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Multi-layer deposition system and process Grant 10,669,627 - Yun , et al. | 2020-06-02 |
Hybrid parylene-metal oxide layers for corrosion resistant coatings Grant 10,553,512 - Baker , et al. Fe | 2020-02-04 |
Multi-layer Deposition System And Process App 20180237909 - Yun; Yang ;   et al. | 2018-08-23 |
Ald/parylene Multi-layer Thin Film Stack App 20170159178 - Baker; Layton ;   et al. | 2017-06-08 |
Hybrid Parylene-metal Oxide Interstacked Coatings App 20170130061 - Baker; Layton ;   et al. | 2017-05-11 |
Hybrid Parylene-metal Oxide Layers For Corrosion Resistant Coatings App 20170133292 - Baker; Layton ;   et al. | 2017-05-11 |
DRAM MIMCAP Stack with MoO2 Electrode App 20160133691 - Phatak; Prashant B. ;   et al. | 2016-05-12 |
Low-Temperature Deposition of Metal Silicon Nitrides from Silicon Halide Precursors App 20160133837 - Hsueh; Chien-Lan ;   et al. | 2016-05-12 |
Resistive switching layers including Hf-Al-O Grant 9,276,203 - Hsueh , et al. March 1, 2 | 2016-03-01 |
Confined defect profiling within resistive random memory access cells Grant 9,269,896 - Wang , et al. February 23, 2 | 2016-02-23 |
High productivity combinatorial processing using pressure-controlled one-way valves Grant 9,269,567 - Hsueh , et al. February 23, 2 | 2016-02-23 |
Low-temperature deposition of nitrides by UV-assisted ALD or CVD Grant 9,246,099 - Hsueh , et al. January 26, 2 | 2016-01-26 |
Protective Coatings For Electronic Devices And Atomic Layer Deposition Processes For Forming The Protective Coatings App 20150361551 - Su; Tining ;   et al. | 2015-12-17 |
Metal organic chemical vapor deposition of embedded resistors for ReRAM cells Grant 9,178,152 - Hsueh , et al. November 3, 2 | 2015-11-03 |
Systems and Methods for Parallel Combinatorial Vapor Deposition Processing App 20150184287 - Tsung; James ;   et al. | 2015-07-02 |
Low-temperature growth of complex compound films App 20150176122 - Hsueh; Chien-Lan ;   et al. | 2015-06-25 |
Methods of forming nitrides at low substrate temperatures App 20150179316 - Hsueh; Chien-Lan ;   et al. | 2015-06-25 |
Metal Organic Chemical Vapor Deposition of Embedded Resistors for ReRAM Cells App 20150179937 - Hsueh; Chien-Lan ;   et al. | 2015-06-25 |
Controlling composition of multiple oxides in resistive switching layers using atomic layer deposition Grant 9,065,040 - Hsueh , et al. June 23, 2 | 2015-06-23 |
One-Way Valves for Controlling Flow into Deposition Chamber App 20150170908 - Hsueh; Chien-Lan ;   et al. | 2015-06-18 |
Using saturated and unsaturated ALD processes to deposit oxides as ReRAM switching layer Grant 9,040,413 - Higuchi , et al. May 26, 2 | 2015-05-26 |
Metal organic chemical vapor deposition of resistive switching layers for ReRAM cells Grant 9,029,192 - Hsueh , et al. May 12, 2 | 2015-05-12 |
Nonvolatile resistive memory element with a silicon-based switching layer Grant 9,018,068 - Higuchi , et al. April 28, 2 | 2015-04-28 |
Metal aluminum nitride embedded resistors for resistive random memory access cells Grant 9,006,696 - Tendulkar , et al. April 14, 2 | 2015-04-14 |
Controlling Composition Of Multiple Oxides In Resistive Switching Layers Using Atomic Layer Deposition App 20150060753 - Hsueh; Chien-Lan ;   et al. | 2015-03-05 |
ReRAM cells including Ta.sub.XSi.sub.YN embedded resistors Grant 8,969,129 - Hsueh , et al. March 3, 2 | 2015-03-03 |
Confined Defect Profiling within Resistive Random Memory Access Cells App 20150034898 - Wang; Yun ;   et al. | 2015-02-05 |
Metal Aluminum Nitride Embedded Resistors for Resistive Random Memory Access Cells App 20140377931 - Tendulkar; Mihir ;   et al. | 2014-12-25 |
Confined defect profiling within resistive random memory access cells Grant 8,913,418 - Wang , et al. December 16, 2 | 2014-12-16 |
ReRAM Cells Including TaXSiYN Embedded Resistors App 20140357046 - Hsueh; Chien-Lan ;   et al. | 2014-12-04 |
Controlling composition of multiple oxides in resistive switching layers using atomic layer deposition Grant 8,883,557 - Hsueh , et al. November 11, 2 | 2014-11-11 |
Nonvolatile resistive memory element with a silicon-based switching layer App 20140322884 - Higuchi; Randall J. ;   et al. | 2014-10-30 |
Using TiON as electrodes and switching layers in ReRAM devices Grant 8,853,046 - Lu , et al. October 7, 2 | 2014-10-07 |
Metal aluminum nitride embedded resistors for resistive random memory access cells Grant 8,853,661 - Tendulkar , et al. October 7, 2 | 2014-10-07 |
ReRAM stacks preparation by using single ALD or PVD chamber Grant 8,846,484 - Lee , et al. September 30, 2 | 2014-09-30 |
Confined Defect Profiling within Resistive Random Memory Access Cells App 20140264231 - Wang; Yun ;   et al. | 2014-09-18 |
Metal Aluminum Nitride Embedded Resistors for Resistive Random Memory Access Cells App 20140264223 - Tendulkar; Mihir ;   et al. | 2014-09-18 |
ReRAM cells including Ta.sub.XSi.sub.YN embedded resistors Grant 8,835,890 - Hsueh , et al. September 16, 2 | 2014-09-16 |
Resistive Switching Layers Including Hf-Al-O App 20140175361 - Hsueh; Chien-Lan ;   et al. | 2014-06-26 |
Using saturated and unsaturated ALD processes to deposit oxides as ReRAM switching layer App 20140166956 - Higuchi; Randall J. ;   et al. | 2014-06-19 |
ReRAM Cells Including TaXSiYN Embedded Resistors App 20140103284 - Hsueh; Chien-Lan ;   et al. | 2014-04-17 |
USING TiON AS ELECTRODES AND SWITCHING LAYERS IN ReRAM DEVICES App 20130214236 - Lu; Nan ;   et al. | 2013-08-22 |
ReRAM STACKS PREPARATION BY USING SINGLE ALD OR PVD CHAMBER App 20130210193 - Lee; Albert ;   et al. | 2013-08-15 |