Hsu; Samuel Chu-Chiang

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hsu; Samuel Chu-Chiang.The latest application filed is for "retaining ring having inner surfaces with facets".

Company Profile

2.20.27

Hsu; Samuel Chu-Chiang - Palo Alto CA
Hsu; Samuel Chu-Chiang - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Retaining ring having inner surfaces with features Grant 11,453,099 - Reedy , et al. September 27, 2	2022-09-27
Inner retaining ring and outer retaining ring for carrier head Grant 11,173,579 - Chen , et al. November 16, 2	2021-11-16
Retaining Ring Having Inner Surfaces with Facets App 20210249276 - Oh; Jeonghoon ; et al.	2021-08-12
Retaining ring having inner surfaces with facets Grant 11,056,350 - Oh , et al. July 6, 2	2021-07-06
Retaining Ring Having Inner Surfaces with Features App 20200114489 - Reedy; Steven Mark ; et al.	2020-04-16
Retaining ring having inner surfaces with features Grant 10,500,695 - Reedy , et al. Dec	2019-12-10
Inner Retaining Ring And Outer Retaining Ring For Carrier Head App 20180304441 - Chen; Hung Chih ; et al.	2018-10-25
Inner retaining ring and outer retaining ring for carrier head Grant 10,022,837 - Chen , et al. July 17, 2	2018-07-17
Configurable pressure design for multizone chemical mechanical planarization polishing head Grant 9,610,672 - Oh , et al. April 4, 2	2017-04-04
Retaining Ring Having Inner Surfaces with Features App 20160346897 - Reedy; Steven Mark ; et al.	2016-12-01
Retaining ring with selected stiffness and thickness Grant 9,492,905 - Chen , et al. November 15, 2	2016-11-15
Retaining ring having inner surfaces with facets Grant 9,368,371 - Oh , et al. June 14, 2	2016-06-14
Retaining Ring Having Inner Surfaces With Facets App 20160151879 - Oh; Jeonghoon ; et al.	2016-06-02
Inner Retaining Ring And Outer Retaining Ring For Carrier Head App 20160082571 - Chen; Hung Chih ; et al.	2016-03-24
Configurable Pressure Design For Multizone Chemical Mechanical Planarization Polishing Head App 20160059377 - OH; Jeonghoon ; et al.	2016-03-03
Retaining Ring Having Inner Surfaces with Facets App 20150303070 - Oh; Jeonghoon ; et al.	2015-10-22
Retaining Ring With Selected Stiffness And Thickness App 20150209930 - Chen; Hung Chih ; et al.	2015-07-30
Monitoring retaining ring thickness and pressure control Grant 9,067,295 - Deshpande , et al. June 30, 2	2015-06-30
Polishing head zone boundary smoothing Grant 9,050,699 - Chen , et al. June 9, 2	2015-06-09
Methods and apparatus for an improved polishing head retaining ring Grant 9,050,700 - Chen , et al. June 9, 2	2015-06-09
Retaining ring with selected stiffness and thickness Grant 8,998,676 - Chen , et al. April 7, 2	2015-04-07
Inner retaining ring and outer retaining ring for carrier head Grant 8,840,446 - Chen , et al. September 23, 2	2014-09-23
Substrate Precession Mechanism For Cmp Polishing Head App 20140273756 - CHEN; Chih Hung ; et al.	2014-09-18
Carrier head with narrow inner ring and wide outer ring Grant 8,721,391 - Chen , et al. May 13, 2	2014-05-13
Retaining Ring With Selected Stiffness And Thickness App 20140120803 - Chen; Hung Chih ; et al.	2014-05-01
Monitoring Retaining Ring Thickness And Pressure Control App 20140027407 - Deshpande; Sameer ; et al.	2014-01-30
Sensors in Carrier Head of a CMP System App 20140020829 - Chen; Hung Chih ; et al.	2014-01-23
Apparatus and method for temperature control during polishing Grant 8,591,286 - Chen , et al. November 26, 2	2013-11-26
Polishing Head Zone Boundary Smoothing App 20130252518 - CHEN; Hung Chih ; et al.	2013-09-26
Methods And Apparatus For An Improved Polishing Head Retaining Ring App 20130196577 - Chen; Hung Chih ; et al.	2013-08-01
Inner Retaining Ring And Outer Retaining Ring For Carrier Head App 20130149942 - Chen; Hung Chih ; et al.	2013-06-13
Polishing head zone boundary smoothing Grant 8,460,067 - Chen , et al. June 11, 2	2013-06-11
Apparatus And Method For Temperature Control During Polishing App 20120040592 - CHEN; HUNG CHIH ; et al.	2012-02-16
Carrier Head With Narrow Inner Ring And Wide Outer Ring App 20120034849 - Chen; Hung Chih ; et al.	2012-02-09
Substrate Holder To Reduce Substrate Edge Stress During Chemical Mechanical Polishing App 20120021673 - Chen; Hung Chih ; et al.	2012-01-26
Polishing Head Zone Boundary Smoothing App 20100291842 - CHEN; HUNG CHIH ; et al.	2010-11-18
Carrier Head Using Flexure Restraints For Retaining Ring Alignment App 20100062694 - Yi; Jin ; et al.	2010-03-11

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