loadpatents
Patent applications and USPTO patent grants for HUISMAN; Simon Reinald.The latest application filed is for "metrology system and method".
Patent | Date |
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Metrology System And Method App 20220283515 - ELAZHARY; Tamer Mohamed Tawfik Ahmed Mohamed ;   et al. | 2022-09-08 |
Alignment method and apparatus Grant 11,409,206 - Goorden , et al. August 9, 2 | 2022-08-09 |
Metrology sensor for position metrology Grant 11,360,399 - Goorden , et al. June 14, 2 | 2022-06-14 |
Position sensor Grant 11,333,985 - Goorden , et al. May 17, 2 | 2022-05-17 |
Metrology Method And Associated Metrology And Lithographic Apparatuses App 20220121128 - GOORDEN; Sebastianus Adrianus ;   et al. | 2022-04-21 |
Sensor apparatus and method for lithographic measurements Grant 11,300,892 - Huisman , et al. April 12, 2 | 2022-04-12 |
Apparatus For And Method Of Simultaneously Acquiring Parallel Alignment Marks App 20220100109 - ELAZHARY; Tamer Mohamed Tawfik Ahmed Mohamed ;   et al. | 2022-03-31 |
Metrology Sensor, Illumination System And Method Of Generating Measurement Illumination With A Configurable Illumination Spot Diameter App 20220057718 - GOORDEN; Sebastianus Adrianus ;   et al. | 2022-02-24 |
Metrology Sensor For Position Metrology App 20220035257 - GOORDEN; Sebastianus Adrianus ;   et al. | 2022-02-03 |
Level sensor and lithographic apparatus Grant 11,221,565 - Huisman , et al. January 11, 2 | 2022-01-11 |
Detection System For An Alignment Sensor App 20210382404 - HUISMAN; Simon Reinald | 2021-12-09 |
Metrology sensor, lithographic apparatus and method for manufacturing devices Grant 11,181,835 - Goorden , et al. November 23, 2 | 2021-11-23 |
Alignment sensor apparatus for process sensitivity compensation Grant 11,175,593 - Huisman , et al. November 16, 2 | 2021-11-16 |
Sensor Apparatus and Method for Lithographic Measurements App 20210271178 - HUISMAN; Simon Reinald ;   et al. | 2021-09-02 |
Alignment Method and Apparatus App 20210240091 - GOORDEN; Sebastianus Adrianus ;   et al. | 2021-08-05 |
Alignment measurement system Grant 11,042,096 - Witte , et al. June 22, 2 | 2021-06-22 |
Metrology Sensor, Lithographic Apparatus and Method for Manufacturing Devices App 20210157248 - GOORDEN; Sebastianus Adrianus ;   et al. | 2021-05-27 |
Alignment Sensor Apparatus for Process Sensivity Compensation App 20210132509 - HUISMAN; Simon Reinald ;   et al. | 2021-05-06 |
Position Sensor App 20210124276 - Goorden; Sebastianus Adrianus ;   et al. | 2021-04-29 |
Level Sensor and Lithographic Apparatus App 20210072652 - HUISMAN; Simon Reinald ;   et al. | 2021-03-11 |
Alignment measurement system Grant 10,942,461 - Huisman , et al. March 9, 2 | 2021-03-09 |
Method and apparatus for measuring a structure on a substrate Grant 10,788,765 - Witte , et al. September 29, 2 | 2020-09-29 |
Metrology sensor, lithographic apparatus and method for manufacturing devices Grant 10,788,766 - Goorden , et al. September 29, 2 | 2020-09-29 |
Alignment Measurement System App 20200241433 - HUISMAN; Simon Reinald ;   et al. | 2020-07-30 |
Radiation source Grant 10,690,995 - Kumar , et al. | 2020-06-23 |
Blade set and hair cutting appliance Grant 10,682,777 - Huisman , et al. | 2020-06-16 |
Metrology Sensor, Lithographic Apparatus and Method for Manufacturing Devices App 20200103772 - GOORDEN; Sebastianus Adrianus ;   et al. | 2020-04-02 |
Metrology Sensor, Lithographic Apparatus And Method For Manufacturing Devices App 20200089135 - GOORDEN; Sebastianus Adrianus ;   et al. | 2020-03-19 |
Alignment system Grant 10,585,363 - Mathijssen , et al. | 2020-03-10 |
Position sensor, lithographic apparatus and method for manufacturing devices Grant 10,527,959 - Huisman , et al. J | 2020-01-07 |
Method of measuring a parameter and apparatus Grant 10,508,906 - Den Boef , et al. Dec | 2019-12-17 |
Method And Apparatus For Measuring A Structure On A Substrate App 20190354026 - WITTE; Stefan Michiel ;   et al. | 2019-11-21 |
Radiation Source App 20190302570 - KUMAR; Nitish ;   et al. | 2019-10-03 |
Position Sensor, Lithographic Apparatus And Method For Manufacturing Devices App 20190212658 - HUISMAN; Simon Reinald ;   et al. | 2019-07-11 |
Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method Grant 10,317,808 - Huisman , et al. | 2019-06-11 |
Method of Measuring a Parameter and Apparatus App 20190086201 - DEN BOEF; Arie Jeffrey ;   et al. | 2019-03-21 |
Position Sensing Arrangement And Lithographic Apparatus Including Such An Arrangement, Position Sensing Method And Device Manufacturing Method App 20190049866 - HUISMAN; Simon Reinald ;   et al. | 2019-02-14 |
Alignment System App 20180149987 - MATHIJSSEN; Simon Gijsbert Josephus ;   et al. | 2018-05-31 |
Blade Set And Hair Cutting Appliance App 20180099427 - HUISMAN; SIMON REINALD ;   et al. | 2018-04-12 |
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