loadpatents
Patent applications and USPTO patent grants for HUANG; Shuogang.The latest application filed is for "ion beam etching with gas treatment and pulsing".
Patent | Date |
---|---|
Ion Beam Etching With Gas Treatment And Pulsing App 20220102624 - YUN; Seokmin ;   et al. | 2022-03-31 |
Method and Apparatus for Anisotropic Pattern Etching and Treatment App 20210151290 - Yun; Seokmin ;   et al. | 2021-05-20 |
Method and Apparatus for Anisotropic Pattern Etching and Treatment App 20190148109 - Yun; Seokmin ;   et al. | 2019-05-16 |
Chamber For Patterning Non-volatile Metals App 20180204738 - Shen; Meihua ;   et al. | 2018-07-19 |
Chamber for patterning non-volatile metals Grant 9,953,843 - Shen , et al. April 24, 2 | 2018-04-24 |
Chamber For Patterning Non-volatile Metals App 20170229317 - Shen; Meihua ;   et al. | 2017-08-10 |
Method to etch copper barrier film Grant 9,570,320 - Shen , et al. February 14, 2 | 2017-02-14 |
Method and apparatus for preventing native oxide regrowth Grant 9,373,518 - Adhiprakasha , et al. June 21, 2 | 2016-06-21 |
Novel Method To Etch Copper Barrier Film App 20160104630 - SHEN; Meihua ;   et al. | 2016-04-14 |
Screening of Surface Passivation Processes for Germanium Channels App 20140315331 - Niyogi; Sandip ;   et al. | 2014-10-23 |
Customizing Etch Selectivity with Sequential Multi-Stage Etches with Complementary Etchants App 20140170857 - Lang; Chi-I ;   et al. | 2014-06-19 |
Critical concentration in etching doped poly silicon with HF/HNO.sub.3 Grant 8,716,145 - Huang May 6, 2 | 2014-05-06 |
Method and Apparatus for Preventing Native Oxide Regrowth App 20140094037 - Adhiprakasha; Edwin ;   et al. | 2014-04-03 |
Method and apparatus for preventing native oxide regrowth Grant 8,632,690 - Adhiprakasha , et al. January 21, 2 | 2014-01-21 |
Layer Thickness Measurement App 20130162995 - Huang; Shuogang ;   et al. | 2013-06-27 |
Critical Concentration in Etching Doped Poly Silicon With HF/HNO3 App 20130137277 - Huang; Shuogang | 2013-05-30 |
Method And Apparatus For Preventing Native Oxide Regrowth App 20130137276 - Adhiprakasha; Edwin ;   et al. | 2013-05-30 |
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