Huang; Chien-Ling
Patent Applications and Registrations
Patent applications and USPTO patent grants for Huang; Chien-Ling.The latest application filed is for "system and method for dry chamber temperature control".
- Huang; Chien-Ling - Hsinchu TW
- Huang, Chien-Ling - Hsin-Chu TW
- Huang, Chien-Ling - Hsin Chu City TW
| Patent | Date |
|---|---|
| Dual mode hybrid control and method for CMP slurry Grant 6,926,584 - Chang , et al. August 9, 2 | 2005-08-09 |
| Automatic sensing wafer blade and method for using Grant 6,896,304 - Li , et al. May 24, 2 | 2005-05-24 |
| System and method for dry chamber temperature control App 20050016467 - Hsiao, Yi-Li ; et al. | 2005-01-27 |
| Multi-phase pressure control valve for process chamber Grant 6,843,264 - Chang , et al. January 18, 2 | 2005-01-18 |
| Multi - phase pressure control valve for process chamber App 20040118464 - Chang, Chih-Tien ; et al. | 2004-06-24 |
| Dual mode hybrid control and method for CMP slurry App 20040072503 - Chang, Chao-Jung ; et al. | 2004-04-15 |
| Automatic sensing wafer blade and method for using App 20040041421 - Hsiao, Yi-Li ; et al. | 2004-03-04 |
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