Hunter, Jr.; Robert
Patent Applications and Registrations
Patent applications and USPTO patent grants for Hunter, Jr.; Robert.The latest application filed is for "method and apparatus for self-referenced wafer stage positional error mapping".
- Hunter, Jr.; Robert - San Diego CA
Trademarks
| Patent | Date |
|---|---|
| Method and apparatus for self-referenced wafer stage positional error mapping Grant 7,871,004 - Smith , et al. January 18, 2 | 2011-01-18 |
| Method and apparatus for self-referenced wafer stage positional error mapping Grant 7,271,905 - Smith , et al. September 18, 2 | 2007-09-18 |
| Reference wafer and process for manufacturing same Grant 7,160,657 - Smith , et al. January 9, 2 | 2007-01-09 |
| Method and apparatus for self-referenced projection lens distortion mapping Grant 7,099,011 - McArthur , et al. August 29, 2 | 2006-08-29 |
| Method and apparatus for self-referenced wafer stage positional error mapping Grant 6,734,971 - Smith , et al. May 11, 2 | 2004-05-11 |
| Reference wafer and process for manufacturing same Grant 6,699,627 - Smith , et al. March 2, 2 | 2004-03-02 |
| Method and apparatus for self-referenced projection lens distortion mapping Grant 6,573,986 - Smith , et al. June 3, 2 | 2003-06-03 |
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