loadpatents
Patent applications and USPTO patent grants for HSU; Pei-Cheng.The latest application filed is for "method of fabricating and servicing a photomask".
Patent | Date |
---|---|
Method Of Fabricating And Servicing A Photomask App 20220299865 - YANG; Chun-Fu ;   et al. | 2022-09-22 |
Lithography mask with an amorphous capping layer Grant 11,442,356 - Lee , et al. September 13, 2 | 2022-09-13 |
Optical Assembly With Coating And Methods Of Use App 20220260932 - Hsu; Pei-Cheng ;   et al. | 2022-08-18 |
Network Type Pellicle Membrane And Method For Forming The Same App 20220244634 - HSU; Pei-Cheng ;   et al. | 2022-08-04 |
Cleaning method for photo masks and apparatus therefor Grant 11,385,538 - Lee , et al. July 12, 2 | 2022-07-12 |
Method of fabricating and servicing a photomask Grant 11,360,384 - Yang , et al. June 14, 2 | 2022-06-14 |
Reticle Container App 20220155676 - HSU; Pei-Cheng ;   et al. | 2022-05-19 |
Reflective Mask And Fabricating Method Thereof App 20220146924 - WU; Tsiao-Chen ;   et al. | 2022-05-12 |
Extreme Ultraviolet Mask With Tantalum Base Alloy Absorber App 20220137499 - HSU; Pei-Cheng ;   et al. | 2022-05-05 |
Absorber Materials For Extreme Ultraviolet Mask App 20220121101 - TANADY; Kevin ;   et al. | 2022-04-21 |
Method of Critical Dimension Control by Oxygen and Nitrogen Plasma Treatment in EUV Mask App 20220121103 - Hsu; Pei-Cheng ;   et al. | 2022-04-21 |
Euv Photo Masks And Manufacturing Method Thereof App 20220113620 - HSU; Pei-Cheng ;   et al. | 2022-04-14 |
Euv Masks To Prevent Carbon Contamination App 20220082928 - HSU; Pei-Cheng ;   et al. | 2022-03-17 |
Method Of Manufacturing Euv Photo Masks App 20220057706 - LEE; Hsin-Chang ;   et al. | 2022-02-24 |
Mask for EUV lithography and method of manufacturing the same Grant 11,249,384 - Hsu , et al. February 15, 2 | 2022-02-15 |
Reflective mask and fabricating method thereof Grant 11,243,461 - Wu , et al. February 8, 2 | 2022-02-08 |
Reticle container Grant 11,237,477 - Hsu , et al. February 1, 2 | 2022-02-01 |
Pellicle Having Vent Hole App 20220026797 - YOO; Chue San ;   et al. | 2022-01-27 |
EUV masks to prevent carbon contamination Grant 11,221,554 - Hsu , et al. January 11, 2 | 2022-01-11 |
Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask Grant 11,215,918 - Hsu , et al. January 4, 2 | 2022-01-04 |
Euv Photo Masks And Manufacturing Method Thereof App 20210405519 - LEE; Hsin-Chang ;   et al. | 2021-12-30 |
EUV photo masks and manufacturing method thereof Grant 11,204,545 - Hsu , et al. December 21, 2 | 2021-12-21 |
Cleaning Method For Photo Masks And Apparatus Therefor App 20210373436 - LEE; Hsin-Chang ;   et al. | 2021-12-02 |
Euv Photo Masks And Manufacturing Method Thereof App 20210373431 - Hsu; Pei-Cheng ;   et al. | 2021-12-02 |
Euv Photo Masks And Manufacturing Method Thereof App 20210364906 - HSU; Pei-Cheng ;   et al. | 2021-11-25 |
Lithography Mask with an Amorphous Capping Layer App 20210349386 - Lee; Hsin-Chang ;   et al. | 2021-11-11 |
Pellicle removal method Grant 11,143,952 - Yoo , et al. October 12, 2 | 2021-10-12 |
Method for Extreme Ultraviolet Lithography Mask Treatment App 20210311383 - Hsu; Pei-Cheng ;   et al. | 2021-10-07 |
Lithography Mask with a Black Border Regions and Method of Fabricating the Same App 20210294203 - Lin; Chin-Hsiang ;   et al. | 2021-09-23 |
EUV photo masks Grant 11,119,398 - Lee , et al. September 14, 2 | 2021-09-14 |
Method of manufacturing EUV photo masks Grant 11,106,126 - Lee , et al. August 31, 2 | 2021-08-31 |
Euv Photo Masks And Manufacturing Method Thereof App 20210223679 - HSU; Pei-Cheng ;   et al. | 2021-07-22 |
Euv Masks To Prevent Carbon Contamination App 20210223678 - HSU; Pei-Cheng ;   et al. | 2021-07-22 |
Mask Blanks And Methods For Depositing Layers On Mask Blank App 20210200078 - LEE; Hsin-Chang ;   et al. | 2021-07-01 |
Method for extreme ultraviolet lithography mask treatment Grant 11,048,158 - Hsu , et al. June 29, 2 | 2021-06-29 |
Lithography mask with a black border regions and method of fabricating the same Grant 11,029,593 - Lin , et al. June 8, 2 | 2021-06-08 |
Method of Critical Dimension Control by Oxygen and Nitrogen Plasma Treatment in EUV Mask App 20210033960 - Hsu; Pei-Cheng ;   et al. | 2021-02-04 |
Lithography mask with a black border region and method of fabricating the same Grant 10,866,504 - Lin , et al. December 15, 2 | 2020-12-15 |
Pellicle And Method Of Using The Same App 20200264505 - YOO; Chue San ;   et al. | 2020-08-20 |
Pellicle and method of using the same Grant 10,670,959 - Yoo , et al. | 2020-06-02 |
Reflective Mask And Fabricating Method Thereof App 20200133113 - WU; Tsiao-Chen ;   et al. | 2020-04-30 |
Euv Photo Masks App 20200103743 - LEE; Hsin-Chang ;   et al. | 2020-04-02 |
Method Of Fabricating And Servicing A Photomask App 20200103745 - YANG; Chun-Fu ;   et al. | 2020-04-02 |
Method Of Manufacturing Euv Photo Masks App 20200103742 - LEE; Hsin-Chang ;   et al. | 2020-04-02 |
Dust collector using fan heat and dust collector having ironing function Grant 10,595,693 - Hsu | 2020-03-24 |
Protection Layer On Low Thermal Expansion Material (ltem) Substrate Of Extreme Ultraviolet (euv) Mask App 20200057363 - HSU; Pei-Cheng ;   et al. | 2020-02-20 |
Lithography Mask with a Black Border Regions and Method of Fabricating the Same App 20200050098 - Lin; Chin-Hsiang ;   et al. | 2020-02-13 |
Mask For Euv Lithography And Method Of Manufacturing The Same App 20200004133 - HSU; Pei-Cheng ;   et al. | 2020-01-02 |
Method for Extreme Ultraviolet Lithography Mask Treatment App 20190324364 - Hsu; Pei-Cheng ;   et al. | 2019-10-24 |
Pellicle structures and methods of fabricating thereof Grant 10,353,285 - Lee , et al. July 16, 2 | 2019-07-16 |
Lithography Mask With A Black Border Region And Method Of Fabricating The Same App 20190196322 - Lin; Chin-Hsiang ;   et al. | 2019-06-27 |
EUV pellicle fabrication methods and structures thereof Grant 10,274,819 - Hsu , et al. | 2019-04-30 |
Reticle Container App 20190101821 - HSU; Pei-Cheng ;   et al. | 2019-04-04 |
Pellicle Removal Method App 20190094683 - YOO; Chue San ;   et al. | 2019-03-28 |
Pellicle And Method Of Using The Same App 20180329288 - YOO; Chue San ;   et al. | 2018-11-15 |
Pellicle Structures And Methods Of Fabricating Thereof App 20180292744 - LEE; Hsin-Chang ;   et al. | 2018-10-11 |
Dust Collector Using Fan Heat and Dust Collector Having Ironing Function App 20180228330 - Hsu; Pei-Cheng | 2018-08-16 |
Pellicle assembly and fabrication methods thereof Grant 10,036,951 - Hsu , et al. July 31, 2 | 2018-07-31 |
Pellicle Structures And Methods Of Fabricating Thereof App 20180173093 - HSU; Pei-Cheng ;   et al. | 2018-06-21 |
Pellicle structures and methods of fabricating thereof Grant 10,001,701 - Hsu , et al. June 19, 2 | 2018-06-19 |
Treating a capping layer of a mask Grant 9,897,910 - Hsu , et al. February 20, 2 | 2018-02-20 |
Lithography mask and fabricating the same Grant 9,857,679 - Hsu , et al. January 2, 2 | 2018-01-02 |
Systems and methods of local focus error compensation for semiconductor processes Grant 9,735,065 - Hsu , et al. August 15, 2 | 2017-08-15 |
Treating A Capping Layer of a Mask App 20170108768 - HSU; PEI-CHENG ;   et al. | 2017-04-20 |
Lithography Mask and Fabricating the Same App 20170052442 - Hsu; Pei-Cheng ;   et al. | 2017-02-23 |
Treating a capping layer of a mask Grant 9,535,317 - Hsu , et al. January 3, 2 | 2017-01-03 |
Pellicle Assembly And Fabrication Methods Thereof App 20160349610 - Hsu; Pei-Cheng ;   et al. | 2016-12-01 |
Euv Pellicle Fabrication Methods And Structures Thereof App 20160231647 - Hsu; Pei-Cheng ;   et al. | 2016-08-11 |
Treating A Capping Layer Of A Mask App 20160187770 - Hsu; Pei-Cheng ;   et al. | 2016-06-30 |
Photomask and method for forming the same Grant 9,244,341 - Lee , et al. January 26, 2 | 2016-01-26 |
Automatic floor cleaning machine Grant 9,215,961 - Hsu December 22, 2 | 2015-12-22 |
Reflective mask and method of making same Grant 9,213,232 - Hsu , et al. December 15, 2 | 2015-12-15 |
Automatic floor cleaner Grant 9,138,120 - Hsu September 22, 2 | 2015-09-22 |
Systems And Methods Of Local Focus Error Compensation For Semiconductor Processes App 20150187663 - HSU; Chia-Hao ;   et al. | 2015-07-02 |
Photomask and Method for Forming the Same App 20150168826 - Lee; Hsin-Chang ;   et al. | 2015-06-18 |
Reflective Mask And Method Of Making Same App 20150104736 - HSU; Pei-Cheng ;   et al. | 2015-04-16 |
Systems and methods of local focus error compensation for semiconductor processes Grant 9,003,337 - Hsu , et al. April 7, 2 | 2015-04-07 |
Photomask and method for forming the same Grant 8,962,222 - Lee , et al. February 24, 2 | 2015-02-24 |
Automatic Floor Cleaning Machine App 20150026920 - Hsu; Pei-Cheng | 2015-01-29 |
Automatic Floor Cleaner App 20140373302 - Hsu; Pei-Cheng | 2014-12-25 |
Reflective mask and method of making same Grant 8,877,409 - Hsu , et al. November 4, 2 | 2014-11-04 |
Systems And Methods Of Local Focus Error Compensation For Semiconductor Processes App 20140127836 - HSU; Chia-Hao ;   et al. | 2014-05-08 |
Method of fabricating a lithography mask Grant 8,679,707 - Lee , et al. March 25, 2 | 2014-03-25 |
Phase Shift Mask for Extreme Ultraviolet Lithography and Method of Fabricating Same App 20140038086 - Shih; Chih-Tsung ;   et al. | 2014-02-06 |
Method of Fabricating a Lithography Mask App 20140038088 - Lee; Hsin-Chang ;   et al. | 2014-02-06 |
Photomask And Method For Forming The Same App 20130337370 - Lee; Hsin-Chang ;   et al. | 2013-12-19 |
Reflective Mask And Method Of Making Same App 20130280643 - Hsu; Pei-Cheng ;   et al. | 2013-10-24 |
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