Hurwitt; Steven

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hurwitt; Steven.The latest application filed is for "method and apparatus for sputter coating with variable target to substrate spacing".

Company Profile

0.18.1

Hurwitt; Steven - Park Ridge NJ

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Sputtering apparatus with isolated coolant and sputtering target therefor Grant 6,689,254 - Hurwitt February 10, 2	2004-02-10
Method and apparatus for sputter coating with variable target to substrate spacing Grant 6,623,606 - Hurwitt , et al. September 23, 2	2003-09-23
Method and apparatus for sputter coating with variable target to substrate spacing App 20020144891 - Hurwitt, Steven ; et al.	2002-10-10
Method and apparatus for sputter coating with variable target to substrate spacing Grant 6,416,635 - Hurwitt , et al. July 9, 2	2002-07-09
Apparatus and method for clamping a substrate Grant 5,925,226 - Hurwitt , et al. July 20, 1	1999-07-20
Composite backing plate for a sputtering target Grant 5,879,524 - Hurwitt , et al. March 9, 1	1999-03-09
Magnetic device for rotating a substrate Grant 5,795,448 - Hurwitt , et al. August 18, 1	1998-08-18
Sputtering cathode with uniformity compensation Grant 5,783,048 - Hurwitt July 21, 1	1998-07-21
Sputtering apparatus having an on board service module Grant 5,620,578 - Hurwitt April 15, 1	1997-04-15
Sputtering target with machine readable indicia Grant 5,449,445 - Shinneman , et al. * September 12, 1	1995-09-12
Plasma shaping plug for control of sputter etching Grant 5,391,281 - Hieronymi , et al. February 21, 1	1995-02-21
Target for cathode sputtering Grant 5,336,386 - Marx , et al. August 9, 1	1994-08-09
Method and apparatus for sputter coating employing machine readable indicia carried by target assembly Grant 5,284,561 - Shinneman , et al. February 8, 1	1994-02-08
Extended lifetime collimator Grant 5,223,108 - Hurwitt June 29, 1	1993-06-29
Method of preventing condensation of air borne moisture onto objects in a vessel during pumping thereof Grant 5,205,051 - Hurwitt April 27, 1	1993-04-27
Semiconductor wafer processing module having an inclined rotating wafer handling turret and a method of using the module Grant 5,154,730 - Hodos , et al. October 13, 1	1992-10-13
Magnetron sputter coating method and apparatus with rotating magnet cathode Grant 5,130,005 - Hurwitt , et al. July 14, 1	1992-07-14
Method for controlling the thickness of ceramic tape Grant 3,991,149 - Hurwitt November 9, 1	1976-11-09
Method for drying ceramic tape Grant 3,953,703 - Hurwitt April 27, 1	1976-04-27

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