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Patent applications and USPTO patent grants for Hulsebos; Edo Maria.The latest application filed is for "measurement apparatus and a method for determining a substrate grid".
Patent | Date |
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Method for determining deformation Grant 11,181,836 - Hulsebos , et al. November 23, 2 | 2021-11-23 |
Measurement Apparatus And A Method For Determining A Substrate Grid App 20210341846 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2021-11-04 |
Determining A Correction To A Process App 20210333785 - ROY; Sarathi ;   et al. | 2021-10-28 |
Determining a correction to a process Grant 11,086,305 - Roy , et al. August 10, 2 | 2021-08-10 |
Measurement apparatus and a method for determining a substrate grid Grant 11,079,684 - Bijnen , et al. August 3, 2 | 2021-08-03 |
Lithographic method Grant 11,029,610 - Tinnemans , et al. June 8, 2 | 2021-06-08 |
Determining A Correction To A Process App 20210165399 - ROY; Sarathi ;   et al. | 2021-06-03 |
Method For Determining Deformation App 20210149316 - HULSEBOS; Edo Maria ;   et al. | 2021-05-20 |
Lithographic method Grant 10,962,887 - Tinnemans , et al. March 30, 2 | 2021-03-30 |
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus Grant 10,901,326 - Hulsebos , et al. January 26, 2 | 2021-01-26 |
Lithographic Method App 20200272061 - TINNEMANS; Patricius Aloysius Jacobus ;   et al. | 2020-08-27 |
Method Of Controlling A Lithographic Apparatus And Device Manufacturing Method, Control System For A Lithographic Apparatus And App 20200201194 - Hulsebos; Edo Maria ;   et al. | 2020-06-25 |
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus Grant 10,620,549 - Hulsebos , et al. | 2020-04-14 |
Lithographic Method App 20200081356 - TINNEMANS; Patricius Aloysius Jacobus ;   et al. | 2020-03-12 |
Lithographic method Grant 10,527,958 - Tinnemans , et al. J | 2020-01-07 |
Method and apparatus for processing a substrate in a lithographic apparatus Grant 10,527,957 - Sanchez-Fabres Cobaleda , et al. J | 2020-01-07 |
Alignment method Grant 10,514,620 - Bijnen , et al. Dec | 2019-12-24 |
Lithographic apparatus and device manufacturing method Grant 10,474,045 - Bijnen , et al. Nov | 2019-11-12 |
Method Of Controlling A Lithographic Apparatus And Device Manufacturing Method, Control System For A Lithographic Apparatus And App 20190265598 - HULSEBOS; Edo Maria ;   et al. | 2019-08-29 |
Measurement Apparatus And A Method For Determining A Substrate Grid App 20190235391 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2019-08-01 |
Alignment Method App 20190227446 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2019-07-25 |
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus Grant 10,331,040 - Hulsebos , et al. | 2019-06-25 |
Lithographic Method App 20190094721 - TINNEMANS; Patricius Aloysius Jacobus ;   et al. | 2019-03-28 |
Method And Apparatus For Processing A Substrate In A Lithographic Apparatus App 20180356742 - SANCHEZ-FABRES COBALEDA; Cayetano ;   et al. | 2018-12-13 |
Lithographic apparatus and device manufacturing method Grant 10,139,740 - Bijnen , et al. Nov | 2018-11-27 |
Method Of Controlling A Lithographic Apparatus And Device Manufacturing Method, Control System For A Lithographic Apparatus And Lithographic Apparatus App 20180284621 - HULSEBOS; Edo Maria ;   et al. | 2018-10-04 |
Lithographic Apparatus And Device Manufacturing Method App 20180196363 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2018-07-12 |
Lithographic apparatus and device manufacturing method Grant 9,665,012 - Hulsebos May 30, 2 | 2017-05-30 |
Lithographic Apparatus And Device Manufacturing Method App 20150241791 - Hulsebos; Edo Maria | 2015-08-27 |
Alignment system and alignment marks for use therewith Grant 8,208,140 - Hulsebos , et al. June 26, 2 | 2012-06-26 |
Alignment system and alignment marks for use therewith Grant 8,208,139 - Hulsebos , et al. June 26, 2 | 2012-06-26 |
Alignment System and Alignment Marks for Use Therewith App 20100214550 - HULSEBOS; Edo Maria ;   et al. | 2010-08-26 |
Alignment System and Alignment Marks for Use Therewith App 20090176167 - HULSEBOS; Edo Maria ;   et al. | 2009-07-09 |
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