loadpatents
Patent applications and USPTO patent grants for Huston; Joel M..The latest application filed is for "support assembly".
Patent | Date |
---|---|
Support Assembly App 20210225640 - Kao; Chien-Teh ;   et al. | 2021-07-22 |
High temperature process chamber lid Grant 10,879,090 - Durukan , et al. December 29, 2 | 2020-12-29 |
Support assembly Grant 10,593,539 - Kao , et al. | 2020-03-17 |
Support Assembly App 20200006054 - KAO; Chien-Teh ;   et al. | 2020-01-02 |
Dual-direction chemical delivery system for ALD/CVD chambers Grant 10,400,335 - Ge , et al. Sep | 2019-09-03 |
Substrate Processing Chamber Having Heated Showerhead Assembly App 20190078210 - GUNGOR; FARUK ;   et al. | 2019-03-14 |
Substrate Support For Reduced Damage Substrate Backside App 20190080951 - HUSTON; Joel M. ;   et al. | 2019-03-14 |
High Temperature Process Chamber Lid App 20180053667 - Durukan; Ilker ;   et al. | 2018-02-22 |
Dual-Direction Chemical Delivery System For ALD/CVD Chambers App 20170362710 - Ge; Zhenbin ;   et al. | 2017-12-21 |
Hot wall reactor with cooled vacuum containment Grant 9,837,250 - Huston , et al. December 5, 2 | 2017-12-05 |
High temperature process chamber lid Grant 9,831,109 - Durukan , et al. November 28, 2 | 2017-11-28 |
Dual-direction chemical delivery system for ALD/CVD chambers Grant 9,765,432 - Ge , et al. September 19, 2 | 2017-09-19 |
Methods and apparatus for in-situ cleaning of a process chamber Grant 9,627,185 - Huston , et al. April 18, 2 | 2017-04-18 |
Substrate support with controlled sealing gap Grant 9,543,186 - Cuvalci , et al. January 10, 2 | 2017-01-10 |
Dual-Direction Chemical Delivery System For ALD/CVD Chambers App 20160273108 - Ge; Zhenbin ;   et al. | 2016-09-22 |
Dual-direction chemical delivery system for ALD/CVD chambers Grant 9,353,440 - Ge , et al. May 31, 2 | 2016-05-31 |
Dual-Direction Chemical Delivery System for ALD/CVD Chambers App 20150176126 - Ge; Zhenbin ;   et al. | 2015-06-25 |
Methods And Apparatus For In-situ Cleaning Of A Process Chamber App 20150155142 - HUSTON; JOEL M. ;   et al. | 2015-06-04 |
Hot Wall Reactor With Cooled Vacuum Containment App 20150059981 - HUSTON; JOEL M. ;   et al. | 2015-03-05 |
Method for removing oxides Grant 8,846,163 - Kao , et al. September 30, 2 | 2014-09-30 |
High Temperature Process Chamber Lid App 20140252015 - Durukan; Ilker ;   et al. | 2014-09-11 |
Substrate Support With Controlled Sealing Gap App 20140217665 - CUVALCI; OLKAN ;   et al. | 2014-08-07 |
Apparatus And Methods For Symmetrical Gas Distribution With High Purge Efficiency App 20140174362 - Kao; Chien-Teh ;   et al. | 2014-06-26 |
Modular Chemical Delivery System App 20140137961 - KAO; CHIEN-TEH ;   et al. | 2014-05-22 |
Multi Chamber Processing System App 20140076234 - KAO; Chien-Teh ;   et al. | 2014-03-20 |
Showerhead assembly Grant 8,343,307 - Huston January 1, 2 | 2013-01-01 |
Support Assembly App 20120267346 - Kao; Chien-Teh ;   et al. | 2012-10-25 |
Method For Removing Oxides App 20120244704 - KAO; Chien-Teh ;   et al. | 2012-09-27 |
Method For Removing Oxides App 20110223755 - KAO; CHIEN-TEH ;   et al. | 2011-09-15 |
Direct real-time monitoring and feedback control of RF plasma output for wafer processing Grant 7,910,853 - Or , et al. March 22, 2 | 2011-03-22 |
Method for front end of line fabrication Grant 7,767,024 - Kao , et al. August 3, 2 | 2010-08-03 |
Direct Real-time Monitoring And Feedback Control Of Rf Plasma Output For Wafer Processing App 20090218324 - Or; David T. ;   et al. | 2009-09-03 |
Method For Removing Oxides App 20090111280 - Kao; Chien-Teh ;   et al. | 2009-04-30 |
Lid assembly for front end of line fabrication Grant 7,520,957 - Kao , et al. April 21, 2 | 2009-04-21 |
Support Assembly App 20090095621 - Kao; Chien-Teh ;   et al. | 2009-04-16 |
Showerhead Assembly App 20090095334 - Huston; Joel M. | 2009-04-16 |
Method For Front End Of Line Fabrication App 20080268645 - KAO; CHIEN-TEH ;   et al. | 2008-10-30 |
Method for front end of line fabrication Grant 7,396,480 - Kao , et al. July 8, 2 | 2008-07-08 |
In-situ dry clean chamber for front end of line fabrication App 20050230350 - Kao, Chien-Teh ;   et al. | 2005-10-20 |
Lid assembly for front end of line fabrication App 20050218507 - Kao, Chien-Teh ;   et al. | 2005-10-06 |
Substrate support for in-situ dry clean chamber for front end of line fabrication App 20050221552 - Kao, Chien-Teh ;   et al. | 2005-10-06 |
Method for front end of line fabrication App 20050205110 - Kao, Chien-Teh ;   et al. | 2005-09-22 |
Piezoelectric vaporizer Grant 6,926,774 - Yoshidome , et al. August 9, 2 | 2005-08-09 |
Piezoelectric vaporizer App 20030094133 - Yoshidome, Ted G. ;   et al. | 2003-05-22 |
Method and apparatus for tuning a plurality of processing chambers App 20030003696 - Gelatos, Avgerinos ;   et al. | 2003-01-02 |
Liquid vaporizers for semiconductor processing systems Grant 6,332,601 - Huston , et al. December 25, 2 | 2001-12-25 |
Fluid delivery system and method Grant 6,083,321 - Lei , et al. July 4, 2 | 2000-07-04 |
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