Huston; Joel M.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Huston; Joel M..The latest application filed is for "support assembly".
Company Profile
7.20.31
- Huston; Joel M. - San Jose CA
- Huston; Joel M. - Los Gatos CA
- Huston; Joel M. - Sunnyvale CA
Patent Activity
| Patent | Date |
|---|---|
| Support Assembly App 20210225640 - Kao; Chien-Teh ; et al. | 2021-07-22 |
| High temperature process chamber lid Grant 10,879,090 - Durukan , et al. December 29, 2 | 2020-12-29 |
| Support assembly Grant 10,593,539 - Kao , et al. | 2020-03-17 |
| Support Assembly App 20200006054 - KAO; Chien-Teh ; et al. | 2020-01-02 |
| Dual-direction chemical delivery system for ALD/CVD chambers Grant 10,400,335 - Ge , et al. Sep | 2019-09-03 |
| Substrate Processing Chamber Having Heated Showerhead Assembly App 20190078210 - GUNGOR; FARUK ; et al. | 2019-03-14 |
| Substrate Support For Reduced Damage Substrate Backside App 20190080951 - HUSTON; Joel M. ; et al. | 2019-03-14 |
| High Temperature Process Chamber Lid App 20180053667 - Durukan; Ilker ; et al. | 2018-02-22 |
| Dual-Direction Chemical Delivery System For ALD/CVD Chambers App 20170362710 - Ge; Zhenbin ; et al. | 2017-12-21 |
| Hot wall reactor with cooled vacuum containment Grant 9,837,250 - Huston , et al. December 5, 2 | 2017-12-05 |
| High temperature process chamber lid Grant 9,831,109 - Durukan , et al. November 28, 2 | 2017-11-28 |
| Dual-direction chemical delivery system for ALD/CVD chambers Grant 9,765,432 - Ge , et al. September 19, 2 | 2017-09-19 |
| Methods and apparatus for in-situ cleaning of a process chamber Grant 9,627,185 - Huston , et al. April 18, 2 | 2017-04-18 |
| Substrate support with controlled sealing gap Grant 9,543,186 - Cuvalci , et al. January 10, 2 | 2017-01-10 |
| Dual-Direction Chemical Delivery System For ALD/CVD Chambers App 20160273108 - Ge; Zhenbin ; et al. | 2016-09-22 |
| Dual-direction chemical delivery system for ALD/CVD chambers Grant 9,353,440 - Ge , et al. May 31, 2 | 2016-05-31 |
| Dual-Direction Chemical Delivery System for ALD/CVD Chambers App 20150176126 - Ge; Zhenbin ; et al. | 2015-06-25 |
| Methods And Apparatus For In-situ Cleaning Of A Process Chamber App 20150155142 - HUSTON; JOEL M. ; et al. | 2015-06-04 |
| Hot Wall Reactor With Cooled Vacuum Containment App 20150059981 - HUSTON; JOEL M. ; et al. | 2015-03-05 |
| Method for removing oxides Grant 8,846,163 - Kao , et al. September 30, 2 | 2014-09-30 |
| High Temperature Process Chamber Lid App 20140252015 - Durukan; Ilker ; et al. | 2014-09-11 |
| Substrate Support With Controlled Sealing Gap App 20140217665 - CUVALCI; OLKAN ; et al. | 2014-08-07 |
| Apparatus And Methods For Symmetrical Gas Distribution With High Purge Efficiency App 20140174362 - Kao; Chien-Teh ; et al. | 2014-06-26 |
| Modular Chemical Delivery System App 20140137961 - KAO; CHIEN-TEH ; et al. | 2014-05-22 |
| Multi Chamber Processing System App 20140076234 - KAO; Chien-Teh ; et al. | 2014-03-20 |
| Showerhead assembly Grant 8,343,307 - Huston January 1, 2 | 2013-01-01 |
| Support Assembly App 20120267346 - Kao; Chien-Teh ; et al. | 2012-10-25 |
| Method For Removing Oxides App 20120244704 - KAO; Chien-Teh ; et al. | 2012-09-27 |
| Method For Removing Oxides App 20110223755 - KAO; CHIEN-TEH ; et al. | 2011-09-15 |
| Direct real-time monitoring and feedback control of RF plasma output for wafer processing Grant 7,910,853 - Or , et al. March 22, 2 | 2011-03-22 |
| Method for front end of line fabrication Grant 7,767,024 - Kao , et al. August 3, 2 | 2010-08-03 |
| Direct Real-time Monitoring And Feedback Control Of Rf Plasma Output For Wafer Processing App 20090218324 - Or; David T. ; et al. | 2009-09-03 |
| Method For Removing Oxides App 20090111280 - Kao; Chien-Teh ; et al. | 2009-04-30 |
| Lid assembly for front end of line fabrication Grant 7,520,957 - Kao , et al. April 21, 2 | 2009-04-21 |
| Support Assembly App 20090095621 - Kao; Chien-Teh ; et al. | 2009-04-16 |
| Showerhead Assembly App 20090095334 - Huston; Joel M. | 2009-04-16 |
| Method For Front End Of Line Fabrication App 20080268645 - KAO; CHIEN-TEH ; et al. | 2008-10-30 |
| Method for front end of line fabrication Grant 7,396,480 - Kao , et al. July 8, 2 | 2008-07-08 |
| In-situ dry clean chamber for front end of line fabrication App 20050230350 - Kao, Chien-Teh ; et al. | 2005-10-20 |
| Lid assembly for front end of line fabrication App 20050218507 - Kao, Chien-Teh ; et al. | 2005-10-06 |
| Substrate support for in-situ dry clean chamber for front end of line fabrication App 20050221552 - Kao, Chien-Teh ; et al. | 2005-10-06 |
| Method for front end of line fabrication App 20050205110 - Kao, Chien-Teh ; et al. | 2005-09-22 |
| Piezoelectric vaporizer Grant 6,926,774 - Yoshidome , et al. August 9, 2 | 2005-08-09 |
| Piezoelectric vaporizer App 20030094133 - Yoshidome, Ted G. ; et al. | 2003-05-22 |
| Method and apparatus for tuning a plurality of processing chambers App 20030003696 - Gelatos, Avgerinos ; et al. | 2003-01-02 |
| Liquid vaporizers for semiconductor processing systems Grant 6,332,601 - Huston , et al. December 25, 2 | 2001-12-25 |
| Fluid delivery system and method Grant 6,083,321 - Lei , et al. July 4, 2 | 2000-07-04 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.
| 