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Patent applications and USPTO patent grants for Hueber; Jean-Marc.The latest application filed is for "gas discharge laser with blade-dielectric electrode".
Patent | Date |
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ArF laser with low pulse energy and high rep rate Grant 6,553,049 - Besaucele , et al. April 22, 2 | 2003-04-22 |
Reliable, modular, production quality narrow-band high rep rate F2 laser Grant RE38,054 - Hofmann , et al. April 1, 2 | 2003-04-01 |
Gas discharge laser long life electrodes Grant 6,466,602 - Fleurov , et al. October 15, 2 | 2002-10-15 |
Extreme repetition rate gas discharge laser Grant 6,442,181 - Oliver , et al. August 27, 2 | 2002-08-27 |
Gas discharge laser with blade-dielectric electrode Grant 6,414,979 - Ujazdowski , et al. July 2, 2 | 2002-07-02 |
Gas discharge laser with blade-dielectric electrode App 20010050939 - Ujazdowski, Richard C. ;   et al. | 2001-12-13 |
Electric discharge laser with acoustic chirp correction Grant 6,317,447 - Partlo , et al. November 13, 2 | 2001-11-13 |
Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser Grant 6,018,537 - Hofmann , et al. January 25, 2 | 2000-01-25 |
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