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Identification of hot spots or defects by machine learning
Grant 11,443,083 - Su , et al. September 13, 2 | 2022-09-13 |
Identification Of Hot Spots Or Defects By Machine Learning
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Method And Apparatus For Predicting Substrate Image
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Process Window Optimizer
App 20220147665 - Hunsche; Stefan ; et al. | 2022-05-12 |
Process window optimizer
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Method And Apparatus For Image Analysis
App 20220026811 - MIDDLEBROOKS; Scott Anderson ; et al. | 2022-01-27 |
Process Window Based On Defect Probability
App 20210356874 - SLACHTER; Abraham ; et al. | 2021-11-18 |
Method and apparatus for image analysis
Grant 11,143,970 - Middlebrooks , et al. October 12, 2 | 2021-10-12 |
Focus and overlay improvement by modifying a patterning device
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Process Variability Aware Adaptive Inspection And Metrology
App 20210255548 - VELLANKI; Venugopal ; et al. | 2021-08-19 |
Metrology Data Correction Using Image Quality Metric
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Process window based on defect probability
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Selection Of Measurement Locations For Patterning Processes
App 20210216017 - VAN DER LAAN; Hans ; et al. | 2021-07-15 |
Method And Apparatus For Pattern Fidelity Control
App 20210181642 - HASAN; Tanbir ; et al. | 2021-06-17 |
Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method
Grant 11,022,900 - Mathijssen , et al. June 1, 2 | 2021-06-01 |
Process variability aware adaptive inspection and metrology
Grant 11,003,093 - Vellanki , et al. May 11, 2 | 2021-05-11 |
Selection of measurement locations for patterning processes
Grant 10,962,886 - Van Der Laan , et al. March 30, 2 | 2021-03-30 |
Method and apparatus for pattern fidelity control
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Process Window Based On Defect Probability
App 20210018850 - SLACHTER; Abraham ; et al. | 2021-01-21 |
Methods for defect validation
Grant 10,859,926 - Hunsche , et al. December 8, 2 | 2020-12-08 |
Displacement based overlay or alignment
Grant 10,852,646 - Jochemsen , et al. December 1, 2 | 2020-12-01 |
Method And Apparatus For Image Analysis
App 20200356009 - MIDDLEBROOKS; Scott Anderson ; et al. | 2020-11-12 |
Inspection Apparatus and Methods, Substrates Having Metrology Targets, Lithographic System and Device Manufacturing Method
App 20200348605 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2020-11-05 |
Focus And Overlay Improvement By Modifying A Patterning Device
App 20200310242 - VAN HAREN; Richard Johannes Franciscus ; et al. | 2020-10-01 |
Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method
Grant 10,761,432 - Mathijssen , et al. Sep | 2020-09-01 |
Method and apparatus for image analysis
Grant 10,732,513 - Middlebrooks , et al. | 2020-08-04 |
Method of predicting patterning defects caused by overlay error
Grant 10,712,672 - Jochemsen , et al. | 2020-07-14 |
Method and apparatus for image analysis
Grant 10,607,334 - Middlebrooks , et al. | 2020-03-31 |
Process Variability Aware Adaptive Inspection And Metrology
App 20200096871 - VELLANKI; Venugopal ; et al. | 2020-03-26 |
Method And Apparatus For Pattern Fidelity Control
App 20200019069 - HASAN; Tanbir ; et al. | 2020-01-16 |
Method And Apparatus For Image Analysis
App 20190391498 - MIDDLEBROOKS; Scott Anderson ; et al. | 2019-12-26 |
Process variability aware adaptive inspection and metrology
Grant 10,514,614 - Vellanki , et al. Dec | 2019-12-24 |
Focus-dose co-optimization based on overlapping process window
Grant 10,459,345 - Hunsche , et al. Oc | 2019-10-29 |
Method Of Predicting Patterning Defects Caused By Overlay Error
App 20190310553 - JOCHEMSEN; Marinus ; et al. | 2019-10-10 |
Method and apparatus for image analysis
Grant 10,437,157 - Middlebrooks , et al. O | 2019-10-08 |
Identification Of Hot Spots Or Defects By Machine Learning
App 20190147127 - SU; Jing ; et al. | 2019-05-16 |
Displacement Based Overlay Or Alignment
App 20190146358 - JOCHEMSEN; Marinus ; et al. | 2019-05-16 |
Selection Of Measurement Locations For Patterning Processes
App 20190025705 - VAN DER LAAN; Hans ; et al. | 2019-01-24 |
Process Window Optimizer
App 20180330030 - HUNSCHE; Stefan ; et al. | 2018-11-15 |
Inspection Apparatus and Methods, Substrates Having Metrology Targets, Lithographic System and Device Manufacturing Method
App 20180239263 - Mathijssen; Simon Gijsbert Josephus ; et al. | 2018-08-23 |
Methods For Defect Validation
App 20180173104 - HUNSCHE; Stefan ; et al. | 2018-06-21 |
Process window optimizer
Grant 9,990,451 - Hunsche , et al. June 5, 2 | 2018-06-05 |
Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method
Grant 9,958,791 - Mathijssen , et al. May 1, 2 | 2018-05-01 |
Focus-dose Co-optimization Based On Overlapping Process Window
App 20180074413 - HUNSCHE; Stefan ; et al. | 2018-03-15 |
Process Variability Aware Adaptive Inspection And Metrology
App 20180031981 - VELLANKI; Venugopal ; et al. | 2018-02-01 |
Method And Apparatus For Image Analysis
App 20170345138 - MIDDLEBROOKS; Scott Anderson ; et al. | 2017-11-30 |
Method And Apparatus For Image Analysis
App 20170336713 - MIDDLEBROOKS; Scott Anderson ; et al. | 2017-11-23 |
Scanner model representation with transmission cross coefficients
Grant 9,645,509 - Cao , et al. May 9, 2 | 2017-05-09 |
Inspection Apparatus and Methods, Substrates Having Metrology Targets, Lithographic System and Device Manufacturing Method
App 20160274472 - MATHIJSSEN; Simon Gijsbert Josephus ; et al. | 2016-09-22 |
Process Window Optimizer
App 20150227654 - HUNSCHE; Stefan ; et al. | 2015-08-13 |
Method and apparatus providing transient control in optical add-drop nodes
Grant 8,909,038 - Cannon , et al. December 9, 2 | 2014-12-09 |
Method for process window optimized optical proximity correction
Grant 8,832,610 - Ye , et al. September 9, 2 | 2014-09-09 |
Method For Process Window Optimized Optical Proximity Correction
App 20130219348 - YE; Jun ; et al. | 2013-08-22 |
Method for process window optimized optical proximity correction
Grant 8,413,081 - Ye , et al. April 2, 2 | 2013-04-02 |
Method For Process Window Optimized Optical Proximity Correction
App 20100180251 - Ye; Jun ; et al. | 2010-07-15 |
System and method for measuring and analyzing lithographic parameters and determining optimal process corrections
Grant 7,749,666 - Gassner , et al. July 6, 2 | 2010-07-06 |
Method for process window optimized optical proximity correction
Grant 7,694,267 - Ye , et al. April 6, 2 | 2010-04-06 |
Methods and devices for providing optical, serviced-enabled cross-connections
Grant 7,620,273 - Doshi , et al. November 17, 2 | 2009-11-17 |
Method for selecting and optimizing exposure tool using an individual mask error model
Grant 7,617,477 - Ye , et al. November 10, 2 | 2009-11-10 |
System and method for mask verification using an individual mask error model
Grant 7,587,704 - Ye , et al. September 8, 2 | 2009-09-08 |
System and method for characterizing aerial image quality in a lithography system
Grant 7,564,017 - Hunsche , et al. July 21, 2 | 2009-07-21 |
Method for lithography model calibration
Grant 7,488,933 - Ye , et al. February 10, 2 | 2009-02-10 |
Method For Selecting And Optimizing Exposure Tool Using An Individual Mask Error Model
App 20070061773 - Ye; Jun ; et al. | 2007-03-15 |
System And Method For Mask Verification Using An Individual Mask Error Model
App 20070061772 - Ye; Jun ; et al. | 2007-03-15 |
System And Method For Measuring And Analyzing Lithographic Parameters And Determining Optimal Process Corrections
App 20070035712 - Gassner; Michael J. ; et al. | 2007-02-15 |
Method For Lithography Model Calibration
App 20070032896 - Ye; Jun ; et al. | 2007-02-08 |
System and method for characterizing aerial image quality in a lithography system
App 20060273242 - Hunsche; Stefan ; et al. | 2006-12-07 |
Nonlinear device comprising a spectrally broadening fiber
Grant 7,139,478 - Eggleton , et al. November 21, 2 | 2006-11-21 |
Optical transmission using all-optical regeneration and dispersion techniques
Grant 7,099,594 - Grosz , et al. August 29, 2 | 2006-08-29 |
Method and apparatus for channel detection
Grant 6,867,852 - Hunsche March 15, 2 | 2005-03-15 |
Method, apparatus and system for reducing gain ripple in a raman-amplified WDM system
Grant 6,859,306 - Fishman , et al. February 22, 2 | 2005-02-22 |
Method and apparatus for channel detection
App 20040246466 - Hunsche, Stefan | 2004-12-09 |
Method and apparatus for controlling the extinction ratio of transmitters
Grant 6,819,480 - Altman , et al. November 16, 2 | 2004-11-16 |
Method and apparatus for Q-factor monitoring using forward error correction coding
App 20040218919 - Hunsche, Stefan ; et al. | 2004-11-04 |
Optical transmission using all-optical regeneration and dispersion techniques
App 20040208610 - Grosz, Diego F. ; et al. | 2004-10-21 |
Nonlinear device comprising a spectrally broadening fiber
App 20040208609 - Eggleton, Benjamin J ; et al. | 2004-10-21 |
Method and apparatus for signal conditioning of optical signals for fiber-optic transmission
App 20040208622 - Grosz, Diego Fernando ; et al. | 2004-10-21 |
Method, apparatus and system for reducing gain ripple in a raman-amplified WDM system
App 20040150875 - Fishman, Daniel A. ; et al. | 2004-08-05 |
Method and apparatus providing transient control in optical add-drop nodes
App 20040131353 - Cannon, Cristina Barbosa ; et al. | 2004-07-08 |
Method and apparatus for controlling the extinction ratio of transmitters
App 20030206674 - Altman, Lev ; et al. | 2003-11-06 |
Methods and devices for providing optical, serviced-enabled cross-connections
App 20020131153 - Doshi, Bharat Tarachand ; et al. | 2002-09-19 |
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