| Patent | Date |
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Systems And Methods For Compensating Dispersion Of A Beam Separator In A Single-beam Or Multi-beam Apparatus
App 20220262594 - REN; Weiming ; et al. | 2022-08-18 |
Multi-cell Detector For Charged Particles
App 20220246391 - WANG; Joe ; et al. | 2022-08-04 |
Apparatus For Multiple Charged-particle Beams
App 20220246395 - REN; Weiming ; et al. | 2022-08-04 |
Apparatus of plural charged-particle beams
Grant 11,398,368 - Ren , et al. July 26, 2 | 2022-07-26 |
Apparatus Using Multiple Beams Of Charged Particles
App 20220223366 - HU; Xuerang ; et al. | 2022-07-14 |
Multi-beam Inspection Apparatus
App 20220216029 - REN; Weiming ; et al. | 2022-07-07 |
System And Method For Alignment Of Secondary Beams In Multi-beam Inspection Apparatus
App 20220189726 - XI; Qingpo ; et al. | 2022-06-16 |
Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus
Grant 11,328,894 - Ren , et al. May 10, 2 | 2022-05-10 |
Apparatus for multiple charged-particle beams
Grant 11,302,514 - Ren , et al. April 12, 2 | 2022-04-12 |
Apparatus using multiple beams of charged particles
Grant 11,289,304 - Hu , et al. March 29, 2 | 2022-03-29 |
Multi-beam inspection apparatus with improved detection performance of signal electrons
Grant 11,282,675 - Ren , et al. March 22, 2 | 2022-03-22 |
Multi-beam inspection apparatus
Grant 11,232,928 - Ren , et al. January 25, 2 | 2022-01-25 |
Multi-cell detector for charged particles
Grant 11,222,766 - Wang , et al. January 11, 2 | 2022-01-11 |
Apparatus Using Multiple Charged Particle Beams
App 20220005665 - REN; Weiming ; et al. | 2022-01-06 |
Replaceable Module For A Charged Particle Apparatus
App 20210391139 - OTTEN; Christiaan ; et al. | 2021-12-16 |
Apparatus Of Plural Charged-particle Beams
App 20210384008 - LI; Shuai ; et al. | 2021-12-09 |
Apparatus Of Plural Charged-particle Beams
App 20210233736 - REN; Weiming ; et al. | 2021-07-29 |
Apparatus of plural charged-particle beams
Grant 11,062,877 - Li , et al. July 13, 2 | 2021-07-13 |
Apparatus using multiple charged particle beams
Grant 11,062,874 - Ren , et al. July 13, 2 | 2021-07-13 |
Apparatus Of Plural Charged-particle Beams
App 20210193433 - REN; Weiming ; et al. | 2021-06-24 |
Multiple Charged-particle Beam Apparatus With Low Crosstalk
App 20210193437 - REN; Weiming ; et al. | 2021-06-24 |
Multi-beam Inspection Apparatus
App 20210151280 - HU; Xuerang ; et al. | 2021-05-20 |
Multi-beam Inspection Apparatus With Improved Detection Performance Of Signal Electrons
App 20210151291 - REN; Weiming ; et al. | 2021-05-20 |
Multi-beam inspection apparatus with improved detection performance of signal electrons
Grant 10,892,138 - Ren , et al. January 12, 2 | 2021-01-12 |
Apparatus of plural charged-particle beams
Grant 10,879,031 - Ren , et al. December 29, 2 | 2020-12-29 |
Multi-beam inspection apparatus
Grant 10,879,032 - Hu , et al. December 29, 2 | 2020-12-29 |
Multiple Charged-particle Beam Apparatus And Methods Of Operating The Same
App 20200381212 - REN; Weiming ; et al. | 2020-12-03 |
Multiple Charged-particle Beam Apparatus With Low Crosstalk
App 20200381207 - REN; Weiming ; et al. | 2020-12-03 |
Multiple Charged-particle Beam Apparatus And Methods
App 20200381211 - REN; Weiming ; et al. | 2020-12-03 |
Apparatus of plural charged-particle beams
Grant 10,811,222 - Ren , et al. October 20, 2 | 2020-10-20 |
Multi-beam Inspection Apparatus With Single-beam Mode
App 20200321191 - REN; Weiming ; et al. | 2020-10-08 |
An Apparatus Using Charged Particle Beams
App 20200303155 - HU; Xuerang ; et al. | 2020-09-24 |
Multi-cell Detector For Charged Particles
App 20200286708 - WANG; Joe ; et al. | 2020-09-10 |
Sample Pre-charging Methods And Apparatuses For Charged Particle Beam Inspection
App 20200266023 - LIU; Xuedong ; et al. | 2020-08-20 |
Multi-beam Inspection Apparatus
App 20200211811 - REN; Weiming ; et al. | 2020-07-02 |
An Apparatus Using Multiple Beams Of Charged Particles
App 20200203114 - HU; Xuerang ; et al. | 2020-06-25 |
Apparatus Of Plural Charged Particle Beams
App 20200161079 - REN; Weiming ; et al. | 2020-05-21 |
Apparatus Of Plural Charged-particle Beams
App 20200152412 - REN; Weiming ; et al. | 2020-05-14 |
Apparatus Of Plural Charged-particle Beams
App 20200152421 - Li; Shuai ; et al. | 2020-05-14 |
System And Method For Aligning Electron Beams In Multi-beam Inspection Apparatus
App 20200124546 - HU; Xuerang ; et al. | 2020-04-23 |
Apparatus For Multiple Charged-particle Beams
App 20200051779 - REN; Weiming ; et al. | 2020-02-13 |
Apparatus of plural charged-particle beams
Grant 10,541,110 - Li , et al. Ja | 2020-01-21 |
Multi-beam Inspection Apparatus
App 20190341222 - HU; Xuerang ; et al. | 2019-11-07 |
An Apparatus Using Multiple Charged Particle Beams
App 20190333732 - REN; Weiming ; et al. | 2019-10-31 |
Multi-beam Inspection Apparatus With Improved Detection Performance Of Signal Electrons
App 20190279844 - REN; Weiming ; et al. | 2019-09-12 |
Apparatus of plural charged-particle beams
Grant 10,395,886 - Ren , et al. A | 2019-08-27 |
Apparatus Of Plural Charged-particle Beams
App 20190172677 - REN; Weiming ; et al. | 2019-06-06 |
Systems And Methods For Compensating Dispersion Of A Beam Separator In A Single-beam Or Multi-beam Apparatus
App 20190035595 - REN; Weiming ; et al. | 2019-01-31 |
Apparatus Of Plural Charged-particle Beams
App 20180350555 - LI; Shuai ; et al. | 2018-12-06 |
Apparatus of plural charged-particle beams
Grant 10,141,160 - Ren , et al. Nov | 2018-11-27 |
Apparatus of plural charged-particle beams
Grant 10,062,541 - Ren , et al. August 28, 2 | 2018-08-28 |
Apparatus of plural charged-particle beams
Grant 9,922,799 - Li , et al. March 20, 2 | 2018-03-20 |
Apparatus of Plural Charged-Particle Beams
App 20170213688 - Ren; Weiming ; et al. | 2017-07-27 |
Apparatus of Plural Charged-Particle Beams
App 20170154756 - Ren; Weiming ; et al. | 2017-06-01 |
Apparatus of Plural Charged-Particle Beams
App 20170025243 - Ren; Weiming ; et al. | 2017-01-26 |
Apparatus of Plural Charged-Particle Beams
App 20170025241 - Li; Shuai ; et al. | 2017-01-26 |
Apparatus of plural charged particle beams with multi-axis magnetic lenses
Grant 9,431,209 - Ren , et al. August 30, 2 | 2016-08-30 |
Apparatus of Plural Charged Particle Beams with Multi-axis Magnetic Lenses
App 20160064180 - Ren; Weiming ; et al. | 2016-03-03 |
Multi-axis magnetic lens for focusing a plurality of charged particle beams
Grant 9,202,658 - Chen , et al. December 1, 2 | 2015-12-01 |
Apparatus of plural charged particle beams with multi-axis magnetic lens
Grant 9,105,440 - Chen , et al. August 11, 2 | 2015-08-11 |
Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams
App 20150179384 - Chen; Zhongwei ; et al. | 2015-06-25 |
Apparatus Of Plural Charged Particle Beams With Multi-axis Magnetic Lens
App 20150060662 - Chen; Zhongwei ; et al. | 2015-03-05 |
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