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Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures Grant 10,850,973 - Daneman , et al. December 1, 2 | 2020-12-01 |
Methods For Cmos-mems Integrated Devices With Multiple Sealed Cavities Maintained At Various Pressures App 20200109045 - DANEMAN; Michael ;   et al. | 2020-04-09 |
Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures Grant 10,532,926 - Daneman , et al. Ja | 2020-01-14 |
Electric connection flexures Grant 10,442,680 - Liu , et al. Oc | 2019-10-15 |
Electric Connection Flexures App 20170359003 - LIU; XIAOLEI ;   et al. | 2017-12-14 |
Methods For Cmos-mems Integrated Devices With Multiple Sealed Cavities Maintained At Various Pressures App 20170297907 - DANEMAN; Michael ;   et al. | 2017-10-19 |
Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures Grant 9,540,230 - Daneman , et al. January 10, 2 | 2017-01-10 |
Internal electrical contact for enclosed MEMS devices Grant 9,221,676 - Huang , et al. December 29, 2 | 2015-12-29 |
Internal Electrical Contact For Enclosed Mems Devices App 20150336792 - HUANG; Kegang ;   et al. | 2015-11-26 |
Internal electrical contact for enclosed MEMS devices Grant 8,945,969 - Huang , et al. February 3, 2 | 2015-02-03 |
Internal Electrical Contact For Enclosed Mems Devices App 20140349434 - HUANG; Kegang ;   et al. | 2014-11-27 |
Surface Roughening To Reduce Adhesion In An Integrated Mems Device App 20140264655 - WILLIAMS; Kirt Reed ;   et al. | 2014-09-18 |
Internal electrical contact for enclosed MEMS devices Grant 8,822,252 - Huang , et al. September 2, 2 | 2014-09-02 |
Internal Electrical Contact For Enclosed Mems Devices App 20140213007 - HUANG; Kegang ;   et al. | 2014-07-31 |
Internal electrical contact for enclosed MEMS devices Grant 8,564,076 - Huang , et al. October 22, 2 | 2013-10-22 |
Integrated MEMS devices with controlled pressure environments by means of enclosed volumes Grant 8,513,747 - Huang , et al. August 20, 2 | 2013-08-20 |
Integrated MEMS devices with controlled pressure environments by means of enclosed volumes Grant 8,350,346 - Huang , et al. January 8, 2 | 2013-01-08 |
Methods For Cmos-mems Integrated Devices With Multiple Sealed Cavities Maintained At Various Pressures App 20120326248 - DANEMAN; Michael ;   et al. | 2012-12-27 |
Method Of Preventing Stiction Of Mems Devices App 20120313189 - HUANG; Kegang ;   et al. | 2012-12-13 |
Method of fabricating reflective spatial light modulator having high contrast ratio Grant 7,923,789 - Huang , et al. April 12, 2 | 2011-04-12 |
Reflective spatial light modulator having dual layer electrodes and method of fabricating same Grant 7,911,678 - Huang March 22, 2 | 2011-03-22 |
Reduction of hillocks prior to dielectric barrier deposition in Cu damascene Grant 7,723,228 - Rajagopalan , et al. May 25, 2 | 2010-05-25 |
Method and structure for manufacturing bonded substrates using multiple photolithography tools Grant 7,678,288 - Yang , et al. March 16, 2 | 2010-03-16 |
Method and structure for forming an integrated spatial light modulator Grant 7,670,880 - Yang , et al. March 2, 2 | 2010-03-02 |
Semiconductor etching process to release single crystal silicon mirrors Grant 7,666,319 - Huang February 23, 2 | 2010-02-23 |
Reflective Spatial Light Modulator Having Dual Layer Electrodes And Method Of Fabricating Same App 20090195854 - Huang; Kegang | 2009-08-06 |
Reflective spatial light modulator having dual layer electrodes and method of fabricating same Grant 7,477,440 - Huang January 13, 2 | 2009-01-13 |
Method Of Fabricating Reflective Spatial Light Modulator Having High Contrast Ratio App 20080192325 - Huang; Kegang ;   et al. | 2008-08-14 |
Method of fabricating reflective spatial light modulator having high contrast ratio Grant 7,374,962 - Huang , et al. May 20, 2 | 2008-05-20 |
Reduction of hillocks prior to dielectric barrier deposition in Cu damascene Grant 7,371,427 - Rajagopalan , et al. May 13, 2 | 2008-05-13 |
Reduction Of Hillocks Prior To Dielectric Barrier Deposition In Cu Damascene App 20080075888 - Rajagopalan; Nagarajan ;   et al. | 2008-03-27 |
Method Of Fabricating Reflective Spatial Light Modulator Having High Contrast Ratio App 20070287214 - Huang; Kegang ;   et al. | 2007-12-13 |
Method And Structure For Forming An Integrated Spatial Light Modulator App 20070128771 - Yang; Xiao ;   et al. | 2007-06-07 |
Method and structure for manufacturing bonded substrates using multiple photolithography tools App 20060121373 - Yang; Xiao ;   et al. | 2006-06-08 |
Reduction of hillocks prior to dielectric barrier deposition in Cu damascene App 20040235292 - Rajagopalan, Nagarajan ;   et al. | 2004-11-25 |
Reduction of hillocks prior to dielectric barrier deposition in Cu damascene App 20040231795 - Rajagopalan, Nagarajan ;   et al. | 2004-11-25 |
Method and apparatus for treating low k dielectric layers to reduce diffusion Grant 6,794,311 - Huang , et al. September 21, 2 | 2004-09-21 |
Wine cellar Grant D483,776 - Ma , et al. December 16, 2 | 2003-12-16 |
Method of making a transistor, in particular spacers of the transistor Grant 6,566,183 - Chen , et al. May 20, 2 | 2003-05-20 |
Silicon Carbide Deposition For Use As A Barrier Layer And An Etch Stop App 20030089992 - RATHI, SUDHA ;   et al. | 2003-05-15 |
Method of forming a silicon nitride layer on a substrate Grant 6,559,074 - Chen , et al. May 6, 2 | 2003-05-06 |
Horizontal Freezer With Drawers App 20020148245 - Chai, Yongsen ;   et al. | 2002-10-17 |
Constant temperature wine cellar Grant D460,466 - Ma , et al. July 16, 2 | 2002-07-16 |
Glass-door icebox App 20020060511 - Ma, Jian ;   et al. | 2002-05-23 |
Method and apparatus for treating low k dielectric layers to reduce diffusion App 20020016085 - Huang, Kegang ;   et al. | 2002-02-07 |
Wine cellar with long handle Grant D453,169 - Ma , et al. January 29, 2 | 2002-01-29 |
Freezer with drawer below Grant D451,936 - Ma , et al. December 11, 2 | 2001-12-11 |