Patent | Date |
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Selective Recessing To Form A Fully Aligned Via App 20220181205 - Briggs; Benjamin D. ;   et al. | 2022-06-09 |
Self-forming Barrier For Use In Air Gap Formation App 20200402849 - Briggs; Benjamin D. ;   et al. | 2020-12-24 |
Low Aspect Ratio Interconnect App 20200328156 - Briggs; Benjamin D. ;   et al. | 2020-10-15 |
Self-forming barrier for use in air gap formation Grant 10,763,166 - Briggs , et al. Sep | 2020-09-01 |
Air gap and air spacer pinch off Grant 10,366,940 - Bonilla , et al. July 30, 2 | 2019-07-30 |
Self-forming Barrier For Use In Air Gap Formation App 20190157146 - Briggs; Benjamin D. ;   et al. | 2019-05-23 |
Air gap and air spacer pinch off Grant 10,256,171 - Bonilla , et al. | 2019-04-09 |
Air gap and air spacer pinch off Grant 10,242,933 - Bonilla , et al. | 2019-03-26 |
Self-forming barrier for use in air gap formation Grant 10,229,851 - Briggs , et al. | 2019-03-12 |
Metal silicate spacers for fully aligned vias Grant 10,211,138 - Briggs , et al. Feb | 2019-02-19 |
Air gap and air spacer pinch off Grant 10,177,076 - Bonilla , et al. J | 2019-01-08 |
Selective blocking boundary placement for circuit locations requiring electromigration short-length Grant 10,170,416 - Briggs , et al. J | 2019-01-01 |
Metal Silicate Spacers For Fully Aligned Vias App 20180269144 - Briggs; Benjamin D. ;   et al. | 2018-09-20 |
Metal silicate spacers for fully aligned vias Grant 10,049,974 - Briggs , et al. August 14, 2 | 2018-08-14 |
Selective Blocking Boundary Placement For Circuit Locations Requiring Electromigration Short-length App 20180114750 - Briggs; Benjamin D. ;   et al. | 2018-04-26 |
Air Gap And Air Spacer Pinch Off App 20180108596 - Bonilla; Griselda ;   et al. | 2018-04-19 |
Air Gap And Air Spacer Pinch Off App 20180090587 - Bonilla; Griselda ;   et al. | 2018-03-29 |
Air Gap And Air Spacer Pinch Off App 20180090418 - Bonilla; Griselda ;   et al. | 2018-03-29 |
Air Gap And Air Spacer Pinch Off App 20180090588 - Bonilla; Griselda ;   et al. | 2018-03-29 |
Self-forming Barrier For Use In Air Gap Formation App 20180061708 - Briggs; Benjamin D. ;   et al. | 2018-03-01 |
Metal Silicate Spacers For Fully Aligned Vias App 20180061750 - Briggs; Benjamin D. ;   et al. | 2018-03-01 |
Selective blocking boundary placement for circuit locations requiring electromigration short-length Grant 9,905,513 - Briggs , et al. February 27, 2 | 2018-02-27 |
Air gap and air spacer pinch off Grant 9,793,193 - Bonilla , et al. October 17, 2 | 2017-10-17 |
Air gap and air spacer pinch off Grant 9,786,760 - Bonilla , et al. October 10, 2 | 2017-10-10 |
Air-dielectric for subtractive etch line and via metallization Grant 8,828,862 - Horak , et al. September 9, 2 | 2014-09-09 |
Air-dielectric For Subtractive Etch Line And Via Metallization App 20140203453 - Horak; David V. ;   et al. | 2014-07-24 |
Air-dielectric for subtractive etch line and via metallization Grant 8,735,279 - Horak , et al. May 27, 2 | 2014-05-27 |
Selectively coated self-aligned mask Grant 8,491,987 - Colburn , et al. July 23, 2 | 2013-07-23 |
Methods to mitigate plasma damage in organosilicate dielectrics Grant 8,481,423 - Arnold , et al. July 9, 2 | 2013-07-09 |
Methods to mitigate plasma damage in organosilicate dielectrics Grant 8,470,706 - Arnold , et al. June 25, 2 | 2013-06-25 |
Methods To Mitigate Plasma Damage In Organosilicate Dielectrics App 20120329269 - Arnold; John C. ;   et al. | 2012-12-27 |
Interconnect structures with ternary patterned features generated from two lithographic processes Grant 8,338,952 - Colburn , et al. December 25, 2 | 2012-12-25 |
Air-dielectric For Subtractive Etch Line And Via Metallization App 20120187566 - Horak; David V. ;   et al. | 2012-07-26 |
Method for producing self-aligned mask, articles produced by same and composition for same Grant 8,119,322 - Brunner , et al. February 21, 2 | 2012-02-21 |
Methods and structures to enable self-aligned via etch for Cu damascene structure using trench first metal hard mask (TFMHM) scheme Grant 8,114,769 - Srivastava , et al. February 14, 2 | 2012-02-14 |
Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same Grant 7,948,051 - Colburn , et al. May 24, 2 | 2011-05-24 |
Strengthening of a structure by infiltration Grant 7,678,673 - Huang , et al. March 16, 2 | 2010-03-16 |
Antireflective hardmask and uses thereof Grant 7,648,820 - Babich , et al. January 19, 2 | 2010-01-19 |
Interconnect Structures With Ternary Patterned Features Generated From Two Lithographic Processes App 20090294982 - Colburn; Matthew E. ;   et al. | 2009-12-03 |
Interconnect Structures With Partially Self Aligned Vias And Methods To Produce Same App 20090200683 - Colburn; Matthew Earl ;   et al. | 2009-08-13 |
Methods To Mitigate Plasma Damage In Organosilicate Dielectrics App 20090075472 - Arnold; John C. ;   et al. | 2009-03-19 |
Strengthening Of A Structure By Infiltration App 20090035480 - Huang; Elbert ;   et al. | 2009-02-05 |
Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same Grant 7,485,341 - Colburn , et al. February 3, 2 | 2009-02-03 |
Interconnect Structures With Ternary Patterned Features Generated From Two Lithographic Processes App 20080284039 - Colburn; Matthew E. ;   et al. | 2008-11-20 |
Nonlithographic Method to Produce Self-Aligned Mask, Articles Produced by Same and Compositions for Same App 20080265382 - Colburn; Matthew E. ;   et al. | 2008-10-30 |
Nonlithographic Method to Produce Self-Aligned Mask, Articles Produced by Same and Compositions for Same App 20080265415 - Colburn; Matthew E. ;   et al. | 2008-10-30 |
Method For Producing Self-aligned Mask, Articles Produced By Same And Composition For Same App 20080220615 - Brunner; Timothy A. ;   et al. | 2008-09-11 |
Method of forming closed air gap interconnects and structures formed thereby Grant 7,393,776 - Colburn , et al. July 1, 2 | 2008-07-01 |
Method for producing self-aligned mask, articles produced by same and composition for same Grant 7,378,738 - Brunner , et al. May 27, 2 | 2008-05-27 |
Closed air gap interconnect structure Grant 7,361,991 - Saenger , et al. April 22, 2 | 2008-04-22 |
Method of forming closed air gap interconnects and structures formed thereby Grant 7,309,649 - Colburn , et al. December 18, 2 | 2007-12-18 |
Antireflective Hardmask and Uses Thereof App 20070105363 - Babich; Katherina E. ;   et al. | 2007-05-10 |
Method for fabricating interconnect structures with reduced plasma damage Grant 7,214,603 - Dellaguardia , et al. May 8, 2 | 2007-05-08 |
Antireflective hardmask and uses thereof Grant 7,172,849 - Babich , et al. February 6, 2 | 2007-02-06 |
Method of forming closed air gap interconnects and structures formed thereby App 20060267208 - Colburn; Matthew E. ;   et al. | 2006-11-30 |
Method of forming closed air gap interconnects and structures formed thereby App 20060258147 - Colburn; Matthew E. ;   et al. | 2006-11-16 |
Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same App 20050233597 - Colburn, Matthew E. ;   et al. | 2005-10-20 |
Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same Grant 6,911,400 - Colburn , et al. June 28, 2 | 2005-06-28 |
Method of forming closed air gap interconnects and structures formed thereby App 20050062165 - Saenger, Katherine L. ;   et al. | 2005-03-24 |
Method for producing self-aligned mask, articles produced by same and composition for same App 20050045997 - Brunner, Timothy A. ;   et al. | 2005-03-03 |
Antireflective hardmask and uses thereof App 20050042538 - Babich, Katherina ;   et al. | 2005-02-24 |
Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same App 20040213971 - Colburn, Matthew E. ;   et al. | 2004-10-28 |
Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same App 20040087176 - Colburn, Matthew E. ;   et al. | 2004-05-06 |
Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same App 20040087177 - Colburn, Matthew E. ;   et al. | 2004-05-06 |
Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same Grant 6,641,899 - Colburn , et al. November 4, 2 | 2003-11-04 |