Huang; Wu-Song S.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Huang; Wu-Song S..The latest application filed is for "hybrid photoresist composition and pattern forming method using thereof".

Company Profile

0.17.17

Huang; Wu-Song S. - Brewster NY US
Huang; Wu-Song S. - Poughkeepsie NY

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Coating compositions suitable for use with an overcoated photoresist Grant 9,726,977 - Cameron , et al. August 8, 2	2017-08-08
Hybrid photoresist composition and pattern forming method using thereof Grant 8,932,796 - Chen , et al. January 13, 2	2015-01-13
Hybrid Photoresist Composition And Pattern Forming Method Using Thereof App 20130122421 - Chen; Kuang-Jung ; et al.	2013-05-16
Spin-on antireflective coating for integration of patternable dielectric materials and interconnect structures Grant 7,944,055 - Allen , et al. May 17, 2	2011-05-17
Coating compositions suitable for use with an overcoated photoresist App 20100297557 - Cameron; James F. ; et al.	2010-11-25
Underlayer compositions containing heterocyclic aromatic structures Grant 7,816,068 - Huang , et al. October 19, 2	2010-10-19
Underlayer compositions containing heterocyclic aromatic structures Grant 7,807,332 - Huang , et al. October 5, 2	2010-10-05
Spin-on Antireflective Coating For Integration Of Patternable Dielectric Materials And Interconnect Structures App 20100207276 - Allen; Robert D. ; et al.	2010-08-19
Fluorinated half ester of maleic anhydride polymers for dry 193 nm top antireflective coating application Grant 7,754,820 - Huang , et al. July 13, 2	2010-07-13
Spin-on antireflective coating for integration of patternable dielectric materials and interconnect structures Grant 7,709,370 - Allen , et al. May 4, 2	2010-05-04
High resolution silicon-containing resist Grant 7,659,050 - Bucchignano , et al. February 9, 2	2010-02-09
Top antireflective coating composition with low refractive index at 193nm radiation wavelength Grant 7,544,750 - Huang , et al. June 9, 2	2009-06-09
Spin-on Antireflective Coating For Integration Of Patternable Dielectric Materials And Interconnect Structures App 20090081418 - Allen; Robert D. ; et al.	2009-03-26
Fluorinated Half Ester Of Maleic Anhydride Polymers For Dry 193 Nm Top Antireflective Coating Application App 20080286686 - Huang; Wu-Song S. ; et al.	2008-11-20
Fluorinated half ester of maleic anhydride polymers for dry 193 nm top antireflective coating application Grant 7,435,537 - Huang , et al. October 14, 2	2008-10-14
Underlayer Compositions Containing Heterocyclic Aromatic Structures App 20080213697 - Huang; Wu-Song S. ; et al.	2008-09-04
Methods of improving single layer resist patterning scheme Grant 7,407,736 - Chen , et al. August 5, 2	2008-08-05
Method for using negative tone silicon-containing resist for e-beam lithography Grant 7,399,573 - Huang , et al. July 15, 2	2008-07-15
Underlayer compositions containing heterocyclic aromatic structures Grant 7,375,172 - Huang , et al. May 20, 2	2008-05-20
Negative Tone Silicon-containing Resist For E-beam Lithography App 20080102400 - Huang; Wu-Song S. ; et al.	2008-05-01
Methods Of Improving Single Layer Resist Patterning Scheme App 20080057443 - Chen; Kuang-Jung J. ; et al.	2008-03-06
Underlayer Compositions Containing Heterocyclic Aromatic Structures App 20080044776 - Huang; Wu-Song S. ; et al.	2008-02-21
Fluorinated Half Ester Of Maleic Anhydride Polymers For Dry 193 Nm Top Antireflective Coating Application App 20080026315 - Huang; Wu-Song S. ; et al.	2008-01-31
Silicon containing TARC/barrier layer Grant 7,320,855 - Huang , et al. January 22, 2	2008-01-22
Advanced chemically amplified resist for sub 30 nm dense feature resolution Grant 7,300,741 - Huang , et al. November 27, 2	2007-11-27
NEW SUB 40 NM RESOLUTION Si CONTAINING RESIST SYSTEM App 20070269736 - Bucchignano; James P. ; et al.	2007-11-22
Advanced Chemically Amplified Resist For Sub 30nm Dense Feature Resolution App 20070248908 - Huang; Wu-Song S. ; et al.	2007-10-25
Top antireflective coating composition with low refractive index at 193nm radiation wavelength App 20070087285 - Huang; Wu-Song S. ; et al.	2007-04-19
Underlayer compositons containing heterocyclic aromatic structures App 20070009830 - Huang; Wu-Song S. ; et al.	2007-01-11
High resolution silicon-containing resist App 20060275694 - Bucchignano; James J. ; et al.	2006-12-07
Silicon containing TARC / barrier layer App 20060093959 - Huang; Wu-Song S. ; et al.	2006-05-04

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