Patent | Date |
---|
Inductive/capacitive hybrid plasma source and system with such chamber Grant 9,034,143 - Cho , et al. May 19, 2 | 2015-05-19 |
Method and apparatus for masking solar cell substrates for deposition Grant 8,677,929 - Berger , et al. March 25, 2 | 2014-03-25 |
Inductive/capacitive Hybrid Plasma Source And System With Such Chamber App 20130087531 - Cho; Young Kyu ;   et al. | 2013-04-11 |
Method For Rear Point Contact Fabrication For Solar Cells App 20120295394 - Cho; Young Kyu ;   et al. | 2012-11-22 |
Method And Apparatus For Masking Substrates For Deposition App 20120171807 - BERGER; Alexander J. ;   et al. | 2012-07-05 |
Method And Apparatus For Chamber Cleaning By In-situ Plasma Excitation App 20090159104 - Huang; Judy ;   et al. | 2009-06-25 |
Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers Grant 7,144,606 - Huang December 5, 2 | 2006-12-05 |
Silicon carbide deposition for use as a low dielectric constant anti-reflective coating Grant 6,951,826 - Bencher , et al. October 4, 2 | 2005-10-04 |
Silicon Carbide Deposition For Use As A Low Dielectric Constant Anti-reflective Coating App 20050181623 - Bencher, Christopher ;   et al. | 2005-08-18 |
Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers App 20050101154 - Huang, Judy | 2005-05-12 |
Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers Grant 6,821,571 - Huang November 23, 2 | 2004-11-23 |
Plasma treatment for copper oxide reduction Grant 6,734,102 - Rathi , et al. May 11, 2 | 2004-05-11 |
Silicon carbide deposition for use as a low-dielectric constant anti-reflective coating Grant 6,635,583 - Bencher , et al. October 21, 2 | 2003-10-21 |
Silicon Carbide Deposition For Use As A Barrier Layer And An Etch Stop App 20030089992 - RATHI, SUDHA ;   et al. | 2003-05-15 |
Method and apparatus for reducing fixed charges in a semiconductor device Grant 6,541,369 - Huang , et al. April 1, 2 | 2003-04-01 |
Dispersions of silicalite and zeolite nanoparticles in nonpolar solvents Grant 6,533,855 - Gaynor , et al. March 18, 2 | 2003-03-18 |
Silicon Carbide Deposition For Use As A Low-dielectric Constant Anti-reflective Coating App 20030030057 - BENCHER, CHRISTOPHER ;   et al. | 2003-02-13 |
Plasma treatment for copper oxide reduction App 20030022509 - Rathi, Sudha ;   et al. | 2003-01-30 |
Method And Apparatus For Reducing Fixed Charges In A Semiconductor Device App 20020081759 - HUANG, JUDY ;   et al. | 2002-06-27 |
Plasma Treatment To Enhance Adhesion And To Minimize Oxidation Of Carbon-containing Layers App 20020054962 - HUANG, JUDY | 2002-05-09 |
Mixed frequency CVD process Grant 6,358,573 - Raoux , et al. March 19, 2 | 2002-03-19 |
Plasma Treatment For Cooper Oxide Reduction App 20010049181 - RATHI, SUDHA ;   et al. | 2001-12-06 |
Mixed frequency CVD apparatus Grant 6,098,568 - Raoux , et al. August 8, 2 | 2000-08-08 |
Process for depositing high deposition rate halogen-doped silicon oxide layer Grant 6,077,764 - Sugiarto , et al. June 20, 2 | 2000-06-20 |