Patent | Date |
---|
Method and apparatus for substrate imaging Grant 7,969,465 - Batson , et al. June 28, 2 | 2011-06-28 |
Sensor device for non-intrusive diagnosis of a semiconductor processing system Grant 7,434,485 - Hunter October 14, 2 | 2008-10-14 |
Sensor device for non-intrusive diagnosis of a semiconductor processing system Grant 7,331,250 - Hunter February 19, 2 | 2008-02-19 |
Method And Apparatus For Substrate Imaging App 20070085905 - Batson; Don T. ;   et al. | 2007-04-19 |
Sensor Device For Non-intrusive Diagnosis Of A Semiconductor Processing System App 20070022832 - Hunter; Reginald | 2007-02-01 |
Sensor Device For Non-intrusive Diagnosis Of A Semiconductor Processing System App 20060236793 - Hunter; Reginald | 2006-10-26 |
Method and apparatus to provide for automated process verification and hierarchical substrate examination Grant 7,012,684 - Hunter March 14, 2 | 2006-03-14 |
Sensor device for non-intrusive diagnosis of a semiconductor processing system App 20050126315 - Hunter, Reginald | 2005-06-16 |
Sensor device for non-intrusive diagnosis of a semiconductor processing system Grant 6,895,831 - Hunter May 24, 2 | 2005-05-24 |
Methods for continuous embedded process monitoring and optical inspection of substrates using specular signature analysis Grant 6,882,416 - Hunter , et al. April 19, 2 | 2005-04-19 |
Method for enhancing substrate processing Grant 6,878,636 - Bailey , et al. April 12, 2 | 2005-04-12 |
Method and apparatus for enhanced embedded substrate inspection through process data collection and substrate imaging techniques Grant 6,813,032 - Hunter November 2, 2 | 2004-11-02 |
Method and apparatus to provide embedded substrate process monitoring through consolidation of multiple process inspection techniques Grant 6,721,045 - Hunter April 13, 2 | 2004-04-13 |
Particle detection and embedded vision system to enhance substrate yield and throughput Grant 6,707,544 - Hunter , et al. March 16, 2 | 2004-03-16 |
Optical signal routing method and apparatus providing multiple inspection collection points on semiconductor manufacturing systems Grant 6,707,545 - Hunter March 16, 2 | 2004-03-16 |
Particle detection and embedded vision system to enhance substrate yield and throughput Grant 6,697,517 - Hunter February 24, 2 | 2004-02-24 |
Method and apparatus for substrate surface inspection using spectral profiling techniques Grant 6,693,708 - Hunter February 17, 2 | 2004-02-17 |
Method for confirming alignment of a substrate support mechanism in a semiconductor processing system Grant 6,677,166 - Hunter January 13, 2 | 2004-01-13 |
Sensor device for non-intrusive diagnosis of a semiconductor processing system App 20030209097 - Hunter, Reginald | 2003-11-13 |
Movable wireless sensor device for performing diagnostics with a substrate processing system Grant 6,642,853 - Hunter November 4, 2 | 2003-11-04 |
Method and apparatus for embedded substrate and system status monitoring Grant 6,630,995 - Hunter October 7, 2 | 2003-10-07 |
Method for removing contamination particles from substrate processing chambers App 20030037800 - Bailey, Joel Brad ;   et al. | 2003-02-27 |
Method for enhancing substrate processing App 20030040193 - Bailey, Joel Brad ;   et al. | 2003-02-27 |
Method for increasing the efficiency of substrate processing chamber contamination detection App 20030037801 - Bailey, Joel Brad ;   et al. | 2003-02-27 |
Method and apparatus for substrate imaging App 20020196336 - Batson, Don T. ;   et al. | 2002-12-26 |
Method for sensing conditions within a substrate processing system Grant 6,468,816 - Hunter October 22, 2 | 2002-10-22 |
Method for confirming alignment of a substrate support mechanism in a semiconductor processing system App 20020092369 - Hunter, Reginald | 2002-07-18 |
Method for confirming alignment of a substrate support mechanism in a semiconductor processing system App 20020078770 - Hunter, Reginald | 2002-06-27 |
Sensor device for non-intrusive diagnosis of a semiconductor processing system App 20010042414 - Hunter, Reginald | 2001-11-22 |
Sensor device for non-intrusive diagnosis of a semiconductor processing system Grant 6,244,121 - Hunter June 12, 2 | 2001-06-12 |