Hubacek; Jerome S.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hubacek; Jerome S..The latest application filed is for "electrode for plasma processes and method for manufacture and use thereof".

Company Profile

0.8.5

Hubacek; Jerome S. - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Electrode for plasma processes and method for manufacture and use thereof Grant 8,845,855 - Hubacek , et al. September 30, 2	2014-09-30
Silicon parts having reduced metallic impurity concentration for plasma reaction chambers Grant 7,517,803 - Ren , et al. April 14, 2	2009-04-14
Electrode for plasma processes and method for manufacture and use thereof App 20080026589 - Hubacek; Jerome S. ; et al.	2008-01-31
Silicon parts having reduced metallic impurity concentration for plasma reaction chambers App 20050045593 - Ren, Daxing ; et al.	2005-03-03
Silicon parts having reduced metallic impurity concentration for plasma reaction chambers Grant 6,846,726 - Ren , et al. January 25, 2	2005-01-25
Silicon parts having reduced metallic impurity concentration for plasma reaction chambers App 20040161943 - Ren, Daxing ; et al.	2004-08-19
Electrode for plasma processes and method for manufacture and use thereof App 20020127853 - Hubacek, Jerome S. ; et al.	2002-09-12
Method of manufacturing assembly for plasma reaction chamber and use thereof Grant 6,376,385 - Lilleland , et al. April 23, 2	2002-04-23
Electrode for plasma processes and method for manufacture and use thereof App 20010031557 - Lilleland, John ; et al.	2001-10-18
Electrode for plasma processes and method for a manufacture and use thereof Grant 6,194,322 - Lilleland , et al. February 27, 2	2001-02-27
Electrode for plasma processes and method for manufacture and use thereof Grant 6,148,765 - Lilleland , et al. November 21, 2	2000-11-21
Electrode for plasma processes and method for manufacture and use thereof Grant 6,073,577 - Lilleland , et al. June 13, 2	2000-06-13

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