Patent | Date |
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Multiple Layer Electrode Transducers App 20210331912 - Hsu; Wan-Thai ;   et al. | 2021-10-28 |
Multiple coil spring MEMS resonator Grant 9,866,200 - Hsu , et al. January 9, 2 | 2018-01-09 |
Vertical differential resonator Grant 9,490,769 - Hsu , et al. November 8, 2 | 2016-11-08 |
Temperature compensated resonator with a pair of spaced apart internal dielectric layers Grant 9,431,993 - Hsu , et al. August 30, 2 | 2016-08-30 |
Multiple Coil Spring Mems Resonator App 20160118955 - Hsu; Wan-Thai ;   et al. | 2016-04-28 |
Vertical differential resonator Grant 8,878,633 - Hsu , et al. November 4, 2 | 2014-11-04 |
Bias voltage tuning of MEMS resonator operation point Grant 8,686,802 - Brown , et al. April 1, 2 | 2014-04-01 |
Feedthrough capacitance compensation for resonant devices Grant 8,193,869 - Brown , et al. June 5, 2 | 2012-06-05 |
MEMS resonator-based signal modulation Grant 7,812,680 - Brown , et al. October 12, 2 | 2010-10-12 |
Feedthrough capacitance compensation for resonant devices Grant 7,804,374 - Brown , et al. September 28, 2 | 2010-09-28 |
Counter-based resonator frequency compensation Grant 7,679,466 - Cioffi , et al. March 16, 2 | 2010-03-16 |
Method and apparatus for frequency tuning of a micro-mechanical resonator Grant 7,307,496 - Huang , et al. December 11, 2 | 2007-12-11 |
Method and Apparatus for Frequency Tuning of a Micro-Mechanical Resonator App 20070096850 - Huang; Xiangxiang ;   et al. | 2007-05-03 |
Method for frequency tuning of a micro-mechanical resonator Grant 7,170,369 - Huang , et al. January 30, 2 | 2007-01-30 |
Method and apparatus for frequency tuning of a micro-mechanical resonator Grant 7,068,126 - Huang , et al. June 27, 2 | 2006-06-27 |
Method for frequency tuning of a micro-mechanical resonator App 20060006964 - Huang; Xiangxiang ;   et al. | 2006-01-12 |
Mechanical resonator device having phenomena-dependent electrical stiffness Grant 6,958,566 - Nguyen , et al. October 25, 2 | 2005-10-25 |
Method and apparatus for frequency tuning of a micro-mechanical resonator App 20050195049 - Huang, Xiangxiang ;   et al. | 2005-09-08 |
Micromechanical resonator having short support beams Grant 6,930,569 - Hsu August 16, 2 | 2005-08-16 |
Apparatus comprising a micromechanical resonator App 20050024165 - Hsu, Wan-Thai | 2005-02-03 |
Method for making micromechanical structures having at least one lateral, small gap therebetween and micromechanical device produced thereby Grant 6,846,691 - Hsu , et al. January 25, 2 | 2005-01-25 |
Method for making micromechanical structures having at least one lateral, small gap therebetween and micromechanical device produced thereby App 20040150057 - Hsu, Wan-Thai ;   et al. | 2004-08-05 |
Micromechanical resonator device Grant 6,739,190 - Hsu , et al. May 25, 2 | 2004-05-25 |
Mechanical resonator device having phenomena-dependent electrical stiffness App 20030051550 - Nguyen, Clark T.-C. ;   et al. | 2003-03-20 |
Micromechanical resonator device App 20020069701 - Hsu, Wan-Thai ;   et al. | 2002-06-13 |
Method for making micromechanical structures having at least one lateral, small gap therebetween and micromechanical device produced thereby App 20020070816 - Hsu, Wan-Thai ;   et al. | 2002-06-13 |