Patent | Date |
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Rapid thermal processing chamber with micro-positioning system Grant 9,564,349 - Sorabji , et al. February 7, 2 | 2017-02-07 |
Transparent reflector plate for rapid thermal processing chamber Grant 9,449,858 - Koelmel , et al. September 20, 2 | 2016-09-20 |
Rapid thermal processing chamber with micro-positioning system Grant 9,390,950 - Sorabji , et al. July 12, 2 | 2016-07-12 |
Rapid Thermal Processing Chamber with Micro-Positioning System App 20150050118 - Sorabji; Khurshed ;   et al. | 2015-02-19 |
Rapid thermal processing chamber with micro-positioning system Grant 8,900,889 - Sorabji , et al. December 2, 2 | 2014-12-02 |
Rapid Thermal Processing Chamber With Micro-positioning System App 20130043235 - Sorabji; Khurshed ;   et al. | 2013-02-21 |
Rapid Thermal Processing Chamber With Micro-positioning System App 20130043632 - Sorabji; Khurshed ;   et al. | 2013-02-21 |
Apparatus including heating source reflective filter for pyrometry Grant 8,367,983 - Ranish , et al. February 5, 2 | 2013-02-05 |
Rapid thermal processing chamber with micro-positioning system Grant 8,314,371 - Sorabji , et al. November 20, 2 | 2012-11-20 |
Apparatus including heating source reflective filter for pyrometry Grant 8,283,607 - Ranish , et al. October 9, 2 | 2012-10-09 |
Method and apparatus for extended temperature pyrometry Grant 8,254,767 - Hunter , et al. August 28, 2 | 2012-08-28 |
Transparent Reflector Plate For Rapid Thermal Processing Chamber App 20120070136 - Koelmel; Blake R. ;   et al. | 2012-03-22 |
Temperature uniformity measurement during thermal processing Grant 8,109,669 - Aderhold , et al. February 7, 2 | 2012-02-07 |
Apparatus and Methods for Cyclical Oxidation and Etching App 20110061810 - Ganguly; Udayan ;   et al. | 2011-03-17 |
Apparatus and Methods for Cyclical Oxidation and Etching App 20110065276 - Ganguly; Udayan ;   et al. | 2011-03-17 |
Temperature Uniformity Measurement During Thermal Processing App 20100124249 - ADERHOLD; WOLFGANG ;   et al. | 2010-05-20 |
Multiple band pass filtering for pyrometry in laser based annealing systems Grant 7,717,617 - Adams , et al. May 18, 2 | 2010-05-18 |
Method and Apparatus for Extended Temperature Pyrometry App 20100054720 - Hunter; Aaron M. ;   et al. | 2010-03-04 |
Apparatus and Methods for Hyperbaric Rapid Thermal Processing App 20090298300 - Ranish; Joseph M. ;   et al. | 2009-12-03 |
Apparatus Including Heating Source Reflective Filter for Pyrometry App 20090289053 - Ranish; Joseph M. ;   et al. | 2009-11-26 |
Apparatus Including Heating Source Reflective Filter For Pyrometry App 20090255921 - Ranish; Joseph M. ;   et al. | 2009-10-15 |
Multiple band pass filtering for pyrometry in laser based annealing systems App 20090084986 - Adams; Bruce E. ;   et al. | 2009-04-02 |
Lamp array for thermal processing exhibiting improved radial uniformity Grant 7,509,035 - Ranish , et al. March 24, 2 | 2009-03-24 |
Methods For Plasma Matching Between Different Chambers And Plasma Stability Monitoring And Control App 20090030632 - TALLAVARJULA; SAIRAJU ;   et al. | 2009-01-29 |
Multiple band pass filtering for pyrometry in laser based annealing systems Grant 7,438,468 - Adams , et al. October 21, 2 | 2008-10-21 |
Rapid detection of imminent failure in laser thermal processing of a substrate Grant 7,422,988 - Adams , et al. September 9, 2 | 2008-09-09 |
Temperature Measurement And Control Of Wafer Support In Thermal Processing Chamber App 20080169282 - SORABJI; KHURSHED ;   et al. | 2008-07-17 |
Method And Apparatus For Heating A Substrate App 20080145038 - RANISH; JOSEPH M. ;   et al. | 2008-06-19 |
Method And Apparatus For Heating A Substrate App 20080142208 - RANISH; JOSEPH M. ;   et al. | 2008-06-19 |
Rapid detection of imminent failure in laser thermal processing of a substrate App 20060102599 - Adams; Bruce E. ;   et al. | 2006-05-18 |
Multiple band pass filtering for pyrometry in laser based annealing systems App 20060102607 - Adams; Bruce E. ;   et al. | 2006-05-18 |
Lamp array for thermal processing exhibiting improved radial uniformity App 20060066193 - Ranish; Joseph M. ;   et al. | 2006-03-30 |