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Photo Mask Data Correction Method
App 20220308439 - TIEN; Fu An ; et al. | 2022-09-29 |
Photolithography method and apparatus
Grant 11,429,027 - Yu , et al. August 30, 2 | 2022-08-30 |
Method Of Manufacturing A Semiconductor Device And Apparatus For Manufacturing The Semiconductor Device
App 20220260931 - YU; Shinn-Sheng ; et al. | 2022-08-18 |
Method of mask data synthesis and mask making
Grant 11,415,890 - Huang , et al. August 16, 2 | 2022-08-16 |
Photo mask data correction method
Grant 11,360,379 - Tien , et al. June 14, 2 | 2022-06-14 |
Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device
Grant 11,320,747 - Yu , et al. May 3, 2 | 2022-05-03 |
Importing and exporting circuit layouts
Grant 11,204,897 - Tien , et al. December 21, 2 | 2021-12-21 |
Method For Mask Data Synthesis With Wafer Target Adjustment
App 20210373443 - HUANG; Hsu-Ting ; et al. | 2021-12-02 |
Test Pattern Generation Systems And Methods
App 20210365625 - Tien; Fu-An ; et al. | 2021-11-25 |
Lithography Simulation Method
App 20210357571 - TIEN; Fu An ; et al. | 2021-11-18 |
Method for mask data synthesis with wafer target adjustment
Grant 11,092,899 - Huang , et al. August 17, 2 | 2021-08-17 |
Test pattern generation systems and methods
Grant 11,093,683 - Tien , et al. August 17, 2 | 2021-08-17 |
Lithography simulation method
Grant 11,080,458 - Tien , et al. August 3, 2 | 2021-08-03 |
Lithography model calibration
Grant 11,061,318 - Lo , et al. July 13, 2 | 2021-07-13 |
Method Of Mask Data Synthesis And Mask Making
App 20210191254 - HUANG; Hsu-Ting ; et al. | 2021-06-24 |
Photo Mask Data Correction Method
App 20210103211 - TIEN; Fu An ; et al. | 2021-04-08 |
Method Of Manufacturing A Semiconductor Device And Apparatus For Manufacturing The Semiconductor Device
App 20210096475 - YU; Shinn-Sheng ; et al. | 2021-04-01 |
Method of mask simulation model for OPC and mask making
Grant 10,962,875 - Huang , et al. March 30, 2 | 2021-03-30 |
Method of mask data synthesis and mask making
Grant 10,942,443 - Huang , et al. March 9, 2 | 2021-03-09 |
Methods of making mask using transmission cross coefficient (TCC) matrix of lithography process optical system
Grant 10,867,112 - Huang , et al. December 15, 2 | 2020-12-15 |
Mask process correction
Grant 10,866,505 - Huang , et al. December 15, 2 | 2020-12-15 |
Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device
Grant 10,866,525 - Yu , et al. December 15, 2 | 2020-12-15 |
Photo mask data correction method
Grant 10,866,506 - Tien , et al. December 15, 2 | 2020-12-15 |
Lithography Model Calibration
App 20200278604 - LO; Shih-Hsiang ; et al. | 2020-09-03 |
Method For Mask Data Synthesis With Wafer Target Adjustment
App 20200174380 - HUANG; Hsu-Ting ; et al. | 2020-06-04 |
Photo Mask Data Correction Method
App 20200133115 - TIEN; Fu An ; et al. | 2020-04-30 |
Test Pattern Generation Systems And Methods
App 20200134131 - Tien; Fu-An ; et al. | 2020-04-30 |
Importing And Exporting Circuit Layouts
App 20200133924 - TIEN; Fu An ; et al. | 2020-04-30 |
Method of Mask Simulation Model for OPC and Mask Making
App 20200103747 - Huang; Hsu-Ting ; et al. | 2020-04-02 |
Lithography Simulation Method
App 20200103764 - TIEN; Fu An ; et al. | 2020-04-02 |
Mask Process Correction
App 20200096857 - HUANG; Hsu-Ting ; et al. | 2020-03-26 |
Photolithography Method And Apparatus
App 20200057375 - YU; Shinn-Sheng ; et al. | 2020-02-20 |
Method Of Manufacturing A Semiconductor Device And Apparatus For Manufacturing The Semiconductor Device
App 20200041915 - YU; Shinn-Sheng ; et al. | 2020-02-06 |
Mask Making Method
App 20200004135 - HUANG; Hsu-Ting ; et al. | 2020-01-02 |
Method of mask simulation model for OPC and mask making
Grant 10,495,967 - Huang , et al. De | 2019-12-03 |
Source beam optimization method for improving lithography printability
Grant 10,417,376 - Huang , et al. Sept | 2019-09-17 |
Method Of Mask Data Synthesis And Mask Making
App 20190146328 - HUANG; Hsu-Ting ; et al. | 2019-05-16 |
Method of Mask Simulation Model for OPC and Mask Making
App 20190094680 - Huang; Hsu-Ting ; et al. | 2019-03-28 |
Source Beam Optimization Method for Improving Lithography Printability
App 20180285512 - Huang; Hsu-Ting ; et al. | 2018-10-04 |
Source beam optimization method for improving lithography printability
Grant 9,990,460 - Huang , et al. June 5, 2 | 2018-06-05 |
Source Beam Optimization Method for Improving Lithography Printability
App 20180096094 - Huang; Hsu-Ting ; et al. | 2018-04-05 |
Generating final mask pattern by performing inverse beam technology process
Grant 9,747,408 - Huang , et al. August 29, 2 | 2017-08-29 |
Method of Mask Data Synthesis and Mask Making
App 20170053056 - Huang; Hsu-Ting ; et al. | 2017-02-23 |
System and method for pattern correction in e-beam lithography
Grant 9,529,959 - Wang , et al. December 27, 2 | 2016-12-27 |
System And Method For Pattern Correction In E-beam Lithography
App 20150242562 - WANG; Hung-Chun ; et al. | 2015-08-27 |
System and method for calibrating a lithography model
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Apparatus and method for segmenting edges for optical proximity correction
Grant 8,122,389 - Sezginer , et al. February 21, 2 | 2012-02-21 |
Apparatus And Method For Segmenting Edges For Optical Proximity Correction
App 20100186000 - SEZGINER; ABDURRAHMAN ; et al. | 2010-07-22 |
Apparatus and method for photomask design
Grant 7,743,359 - Sezginer , et al. June 22, 2 | 2010-06-22 |
Apparatus and method for segmenting edges for optical proximity correction
Grant 7,743,358 - Sezginer , et al. June 22, 2 | 2010-06-22 |
Apparatus and method for compensating a lithography projection tool
Grant 7,519,940 - Huang , et al. April 14, 2 | 2009-04-14 |
Apparatus and method for characterizing an image system in lithography projection tool
Grant 7,379,170 - Huang , et al. May 27, 2 | 2008-05-27 |
Diffracting, aperiodic targets for overlay metrology and method to detect gross overlay
Grant 7,230,704 - Sezginer , et al. June 12, 2 | 2007-06-12 |
Apparatus and method for measuring overlay by diffraction gratings
Grant 7,230,703 - Sezginer , et al. June 12, 2 | 2007-06-12 |
Measurement of overlay using diffraction gratings when overlay exceeds the grating period
Grant 7,193,715 - Smedt , et al. March 20, 2 | 2007-03-20 |
Apparatus and method for characterizing an image system in lithography projection tool
App 20060251994 - Huang; Hsu-Ting ; et al. | 2006-11-09 |
Apparatus and method for compensating a lithography projection tool
App 20060248497 - Huang; Hsu-Ting ; et al. | 2006-11-02 |
Apparatus and method for photomask design
App 20060248498 - Sezginer; Abdurrahman ; et al. | 2006-11-02 |
Apparatus and method for segmenting edges for optical proximity correction
App 20060248496 - Sezginer; Abdurrahman ; et al. | 2006-11-02 |
Apparatus and method for measuring overlay by diffraction gratings
App 20050012928 - Sezginer, Abdurrahman ; et al. | 2005-01-20 |
Diffracting, aperiodic targets for overlay metrology and method to detect gross overlay
App 20040246482 - Sezginer, Abdurrahman ; et al. | 2004-12-09 |
Measurement of overlay using diffraction gratings when overlay exceeds the grating period
App 20040137651 - Smedt, Rodney ; et al. | 2004-07-15 |
Interferometry-based method and apparatus for overlay metrology
App 20040066517 - Huang, Hsu-Ting ; et al. | 2004-04-08 |
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