Hurevich; Igor
Patent Applications and Registrations
Patent applications and USPTO patent grants for Hurevich; Igor.The latest application filed is for "illumination system for microlithography".
- Hurevich; Igor - Saarbruecken DE
| Patent | Date |
|---|---|
| Illumination system for microlithography Grant 10,088,754 - Scholz , et al. October 2, 2 | 2018-10-02 |
| Illumination System For Microlithography App 20170192361 - Scholz; Axel ; et al. | 2017-07-06 |
| Illumination system for microlithography Grant 9,606,441 - Scholz , et al. March 28, 2 | 2017-03-28 |
| Illumination System For Microlithography App 20160161858 - Scholz; Axel ; et al. | 2016-06-09 |
| Illumination system for microlithography Grant 9,280,060 - Scholz , et al. March 8, 2 | 2016-03-08 |
| Illumination System For Microlithography App 20150022798 - Scholz; Axel ; et al. | 2015-01-22 |
| Illumination system for microlithography Grant 8,873,023 - Scholz , et al. October 28, 2 | 2014-10-28 |
| Illumination System For Microlithography App 20120019796 - Scholz; Axel ; et al. | 2012-01-26 |
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