| Patent | Date |
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Lift Pin Mechanism
App 20220293452 - SULYMAN; Alexander ; et al. | 2022-09-15 |
Lift Pin Assembly
App 20220293451 - SULYMAN; Alexander ; et al. | 2022-09-15 |
Temperature controlled secondary electrode for ion control at substrate edge
Grant 11,424,096 - Noorbakhsh , et al. August 23, 2 | 2022-08-23 |
Methods and apparatus for dechucking wafers
Grant 11,171,030 - Noorbakhsh , et al. November 9, 2 | 2021-11-09 |
Sheath And Temperature Control Of A Process Kit In A Substrate Processing Chamber
App 20210296098 - CHO; Jaeyong ; et al. | 2021-09-23 |
Helical Plug For Reduction Or Prevention Of Arcing In A Substrate Support
App 20210242063 - WAKABAYASHI; REYN T. ; et al. | 2021-08-05 |
Temperature Controlled Secondary Electrode For Ion Control At Substrate Edge
App 20210134554 - NOORBAKHSH; HAMID ; et al. | 2021-05-06 |
Scroll Activity Detection for Selection and Display of Information
App 20210055842 - Husain; Anwar | 2021-02-25 |
Electrostatic chuck assembly having a dielectric filler
Grant 10,930,540 - Ramaswamy , et al. February 23, 2 | 2021-02-23 |
Edge Ring Assembly For A Substrate Support In A Plasma Processing Chamber
App 20210043428 - NOORBAKHSH; Hamid ; et al. | 2021-02-11 |
Apparatus For Reduction Or Prevention Of Arcing In A Substrate Support
App 20200411355 - NOORBAKHSH; Hamid ; et al. | 2020-12-31 |
Methods And Apparatus For Reducing High Voltage Arcing In Semiconductor Process Chambers
App 20200381282 - HUSAIN; Anwar ; et al. | 2020-12-03 |
Edge ring assembly for a substrate support in a plasma processing chamber
Grant 10,847,347 - Noorbakhsh , et al. November 24, 2 | 2020-11-24 |
Methods And Apparatus For Dechucking Wafers
App 20200357675 - NOORBAKHSH; HAMID ; et al. | 2020-11-12 |
Electrostatic Chuck Assembly Having A Dielectric Filler
App 20200066566 - Ramaswamy; Kartik ; et al. | 2020-02-27 |
Edge Ring Assembly For A Substrate Support In A Plasma Processing Chamber
App 20200066495 - NOORBAKHSH; Hamid ; et al. | 2020-02-27 |
Electrostatic chuck assembly having a dielectric filler
Grant 10,504,765 - Ramaswamy , et al. Dec | 2019-12-10 |
Method To Modulate The Wafer Edge Sheath In A Plasma Processing Chamber
App 20180323042 - WANG; Haitao ; et al. | 2018-11-08 |
Electrostatic Chuck Assembly Having A Dielectric Filler
App 20180308736 - Ramaswamy; Kartik ; et al. | 2018-10-25 |
Plasma processing chamber with a grounded electrode assembly
Grant 9,905,402 - Kholodenko , et al. February 27, 2 | 2018-02-27 |
Ion Implanter And Method For Ion Implantation
App 20160217970 - HUSAIN; Anwar ; et al. | 2016-07-28 |
Method And Ion Implanter For Low Temperature Implantation
App 20160203950 - HUSAIN; Anwar ; et al. | 2016-07-14 |
Plasma Processing Chamber With a Grounded Electrode Assembly
App 20150325416 - Kholodenko; Arnold ; et al. | 2015-11-12 |
Methods for Confinement of Foam Delivered by a Proximity Head
App 20140251382 - Kholodenko; Arnold ; et al. | 2014-09-11 |
Confinement of foam delivered by a proximity head
Grant 8,739,805 - Kholodenko , et al. June 3, 2 | 2014-06-03 |
Single substrate processing head for particle removal using low viscosity fluid
Grant 8,584,613 - Kholodenko , et al. November 19, 2 | 2013-11-19 |
Method for using generator for foam to clean substrate
Grant 8,557,051 - Kholodenko , et al. October 15, 2 | 2013-10-15 |
Method for Using Generator for Foam to Clean Substrate
App 20120255618 - Kholodenko; Arnold ; et al. | 2012-10-11 |
Wafer carrier drive apparatus and method for operating the same
Grant 8,261,905 - Kholodenko , et al. September 11, 2 | 2012-09-11 |
Generator for foam to clean substrate
Grant 8,161,984 - Kholodenko , et al. April 24, 2 | 2012-04-24 |
Wafer Carrier Drive Apparatus and Method for Operating the Same
App 20100230243 - Kholodenko; Arnold ; et al. | 2010-09-16 |
Apparatus for an optimized plasma chamber grounded electrode assembly
Grant 7,743,730 - Kholodenko , et al. June 29, 2 | 2010-06-29 |
Confinement of Foam Delivered by a Proximity Head
App 20100126528 - Kholodenko; Arnold ; et al. | 2010-05-27 |
Generator For Foam To Clean Substrate
App 20100024842 - Kholodenko; Arnold ; et al. | 2010-02-04 |
Single Substrate Processing Head For Particle Removal Using Low Viscosity Fluid
App 20090320942 - Kholodenko; Arnold ; et al. | 2009-12-31 |
Semiconductor Substrate Cleaning System
App 20080041422 - Brown; Brian J. ; et al. | 2008-02-21 |
Apparatus for an optimized plasma chamber grounded electrode assembly
App 20070137573 - Kholodenko; Arnold ; et al. | 2007-06-21 |
Spin-rinse-dryer
Grant 7,226,514 - Husain , et al. June 5, 2 | 2007-06-05 |
Semiconductor substrate cleaning system
App 20060180177 - Brown; Brian J. ; et al. | 2006-08-17 |
Semiconductor substrate cleaning system
App 20030200988 - Brown, Brian J. ; et al. | 2003-10-30 |
Semiconductor substrate cleaning system
Grant 6,575,177 - Brown , et al. June 10, 2 | 2003-06-10 |
Spin-rinse-dryer
App 20030079762 - Husain, Anwar ; et al. | 2003-05-01 |
Gripper for supporting substrate in a vertical orientation
App 20030026683 - Govzman, Boris I. ; et al. | 2003-02-06 |
Gripper for supporting substrate in a vertical orientation
Grant 6,474,712 - Govzman , et al. November 5, 2 | 2002-11-05 |
Apparatus for transferring semiconductor substrates using an input module
Grant 6,406,359 - Birang , et al. June 18, 2 | 2002-06-18 |
Method and apparatus for controlling a temperature of a wafer
Grant 6,303,895 - Husain , et al. October 16, 2 | 2001-10-16 |
Multilayered electrostatic chuck and method of manufacture thereof
Grant 5,880,922 - Husain March 9, 1 | 1999-03-09 |
Multilayered electrostatic chuck and method of manufacture thereof
Grant 5,671,116 - Husain September 23, 1 | 1997-09-23 |
Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity
Grant 5,548,470 - Husain , et al. August 20, 1 | 1996-08-20 |
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