Substrate Processing Apparatus Having Exhaust Gas Decomposer, And Exhaust Gas Processing Method Therefor App 20210002761 - SEO; Dong Won ;   et al. | 2021-01-07 |
Substrate Inspection Device And Substrate Inspection Method App 20200341049 - JUNG; Gu Hyun ;   et al. | 2020-10-29 |
Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor Grant 10,808,315 - Seo , et al. October 20, 2 | 2020-10-20 |
Gas Spraying Apparatus Of Substrate Processing Apparatus, Substrate Processing Apparatus And Substrate Processing Method App 20200219700 - CHEON; Min Ho ;   et al. | 2020-07-09 |
Substrate Placing Part That Is Arranged In Substrate Processing Apparatus App 20200027776 - KANG; Ho Chul ;   et al. | 2020-01-23 |
Substrate processing device and substrate processing method Grant 10,504,701 - Han , et al. Dec | 2019-12-10 |
Substrate processing method Grant 10,373,821 - Shin , et al. | 2019-08-06 |
Substrate Treating Apparatus And Method App 20190136379 - Hwang; Chul Joo ;   et al. | 2019-05-09 |
Substrate treating apparatus and method Grant 10,202,690 - Hwang , et al. Feb | 2019-02-12 |
Substrate Processing Apparatus App 20190035607 - KIM; Se Young ;   et al. | 2019-01-31 |
Substrate Processing Apparatus Having Exhaust Gas Decomposer, And Exhaust Gas Processing Method Therefor App 20180305815 - SEO; Dong Won ;   et al. | 2018-10-25 |
Substrate Treatment Device And Substrate Treatment Method App 20180269078 - CHEON; Min Ho ;   et al. | 2018-09-20 |
Apparatus And Method For Processing Substrate App 20180130674 - HAN; Tae Seong ;   et al. | 2018-05-10 |
Substrate Processing Method App 20170345647 - SHIN; Seung Chul ;   et al. | 2017-11-30 |
Substrate Processing Device And Substrate Processing Method App 20170330733 - HAN; Jeung Hoon ;   et al. | 2017-11-16 |
Substrate processing device and substrate processing method Grant 9,748,077 - Han , et al. August 29, 2 | 2017-08-29 |
Substrate Processing Apparatus App 20160153086 - KWAK; Jae Chan ;   et al. | 2016-06-02 |
Gas Supply Apparatus App 20160115595 - HWANG; Chul Joo ;   et al. | 2016-04-28 |
Substrate Processing Device And Substrate Processing Method App 20150235812 - Han; Jeung Hoon ;   et al. | 2015-08-20 |
Substrate Treatment Apparatus And Substrate Treatment Method App 20150225848 - Han; Jeung Hoon ;   et al. | 2015-08-13 |
Substrate Treating Apparatus And Method App 20150111391 - Hwang; Chul Joo ;   et al. | 2015-04-23 |
Apparatus having conveyor and method of transferring substrate using the same Grant 8,545,159 - Hwang , et al. October 1, 2 | 2013-10-01 |
Substrate supporting means having wire and apparatus using the same Grant 7,942,623 - Hwang , et al. May 17, 2 | 2011-05-17 |
Substrate Supporting Means Having Wire And Apparatus Using The Same App 20100260589 - HWANG; Chul-Joo ;   et al. | 2010-10-14 |
Substrate supporting means having wire and apparatus using the same Grant 7,771,538 - Hwang , et al. August 10, 2 | 2010-08-10 |
Substrate supporting means having wire and apparatus using the same App 20050155557 - Hwang, Chul-Joo ;   et al. | 2005-07-21 |
Apparatus having conveyor and method of transferring substrate using the same App 20050074312 - Hwang, Chul-Joo ;   et al. | 2005-04-07 |