| Patent | Date |
|---|
Selective Methods For Fabricating Devices And Structures
App 20220310390 - HUANG; Yi-Chiau ; et al. | 2022-09-29 |
Doping techniques
Grant 11,443,948 - Aderhold , et al. September 13, 2 | 2022-09-13 |
Selective Low Temperature Epitaxial Deposition Process
App 20220238650 - WU; Chen-Ying ; et al. | 2022-07-28 |
Selective SIGESN:B Deposition
App 20220230877 - Wu; Chen-Ying ; et al. | 2022-07-21 |
Methods and apparatus for integrated selective monolayer doping
Grant 11,373,871 - Colombeau , et al. June 28, 2 | 2022-06-28 |
Apparatus, Systems, And Methods Of Using Atomic Hydrogen Radicals With Selective Epitaxial Deposition
App 20220157604 - WU; Chen-Ying ; et al. | 2022-05-19 |
Method Of Fabricating A Semiconductor Device Having Reduced Contact Resistance
App 20220093749 - THAREJA; Gaurav ; et al. | 2022-03-24 |
Method of fabricating a semiconductor device having reduced contact resistance
Grant 11,195,923 - Thareja , et al. December 7, 2 | 2021-12-07 |
Semiconductor device, method of making a semiconductor device, and processing system
Grant 11,152,479 - Thareja , et al. October 19, 2 | 2021-10-19 |
Structure & Material Engineering Methods For Optoelectronic Devices Signal To Noise Ratio Enhancement
App 20210265416 - CHEN; Papo ; et al. | 2021-08-26 |
Thermal Processing Susceptor
App 20210175115 - NGO; Anhthu ; et al. | 2021-06-10 |
Method of growing doped group IV materials
Grant 11,031,241 - Huang , et al. June 8, 2 | 2021-06-08 |
Method of selective silicon germanium epitaxy at low temperatures
Grant 11,018,003 - Huang , et al. May 25, 2 | 2021-05-25 |
Thermal processing susceptor
Grant 10,930,543 - Ngo , et al. February 23, 2 | 2021-02-23 |
Semiconductor Device, Method Of Making A Semiconductor Device, And Processing System
App 20200258997 - A1 | 2020-08-13 |
Method Of Growing Doped Group Iv Materials
App 20200203149 - HUANG; Yi-Chiau ; et al. | 2020-06-25 |
Method Of Fabricating A Semiconductor Device Having Reduced Contact Resistance
App 20200203490 - THAREJA; Gaurav ; et al. | 2020-06-25 |
Methods And Apparatus For Integrated Selective Monolayer Doping
App 20200161134 - COLOMBEAU; BENJAMIN ; et al. | 2020-05-21 |
Doping Techniques
App 20200051818 - Aderhold; Wolfgang ; et al. | 2020-02-13 |
Multizone Lamp Control And Individual Lamp Control In A Lamphead
App 20200045776 - HUANG; Yi-Chiau ; et al. | 2020-02-06 |
Method Of Selective Silicon Germanium Epitaxy At Low Temperatures
App 20200035489 - HUANG; Yi-Chiau ; et al. | 2020-01-30 |
Thermal Processing Susceptor
App 20180366363 - NGO; Anhthu ; et al. | 2018-12-20 |
Method to enhance growth rate for selective epitaxial growth
Grant 10,128,110 - Dube , et al. November 13, 2 | 2018-11-13 |
Thermal processing susceptor
Grant 10,062,598 - Ngo , et al. August 28, 2 | 2018-08-28 |
Template Formation For Fully Relaxed Sige Growth
App 20180211836 - YAN; Chun ; et al. | 2018-07-26 |
Method To Enhance Growth Rate For Selective Epitaxial Growth
App 20180158682 - Dube; Abhishek ; et al. | 2018-06-07 |
Method of doped germanium formation
Grant 9,966,438 - Huang , et al. May 8, 2 | 2018-05-08 |
Method to grow thin epitaxial films at low temperature
Grant 9,929,055 - Dube , et al. March 27, 2 | 2018-03-27 |
Method Of Doped Germanium Formation
App 20180083104 - HUANG; Yi-Chiau ; et al. | 2018-03-22 |
Method Of Contact Formation Between Metal And Semiconductor
App 20180076324 - HUANG; Yi-Chiau ; et al. | 2018-03-15 |
Method Of Selective Epitaxy
App 20180047569 - HUANG; Yi-Chiau ; et al. | 2018-02-15 |
Method to enhance growth rate for selective epitaxial growth
Grant 9,881,790 - Dube , et al. January 30, 2 | 2018-01-30 |
Method Of Selective Etching On Epitaxial Film On Source/drain Area Of Transistor
App 20170323795 - LI; Xuebin ; et al. | 2017-11-09 |
Method of forming strain-relaxed buffer layers
Grant 9,721,792 - Huang , et al. August 1, 2 | 2017-08-01 |
Method For Fabricating Nanowires For Horizontal Gate All Around Devices For Semiconductor Applications
App 20170194430 - WOOD; Bingxi Sun ; et al. | 2017-07-06 |
Method To Grow Thin Epitaxial Films At Low Temperature
App 20170178962 - DUBE; Abhishek ; et al. | 2017-06-22 |
Method Of Selective Epitaxy
App 20170018427 - HUANG; Yi-Chiau ; et al. | 2017-01-19 |
Method to grow thin epitaxial films at low temperature
Grant 9,530,638 - Dube , et al. December 27, 2 | 2016-12-27 |
Method To Enhance Growth Rate For Selective Epitaxial Growth
App 20160300715 - DUBE; Abhishek ; et al. | 2016-10-13 |
Method To Grow Thin Epitaxial Films At Low Temperature
App 20160126093 - DUBE; Abhishek ; et al. | 2016-05-05 |
Methods for depositing group III-V layers on substrates
Grant 9,299,560 - Sanchez , et al. March 29, 2 | 2016-03-29 |
Design Of Susceptor In Chemical Vapor Deposition Reactor
App 20160010208 - HUANG; Yi-Chiau ; et al. | 2016-01-14 |
Substrate Thermal Control In An Epi Chamber
App 20150368829 - NGO; Anhthu ; et al. | 2015-12-24 |
Thermal Processing Susceptor
App 20150340266 - NGO; Anhthu ; et al. | 2015-11-26 |
Methods for chemical mechanical planarization of patterned wafers
Grant 9,177,815 - Huang , et al. November 3, 2 | 2015-11-03 |
Method of epitaxial germanium tin alloy surface preparation
Grant 9,171,718 - Sanchez , et al. October 27, 2 | 2015-10-27 |
Method of epitaxial doped germanium tin alloy formation
Grant 9,082,684 - Sanchez , et al. July 14, 2 | 2015-07-14 |
Methods for depositing a tin-containing layer on a substrate
Grant 9,029,264 - Sanchez , et al. May 12, 2 | 2015-05-12 |
Fin formation by epitaxial deposition
Grant 8,999,821 - Brand , et al. April 7, 2 | 2015-04-07 |
Method Of Forming Strain-relaxed Buffer Layers
App 20150079803 - HUANG; Yi-Chiau ; et al. | 2015-03-19 |
Fin Formation By Epitaxial Deposition
App 20150050800 - Brand; Adam ; et al. | 2015-02-19 |
Method Of Strain And Defect Control In Thin Semiconductor Films
App 20140342533 - HUANG; Yi-Chiau | 2014-11-20 |
Method of forming high growth rate, low resistivity germanium film on silicon substrate
Grant 8,822,312 - Huang , et al. September 2, 2 | 2014-09-02 |
Method of forming high growth rate, low resistivity germanium film on silicon substrate
Grant 8,759,201 - Huang , et al. June 24, 2 | 2014-06-24 |
Method Of Epitaxial Germanium Tin Alloy Surface Preparation
App 20140154875 - SANCHEZ; Errol Antonio C. ; et al. | 2014-06-05 |
Methods and apparatus for forming silicon germanium-carbon semiconductor structures
Grant 8,669,590 - Sanchez , et al. March 11, 2 | 2014-03-11 |
Methods for low temperature conditioning of process chambers
Grant 8,658,540 - Huang , et al. February 25, 2 | 2014-02-25 |
Selective epitaxial germanium growth on silicon-trench fill and in situ doping
Grant 8,652,951 - Huang , et al. February 18, 2 | 2014-02-18 |
Method of epitaxial germanium tin alloy surface preparation
Grant 8,647,439 - Sanchez , et al. February 11, 2 | 2014-02-11 |
Method Of Semiconductor Film Stabilization
App 20130330911 - HUANG; Yi-Chiau ; et al. | 2013-12-12 |
Methods For Chemical Mechanical Planarization Of Patterned Wafers
App 20130295752 - HUANG; YI-CHIAU ; et al. | 2013-11-07 |
Method Of Epitaxial Germanium Tin Alloy Surface Preparation
App 20130288480 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2013-10-31 |
Method And Apparatus For Germanium Tin Alloy Formation By Thermal Cvd
App 20130280891 - KIM; YIHWAN ; et al. | 2013-10-24 |
Method Of Epitaxial Doped Germanium Tin Alloy Formation
App 20130256838 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2013-10-03 |
METHODS FOR DEPOSITING A TiN-CONTAINING LAYER ON A SUBSTRATE
App 20130240478 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2013-09-19 |
Selective Epitaxial Germanium Growth On Silicon-trench Fill And In Situ Doping
App 20130210221 - HUANG; YI-CHIAU ; et al. | 2013-08-15 |
Methods for depositing germanium-containing layers
Grant 8,501,600 - Sanchez , et al. August 6, 2 | 2013-08-06 |
Methods for forming silicon germanium layers
Grant 8,501,594 - Huang , et al. August 6, 2 | 2013-08-06 |
Method Of Depositing A Silicon Germanium Tin Layer On A Substrate
App 20130183814 - HUANG; YI-CHIAU ; et al. | 2013-07-18 |
Methods For Depositing Group Iii-v Layers On Substrates
App 20130183815 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2013-07-18 |
Methods And Apparatus For Forming Semiconductor Structures
App 20130026540 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2013-01-31 |
Method Of Forming High Growth Rate, Low Resistivity Germanium Film On Silicon Substrate
App 20120306054 - Huang; Yi-Chiau ; et al. | 2012-12-06 |
Method Of Forming High Growth Rate, Low Resistivity Germanium Film On Silicon Substrate
App 20120306055 - Huang; Yi-Chiau ; et al. | 2012-12-06 |
Methods For Depositing Germanium-containing Layers
App 20120077335 - SANCHEZ; ERROL ; et al. | 2012-03-29 |
Methods For Low Temperature Conditioning Of Process Chambers
App 20110306186 - HUANG; YI-CHIAU ; et al. | 2011-12-15 |
Atomic layer deposition processes for non-volatile memory devices
Grant 8,043,907 - Ma , et al. October 25, 2 | 2011-10-25 |
Chamber components with increased pyrometry visibility
Grant 7,921,803 - Yudovsky , et al. April 12, 2 | 2011-04-12 |
Low temperature ALD SiO.sub.2
Grant 7,897,208 - Mahajani , et al. March 1, 2 | 2011-03-01 |
Methods For Forming Silicon Germanium Layers
App 20100317177 - HUANG; YI-CHIAU ; et al. | 2010-12-16 |
LOW TEMPERATURE ALD Si02
App 20100227061 - Mahajani; Maitreyee ; et al. | 2010-09-09 |
Low temperature ALD SiO.sub.2
Grant 7,749,574 - Mahajani , et al. July 6, 2 | 2010-07-06 |
Methods For Forming Silicon Germanium Layers
App 20100120235 - HUANG; Yi-Chiau ; et al. | 2010-05-13 |
Atomic Layer Deposition Processes for Non-Volatile Memory Devices
App 20100102376 - Ma; Yi ; et al. | 2010-04-29 |
Cvd Reactor With Multiple Processing Levels And Dual-axis Motorized Lift Mechanism
App 20100075488 - Collins; Richard O. ; et al. | 2010-03-25 |
Atomic layer deposition processes for non-volatile memory devices
Grant 7,659,158 - Ma , et al. February 9, 2 | 2010-02-09 |
Atomic Layer Deposition Processes For Non-volatile Memory Devices
App 20090242957 - Ma; Yi ; et al. | 2009-10-01 |
Method for monitoring and calibrating temperature in semiconductor processing chambers
Grant 7,572,052 - Ravi , et al. August 11, 2 | 2009-08-11 |
Chamber Components With Increased Pyrometry Visibility
App 20090078198 - YUDOVSKY; JOSEPH ; et al. | 2009-03-26 |
Novel Method For Monitoring And Calibrating Temperature In Semiconductor Processing Chambers
App 20090016406 - Ravi; Jallepally ; et al. | 2009-01-15 |
Method And Apparatus For Batch Processing In A Vertical Reactor
App 20090017637 - Huang; Yi-Chiau ; et al. | 2009-01-15 |
LOW TEMPERATURE ALD SiO2
App 20080113097 - Mahajani; Maitreyee ; et al. | 2008-05-15 |
Synchronization of precursor pulsing and wafer rotation
App 20070252299 - Mahajani; Maitreyee ; et al. | 2007-11-01 |
Batch Processing Chamber With Diffuser Plate And Injector Assembly
App 20070084408 - Yudovsky; Joseph ; et al. | 2007-04-19 |
Method and apparatus for reducing tensile stress in a deposited layer
App 20070049020 - Huang; Yi-Chiau ; et al. | 2007-03-01 |
Method and apparatus for infilm defect reduction for electrochemical copper deposition
App 20050173253 - Huang, Yi-Chiau | 2005-08-11 |
Methods for etching photolithographic reticles
App 20040072081 - Coleman, Thomas P. ; et al. | 2004-04-15 |
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