| Patent | Date |
|---|
Multi-function overlay marks for reducing noise and extracting focus and critical dimension information
Grant 11,448,975 - Lee , et al. September 20, 2 | 2022-09-20 |
Measuring a process parameter for a manufacturing process involving lithography
Grant 11,320,745 - Van Der Schaar , et al. May 3, 2 | 2022-05-03 |
Method For Inspecting Pattern Defects
App 20210270751 - CHEN; Ju-Ying ; et al. | 2021-09-02 |
Multi-Function Overlay Marks for Reducing Noise and Extracting Focus and Critical Dimension Information
App 20210165315 - Lee; Yu-Ching ; et al. | 2021-06-03 |
Multi-function overlay marks for reducing noise and extracting focus and critical dimension information
Grant 10,915,017 - Lee , et al. February 9, 2 | 2021-02-09 |
Methods Of Defect Inspection
App 20210018848 - YU; Ta-Ching ; et al. | 2021-01-21 |
Measuring a Process Parameter for a Manufacturing Process Involving Lithography
App 20200401054 - Van Der Schaar; Maurits ; et al. | 2020-12-24 |
Methods of defect inspection
Grant 10,795,270 - Yu , et al. October 6, 2 | 2020-10-06 |
Power over fiber enabled sensor system
Grant 10,608,830 - Yang , et al. | 2020-03-31 |
Multi-function Overlay Marks For Reducing Noise And Extracting Focus And Critical Dimension Information
App 20190064654 - Lee; Yu-Ching ; et al. | 2019-02-28 |
Methods Of Defect Inspection
App 20190064675 - YU; Ta-Ching ; et al. | 2019-02-28 |
Measuring a Process Parameter for a Manufacturing Process Involving Lithography
App 20190018326 - Van Der Schaar; Maurits ; et al. | 2019-01-17 |
Method of determining critical-dimension-related properties, inspection apparatus and device manufacturing method
Grant 10,180,628 - Cramer , et al. Ja | 2019-01-15 |
Metrology method and apparatus, substrates for use in such methods, lithographic system and device manufacturing method
Grant 10,162,272 - Jak , et al. Dec | 2018-12-25 |
Measuring a process parameter for a manufacturing process involving lithography
Grant 10,073,357 - Van Der Schaar , et al. September 11, 2 | 2018-09-11 |
Power Over Fiber Enabled Sensor System
App 20180227133 - Yang; Mei-huan ; et al. | 2018-08-09 |
Metrology method and apparatus
Grant 9,903,823 - Lu , et al. February 27, 2 | 2018-02-27 |
Metrology Method And Apparatus, Substrates For Use In Such Methods, Lithographic System And Device Manufacturing Method
App 20170052454 - JAK; Martin Jacobus Johan ; et al. | 2017-02-23 |
Measuring a Process Parameter for a Manufacturing Process Involving Lithography
App 20160349627 - VAN DER SCHAAR; Maurits ; et al. | 2016-12-01 |
Metrology Method And Apparatus
App 20160146740 - Lu; Yen-Wen ; et al. | 2016-05-26 |
Energy Conversion Device With Multiple Voltage Outputs And Power Transistor Module Using The Same
App 20160126382 - YANG; MEI-HUAN ; et al. | 2016-05-05 |
Method Of Determining Critical-dimension-related Properties, Inspection Apparatus And Device Manufacturing Method
App 20160116849 - CRAMER; Hugo Augustinus Joseph ; et al. | 2016-04-28 |
Measurement of overlay offset in semiconductor processing
Grant RE45,943 - Huang , et al. March 22, 2 | 2016-03-22 |
Optoelectronic Thermal Interfaces for 3-Dimensional Billet Devices, Including Vertical Multijunction Photovoltaic Receivers Using Heat Sinked Anode/Billet/Cathode For High Intensity Beaming and Wireless Power Transmission
App 20160005906 - Tung; Chiun-Yen ; et al. | 2016-01-07 |
Direct Thermal Path Heat Sinking Using Fins Formed From Energy Conversion Device Components, Including Subcomponents of Vertical Multijunction Photovoltaic Receivers Used For High Intensity Beaming and Wireless Power Transmission
App 20160005902 - Tung; Chiun-Yen ; et al. | 2016-01-07 |
Extraction of systematic defects
Grant 9,201,022 - Hu , et al. December 1, 2 | 2015-12-01 |
Method of defining an intensity selective exposure photomask
Grant 9,026,957 - Liu , et al. May 5, 2 | 2015-05-05 |
Solar Cell With Passivation Layer And Manufacturing Method Thereof
App 20150000729 - YANG; MEI-HUAN ; et al. | 2015-01-01 |
System and method for alignment in semiconductor device fabrication
Grant 8,837,810 - Chen , et al. September 16, 2 | 2014-09-16 |
Method Of Defining An Intensity Selective Exposure Photomask
App 20140170537 - Liu; George ; et al. | 2014-06-19 |
Detecting method for forming semiconductor device
Grant 8,755,045 - Lin , et al. June 17, 2 | 2014-06-17 |
Intensity selective exposure photomask
Grant 8,673,520 - Liu , et al. March 18, 2 | 2014-03-18 |
System And Method For Alignment In Semiconductor Device Fabrication
App 20130259358 - Chen; Yen-Liang ; et al. | 2013-10-03 |
Detecting Method For Forming Semiconductor Device
App 20130176558 - Lin; Jyuh-Fuh ; et al. | 2013-07-11 |
Intensity selective exposure photomask
Grant 8,431,291 - Liu , et al. April 30, 2 | 2013-04-30 |
Extraction Of Systematic Defects
App 20120308112 - Hu; Jia-Rui ; et al. | 2012-12-06 |
Measurement of overlay offset in semiconductor processing
Grant 8,179,536 - Huang , et al. May 15, 2 | 2012-05-15 |
Intensity Selective Exposure Photomask
App 20120040278 - Liu; George ; et al. | 2012-02-16 |
Intensity Selective Exposure Photomask
App 20110217630 - Liu; George ; et al. | 2011-09-08 |
Intensity selective exposure method and apparatus
Grant 8,003,303 - Liu , et al. August 23, 2 | 2011-08-23 |
Measurement Of Overlay Offset In Semiconductor Processing
App 20110131007 - Huang; Te-Chih ; et al. | 2011-06-02 |
Measurement of overlay offset in semiconductor processing
Grant 7,858,404 - Huang , et al. December 28, 2 | 2010-12-28 |
Intensity Selective Exposure Method And Apparatus
App 20100261118 - Liu; George ; et al. | 2010-10-14 |
Mask haze early detection
Grant 7,796,249 - Wang , et al. September 14, 2 | 2010-09-14 |
Mask Haze Early Detection
App 20090063074 - Wang; Wen-Chuan ; et al. | 2009-03-05 |
Measurement of Overlay Offset in Semiconductor Processing
App 20080227228 - Huang; Te-Chih ; et al. | 2008-09-18 |
| 