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Via structure with low resistivity and method for forming the same
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Via Structure With Low Resistivity And Method For Forming The Same
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Via structure with low resistivity and method for forming the same
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Via Structure With Low Resistivity And Method For Forming The Same
App 20200058785 - TSAI; Kuo-Chiang ; et al. | 2020-02-20 |
Ion implantation with charge and direction control
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Ion beam dimension control for ion implantation process and apparatus, and advanced process control
Grant 9,805,913 - Hwang , et al. October 31, 2 | 2017-10-31 |
Method for monitoring ion implantation
Grant 9,449,889 - Chang , et al. September 20, 2 | 2016-09-20 |
Nitrogen-containing oxide film and method of forming the same
Grant 9,330,901 - Tu , et al. May 3, 2 | 2016-05-03 |
Ion Beam Dimension Control For Ion Implantation Process And Apparatus, And Advanced Process Control
App 20150270103 - HWANG; Chih-Hong ; et al. | 2015-09-24 |
Method for Monitoring Ion Implantation
App 20150221561 - Chang; Chun-Lin ; et al. | 2015-08-06 |
Ion beam dimension control for ion implantation process and apparatus, and advanced process control
Grant 9,070,534 - Hwang , et al. June 30, 2 | 2015-06-30 |
System and method of ion neutralization with multiple-zoned plasma flood gun
Grant 9,053,907 - Chang , et al. June 9, 2 | 2015-06-09 |
Multi-factor advanced process control method and system for integrated circuit fabrication
Grant 9,031,684 - Cheng , et al. May 12, 2 | 2015-05-12 |
Apparatus for monitoring ion implantation
Grant 9,006,676 - Chang , et al. April 14, 2 | 2015-04-14 |
ION Implantation with Charge and Direction Control
App 20150069913 - Hwang; Chih-Hong ; et al. | 2015-03-12 |
Ion implantation with charge and direction control
Grant 08922122 - | 2014-12-30 |
Ion implantation with charge and direction control
Grant 8,922,122 - Hwang , et al. December 30, 2 | 2014-12-30 |
Beam Monitoring Device, Method, and System
App 20140306119 - Hwang; Chih-Hong ; et al. | 2014-10-16 |
Nitrogen-containing Oxide Film And Method Of Forming The Same
App 20140246758 - Tu; An-Chun ; et al. | 2014-09-04 |
Beam monitoring device, method, and system
Grant 8,766,207 - Hwang , et al. July 1, 2 | 2014-07-01 |
System and method of ion beam source for semiconductor ion implantation
Grant 8,664,622 - Hwang , et al. March 4, 2 | 2014-03-04 |
Multi-ion beam implantation apparatus and method
Grant 8,592,785 - Cheng , et al. November 26, 2 | 2013-11-26 |
Apparatus for monitoring ion implantation
Grant 8,581,204 - Chang , et al. November 12, 2 | 2013-11-12 |
Ion Beam Dimension Control For Ion Implantation Process And Apparatus, And Advanced Process Control
App 20130295753 - HWANG; Chih-Hong ; et al. | 2013-11-07 |
Apparatus for Monitoring Ion Implantation
App 20130280823 - Chang; Chun-Lin ; et al. | 2013-10-24 |
System And Method Of Ion Beam Source For Semiconductor Ion Implantation
App 20130270454 - HWANG; Chih-Hong ; et al. | 2013-10-17 |
Ion Implantation With Charge And Direction Control
App 20130140987 - Hwang; Chih-Hong ; et al. | 2013-06-06 |
Multi-factor Advanced Process Control Method And System For Integrated Circuit Fabrication
App 20130110276 - Cheng; Nai-Han ; et al. | 2013-05-02 |
Beam Monitoring Device, Method, And System
App 20130075624 - Hwang; Chih-Hong ; et al. | 2013-03-28 |
Multi-ion Beam Implantation Apparatus And Method
App 20130075623 - CHENG; Nai-Han ; et al. | 2013-03-28 |
Apparatus for Monitoring Ion Implantation
App 20130068960 - Chang; Chun-Lin ; et al. | 2013-03-21 |
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