Patent | Date |
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Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride Grant 11,075,086 - Ozgur , et al. July 27, 2 | 2021-07-27 |
Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride Grant 11,049,725 - Ozgur , et al. June 29, 2 | 2021-06-29 |
Three-way microvalve device and method of fabrication Grant 11,035,496 - Huff June 15, 2 | 2021-06-15 |
Three-way Microvalve Device And Method Of Fabrication App 20200025311 - HUFF; Michael A. | 2020-01-23 |
Three-way microvalve device and method of fabrication Grant 10,323,772 - Huff | 2019-06-18 |
Method for fabricating and manufacturing micro--and nano-fabricated devices and systems securely Grant 9,646,878 - Huff May 9, 2 | 2017-05-09 |
Three-Way Microvalve device and method of fabrication App 20170097108 - Huff; Michael A. | 2017-04-06 |
Method for etching deep, high-aspect ratio features into glass, fused silica, and quartz materials Grant 9,576,773 - Huff , et al. February 21, 2 | 2017-02-21 |
Self-aligned dynamic pattern generator device and method of fabrication Grant 9,536,706 - Huff , et al. January 3, 2 | 2017-01-03 |
Self-aligned Dynamic Pattern Generator Device And Method Of Fabrication App 20160233054 - HUFF; Michael A. ;   et al. | 2016-08-11 |
Self-aligned dynamic pattern generator device and method of fabrication Grant 9,312,103 - Huff , et al. April 12, 2 | 2016-04-12 |
METHOD FOR FABRICATING AND MANUFACTURING MICRO- and NANO-FABRICATED DEVICES AND SYSTEMS SECURELY App 20150371890 - Huff; Michael A. | 2015-12-24 |
Variable capacitor tuned using laser micromachining Grant 9,099,248 - Huff , et al. August 4, 2 | 2015-08-04 |
Method and system for integrated MEMS and NEMS using deposited thin films having pre-determined stress states Grant 9,053,929 - Huff , et al. June 9, 2 | 2015-06-09 |
Variable capacitor tuned using laser micromachining Grant 9,019,686 - Huff , et al. April 28, 2 | 2015-04-28 |
Versatile communication system and method of implementation using heterogeneous integration Grant 8,983,414 - Ozgur , et al. March 17, 2 | 2015-03-17 |
Method For Etching Deep, High-aspect Ratio Features Into Glass, Fused Silica, And Quartz Materials App 20150034592 - Huff; Michael A. ;   et al. | 2015-02-05 |
Method of fabricating MEMS, NEMS, photonic, micro- and nano-fabricated devices and systems Grant 8,895,338 - Huff November 25, 2 | 2014-11-25 |
Tailorable titanium-tungsten alloy material thermally matched to semiconductor substrates and devices Grant 8,852,378 - Huff , et al. October 7, 2 | 2014-10-07 |
Self-aligned Dynamic Pattern Generator Device And Method Of Fabrication App 20140268076 - HUFF; Michael A. ;   et al. | 2014-09-18 |
System and method for precision fabrication of micro- and nano-devices and structures Grant 8,790,534 - Huff July 29, 2 | 2014-07-29 |
Means for improved implementation of laser diodes and laser diode arrays Grant 8,660,157 - Huff , et al. February 25, 2 | 2014-02-25 |
Versatile Communication System And Method Of Implementation Using Heterogeneous Integration App 20130344819 - Ozgur; Mehmet ;   et al. | 2013-12-26 |
Variable Capacitor Tuned Using Laser Micromachining App 20130008875 - HUFF; Michael A. ;   et al. | 2013-01-10 |
Means For Improved Implementation Of Laser Diodes And Laser Diode Arrays App 20120281725 - HUFF; Michael A. ;   et al. | 2012-11-08 |
Method of reflecting impinging electromagnetic radiation and limiting heating caused by absorbed electromagnetic radiation using engineered surfaces on macro-scale objects Grant 8,270,081 - Huff September 18, 2 | 2012-09-18 |
System And Method For Precision Fabrication Of Micro- And Nano-devices And Structures App 20110309553 - HUFF; Michael A. | 2011-12-22 |
Method Of Fabricating Mems, Nems, Photonic, Micro- And Nano-fabricated Devices And Systems App 20110250706 - HUFF; Michael A. | 2011-10-13 |
Method of fabricating small dimensioned lens elements and lens arrays using surface tension effects Grant 8,007,695 - Huff August 30, 2 | 2011-08-30 |
Fabrication of transducer structures Grant 7,994,463 - Flusberg , et al. August 9, 2 | 2011-08-09 |
Chaff Pod Dispenser App 20100326262 - Galanti; Benjamin J. ;   et al. | 2010-12-30 |
Method of reflecting impinging electromagnetic radiation and limiting heating caused by absorbed electromagnetic radiation using engineered surfaces on macro-scale objects App 20100118407 - Huff; Michael A. | 2010-05-13 |
Tailorable titanium-tungsten alloy material thermally matched to semiconductor substrates and devices App 20100108254 - Huff; Michael A. ;   et al. | 2010-05-06 |
Fabrication of transducer structures Grant 7,679,042 - Flusberg , et al. March 16, 2 | 2010-03-16 |
Method of fabricating small dimensioned lens elements and lens arrays using surface tension effects App 20090283927 - Huff; Michael A. | 2009-11-19 |
Low-temperature wafer bonding of semiconductor substrates to metal substrates App 20090286382 - Huff; Michael A. | 2009-11-19 |
Means for improved implementation of laser diodes and laser diode arrays App 20090092162 - Huff; Michael A. ;   et al. | 2009-04-09 |
Variable capacitor tuned using laser micromachining App 20090002914 - Huff; Michael A. ;   et al. | 2009-01-01 |
Micro-mechanical capacitive inductive sensor for detection of relative or absolute pressure Grant 7,188,530 - Pedersen , et al. March 13, 2 | 2007-03-13 |
Fabrication of movable micromechanical components employing low-cost, high-resolution replication technology method Grant 7,052,926 - Huff May 30, 2 | 2006-05-30 |
Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates Grant 7,045,440 - Huff , et al. May 16, 2 | 2006-05-16 |
Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure Grant 7,024,936 - Pedersen , et al. April 11, 2 | 2006-04-11 |
Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure Grant 7,017,419 - Pedersen , et al. March 28, 2 | 2006-03-28 |
Phased array antenna using (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates Grant 7,012,327 - Huff , et al. March 14, 2 | 2006-03-14 |
Method Of Fabricating Radio Frequency Microelectromechanical Systems (mems) Devices On Low-temperature Co-fired Ceramic (ltcc) Substrates App 20050167047 - Huff, Michael A. ;   et al. | 2005-08-04 |
Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates App 20050161753 - Huff, Michael A. ;   et al. | 2005-07-28 |
Fabrication of movable micromechanical components employing low-cost, high-resolution replication technology method App 20050136565 - Huff, Michael A. | 2005-06-23 |
MEMS-based variable capacitor Grant 6,909,589 - Huff June 21, 2 | 2005-06-21 |
Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure App 20050103112 - Pedersen, Michael ;   et al. | 2005-05-19 |
Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure App 20050028601 - Pedersen, Michael ;   et al. | 2005-02-10 |
Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates App 20040262645 - Huff, Michael A. ;   et al. | 2004-12-30 |
Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates Grant 6,815,739 - Huff , et al. November 9, 2 | 2004-11-09 |
MEMS-based variable capacitor App 20040150939 - Huff, Michael A. | 2004-08-05 |
Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure App 20040057589 - Pedersen, Michael ;   et al. | 2004-03-25 |
Method and sensor for detecting strain using shape memory alloys Grant 6,622,558 - Huff , et al. September 23, 2 | 2003-09-23 |
Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates App 20030020173 - Huff, Michael A. ;   et al. | 2003-01-30 |
Method and sensor for detecting strain using shape memory alloys App 20020062692 - Huff, Michael A. ;   et al. | 2002-05-30 |
Method of making a microvalve Grant 5,238,223 - Mettner , et al. August 24, 1 | 1993-08-24 |
Micromachined threshold pressure switch and method of manufacture Grant 5,164,558 - Huff , et al. November 17, 1 | 1992-11-17 |
Method of making a microvalve Grant 5,142,781 - Mettner , et al. September 1, 1 | 1992-09-01 |