loadpatents
Patent applications and USPTO patent grants for Hsu; Kuang-Yuan.The latest application filed is for "treatment to control deposition rate".
Patent | Date |
---|---|
Treatment to Control Deposition Rate App 20220277956 - Kao; Wan-Yi ;   et al. | 2022-09-01 |
Apparatus For Manufacturing A Thin Film And A Method Therefor App 20220181143 - HSIAO; Tsai-Fu ;   et al. | 2022-06-09 |
Treatment to control deposition rate Grant 11,342,177 - Kao , et al. May 24, 2 | 2022-05-24 |
Apparatus for manufacturing a thin film and a method therefor Grant 11,244,822 - Hsiao , et al. February 8, 2 | 2022-02-08 |
Metal gate structure Grant 11,227,929 - Lim , et al. January 18, 2 | 2022-01-18 |
FinFET structure and device Grant 11,222,826 - Huang , et al. January 11, 2 | 2022-01-11 |
Techniques providing metal gate devices with multiple barrier layers Grant 11,171,134 - Yu , et al. November 9, 2 | 2021-11-09 |
Micro light-emitting device, structure, and display thereof Grant 11,133,447 - Hsu , et al. September 28, 2 | 2021-09-28 |
Patterned Epitaxial Substrate And Semiconductor Structure App 20210265527 - Hsu; Kuang-Yuan ;   et al. | 2021-08-26 |
Patterned epitaxial substrate and semiconductor structure Grant 11,063,181 - Hsu , et al. July 13, 2 | 2021-07-13 |
System and method for supplying a precursor for an atomic layer deposition (ALD) process Grant 11,053,584 - Hsieh , et al. July 6, 2 | 2021-07-06 |
Treatment System and Method App 20200411310 - Kao; Wan-Yi ;   et al. | 2020-12-31 |
Treatment to control deposition rate Grant 10,867,789 - Kao , et al. December 15, 2 | 2020-12-15 |
Patterned Epitaxial Substrate And Semiconductor Structure App 20200373460 - Hsu; Kuang-Yuan ;   et al. | 2020-11-26 |
Semiconductor Device And A Method For Fabricating The Same App 20200350416 - HSU; Chia-Ming ;   et al. | 2020-11-05 |
Micro Light-emitting Device, Structure, And Display Thereof App 20200350473 - Hsu; Kuang-Yuan ;   et al. | 2020-11-05 |
Treatment system and method Grant 10,796,898 - Kao , et al. October 6, 2 | 2020-10-06 |
Metal Gate Structure App 20200251567 - Kind Code | 2020-08-06 |
Semiconductor device and a method for fabricating the same Grant 10,714,586 - Hsu , et al. | 2020-07-14 |
Treatment System and Method App 20200152449 - Kao; Wan-Yi ;   et al. | 2020-05-14 |
Metal gate structure Grant 10,651,283 - Lim , et al. | 2020-05-12 |
Techniques Providing Metal Gate Devices with Multiple Barrier Layers App 20200126985 - Yu; Xiong-Fei ;   et al. | 2020-04-23 |
Finfet Structure And Device App 20200083109 - Huang; Yen-Chun ;   et al. | 2020-03-12 |
System and Method for Supplying a Precursor for an Atomic Layer Deposition (ALD) Process App 20200040450 - Hsieh; Bor-Chiuan ;   et al. | 2020-02-06 |
Treatment system and method Grant 10,529,553 - Kao , et al. J | 2020-01-07 |
Treatment to Control Deposition Rate App 20200006061 - Kao; Wan-Yi ;   et al. | 2020-01-02 |
Techniques providing metal gate devices with multiple barrier layers Grant 10,522,544 - Yu , et al. Dec | 2019-12-31 |
FinFET cut-last process using oxide trench fill Grant 10,483,169 - Huang , et al. Nov | 2019-11-19 |
System and method for supplying a precursor for an atomic layer deposition (ALD) process Grant 10,443,127 - Hsieh , et al. Oc | 2019-10-15 |
Techniques Providing Metal Gate Devices with Multiple Barrier Layers App 20190259753 - Yu; Xiong-Fei ;   et al. | 2019-08-22 |
Treatment System and Method App 20190259602 - Kao; Wan-Yi ;   et al. | 2019-08-22 |
Treatment to control deposition rate Grant 10,388,515 - Kao , et al. A | 2019-08-20 |
Metal Gate Structure App 20190245053 - Lim; Peng-Soon ;   et al. | 2019-08-08 |
Buffer layer on semiconductor devices Grant 10,374,055 - Hou , et al. | 2019-08-06 |
Treatment system and method Grant 10,312,075 - Kao , et al. | 2019-06-04 |
Techniques providing metal gate devices with multiple barrier layers Grant 10,312,236 - Yu , et al. | 2019-06-04 |
Metal gate structure Grant 10,269,912 - Lim , et al. | 2019-04-23 |
Semiconductor device and a method for fabricating the same Grant 10,153,351 - Hsu , et al. Dec | 2018-12-11 |
Semiconductor Device And A Method For Fabricating The Same App 20180337244 - HSU; Chia-Ming ;   et al. | 2018-11-22 |
Treatment to Control Deposition Rate App 20180337040 - Kao; Wan-Yi ;   et al. | 2018-11-22 |
Semiconductor device with metal gate Grant 10,096,600 - Lee , et al. October 9, 2 | 2018-10-09 |
Metal Gate Structure App 20180226482 - Lim; Peng-Soon ;   et al. | 2018-08-09 |
Semiconductor devices, methods of manufacture thereof, and inter-metal dielectric (IMD) structures Grant 9,941,214 - Peng , et al. April 10, 2 | 2018-04-10 |
Metal gate structure Grant 9,941,373 - Lim , et al. April 10, 2 | 2018-04-10 |
FinFET Cut-Last Process Using Oxide Trench Fill App 20180090491 - Huang; Yen-Chun ;   et al. | 2018-03-29 |
Techniques Providing Metal Gate Devices with Multiple Barrier Layers App 20180076198 - Yu; Xiong-Fei ;   et al. | 2018-03-15 |
Self aligned contact scheme Grant 9,859,386 - Ho , et al. January 2, 2 | 2018-01-02 |
Forming sidewall spacers using isotropic etch Grant 9,852,947 - Ko , et al. December 26, 2 | 2017-12-26 |
Techniques providing metal gate devices with multiple barrier layers Grant 9,831,243 - Yu , et al. November 28, 2 | 2017-11-28 |
Semiconductor Device With Metal Gate App 20170287913 - LEE; Da-Yuan ;   et al. | 2017-10-05 |
Self Aligned Contact Scheme App 20170288031 - Ho; Tsai-Jung ;   et al. | 2017-10-05 |
Semiconductor Device And A Method For Fabricating The Same App 20170222008 - HSU; Chia-Ming ;   et al. | 2017-08-03 |
Semiconductor device with metal gate Grant 9,685,444 - Lee , et al. June 20, 2 | 2017-06-20 |
Doping for FinFET Grant 9,659,776 - Chen , et al. May 23, 2 | 2017-05-23 |
Treatment Process and System App 20170140930 - Kao; Wan-Yi ;   et al. | 2017-05-18 |
Apparatus For Manufacturing A Thin Film And A Method Therefor App 20170110312 - HSIAO; Tsai-Fu ;   et al. | 2017-04-20 |
Treatment System and Method App 20170092487 - Kao; Wan-Yi ;   et al. | 2017-03-30 |
Self aligned contact scheme Grant 9,548,366 - Ho , et al. January 17, 2 | 2017-01-17 |
Metal Gate Structure App 20160372563 - Lim; Peng-Soon ;   et al. | 2016-12-22 |
Metal gate structure Grant 9,449,832 - Lim , et al. September 20, 2 | 2016-09-20 |
Method of forming metal gate electrode Grant 9,449,828 - Hou , et al. September 20, 2 | 2016-09-20 |
Doping for FinFET App 20160260610 - Chen; Hung-Kai ;   et al. | 2016-09-08 |
Method of making a gate structure Grant 9,431,505 - Lim , et al. August 30, 2 | 2016-08-30 |
Interconnect structure and method for forming the same Grant 9,373,581 - Shih , et al. June 21, 2 | 2016-06-21 |
Doping for FinFET Grant 9,362,404 - Chen , et al. June 7, 2 | 2016-06-07 |
Semiconductor device having metal gate electrode and method of fabrication thereof Grant 9,337,110 - Lee , et al. May 10, 2 | 2016-05-10 |
Method Of Forming Metal Gate Electrode App 20160064223 - HOU; Cheng-Hao ;   et al. | 2016-03-03 |
Method of fabricating a gate dielectric layer Grant 9,263,546 - Lee , et al. February 16, 2 | 2016-02-16 |
Method for forming semiconductor device structure Grant 9,236,294 - Chou , et al. January 12, 2 | 2016-01-12 |
Method Of Making A Gate Structure App 20150357435 - LIM; Peng-Soon ;   et al. | 2015-12-10 |
Metal gate electrode of a field effect transistor Grant 9,196,691 - Hou , et al. November 24, 2 | 2015-11-24 |
Techniques Providing Metal Gate Devices With Multiple Barrier Layers App 20150333064 - Yu; Xiong-Fei ;   et al. | 2015-11-19 |
Semiconductor Device With Metal Gate App 20150311205 - Lee; Da-Yuan ;   et al. | 2015-10-29 |
Semiconductor devices and methods of manufacture thereof Grant 9,153,538 - Ko , et al. October 6, 2 | 2015-10-06 |
Metal Gate Structure App 20150262824 - Lim; Peng-Soon ;   et al. | 2015-09-17 |
Method of making a gate structure Grant 9,129,953 - Lim , et al. September 8, 2 | 2015-09-08 |
Doping for FinFET App 20150243739 - Chen; Hung-Kai ;   et al. | 2015-08-27 |
Techniques providing metal gate devices with multiple barrier layers Grant 9,105,624 - Yu , et al. August 11, 2 | 2015-08-11 |
High UV curing efficiency for low-k dielectrics Grant 9,093,265 - Shih , et al. July 28, 2 | 2015-07-28 |
Method For Forming Semiconductor Device Structure App 20150200133 - CHOU; Chia-Cheng ;   et al. | 2015-07-16 |
Replacement gate semiconductor device Grant 9,076,889 - Lee , et al. July 7, 2 | 2015-07-07 |
Interconnect Structure and Method for Forming the Same App 20150155234 - Shih; Po-Cheng ;   et al. | 2015-06-04 |
Metal gate structure Grant 9,048,334 - Lim , et al. June 2, 2 | 2015-06-02 |
Method Of Fabricating A Gate Dielectric Layer App 20150140765 - LEE; Wei-Yang ;   et al. | 2015-05-21 |
Gate dielectric of semiconductor device Grant 9,035,373 - Lee , et al. May 19, 2 | 2015-05-19 |
System And Method For Supplying A Precursor For An Atomic Layer Deposition (ald) Process App 20150125591 - HSIEH; BOR-CHIUAN ;   et al. | 2015-05-07 |
High Uv Curing Efficiency For Low-k Dielectrics App 20150104953 - Shih; Po-Cheng ;   et al. | 2015-04-16 |
Pore Sealing Techniques For Porous Low-k Dielectric Interconnect App 20150091172 - Ko; Chung-Chi ;   et al. | 2015-04-02 |
Interconnect structure and method for forming the same Grant 8,993,442 - Shih , et al. March 31, 2 | 2015-03-31 |
Semiconductor Devices and Methods of Manufacture Thereof App 20150054170 - Ko; Chung-Chi ;   et al. | 2015-02-26 |
Interconnect Structure And Method For Forming The Same App 20150056802 - Shih; Po-Cheng ;   et al. | 2015-02-26 |
High temperature anneal for stress modulation Grant 8,962,477 - Chan , et al. February 24, 2 | 2015-02-24 |
Semiconductor Devices, Methods of Manufacture Thereof, and Inter-metal Dielectric (IMD) Structures App 20150048488 - Peng; Yu-Yun ;   et al. | 2015-02-19 |
Gate dielectric layer having interfacial layer and high-K dielectric over the interfacial layer Grant 8,952,458 - Lee , et al. February 10, 2 | 2015-02-10 |
Method and apparatus of forming a gate Grant 8,952,462 - Chen , et al. February 10, 2 | 2015-02-10 |
Techniques Providing Metal Gate Deviceswith Multiple Barrier Layers App 20150017796 - Yu; Xiong-Fei ;   et al. | 2015-01-15 |
Buffer Layer On Semiconductor Devices App 20140291777 - HOU; Cheng-Hao ;   et al. | 2014-10-02 |
Method Of Making A Gate Structure App 20140295659 - LIM; Peng-Soon ;   et al. | 2014-10-02 |
Techniques providing metal gate devices with multiple barrier layers Grant 8,847,333 - Yu , et al. September 30, 2 | 2014-09-30 |
Metal gate structure of a field effect transistor Grant 8,779,530 - Lim , et al. July 15, 2 | 2014-07-15 |
Method of forming a buffer layer Grant 8,765,603 - Hou , et al. July 1, 2 | 2014-07-01 |
Method and system for metal gate formation with wider metal gate fill margin Grant 8,716,785 - Lim , et al. May 6, 2 | 2014-05-06 |
Gate Dielectric Of Semiconductor Device App 20140091400 - Lee; Da-Yuan ;   et al. | 2014-04-03 |
Methods for a gate replacement process Grant 8,658,525 - Yeh , et al. February 25, 2 | 2014-02-25 |
Gate dielectric of semiconductor device Grant 8,633,536 - Lee , et al. January 21, 2 | 2014-01-21 |
Metal Gate Electrode Of A Field Effect Transistor App 20140004694 - HOU; Cheng-Hao ;   et al. | 2014-01-02 |
Method for fabricating a gate dielectric layer Grant 8,580,698 - Lee , et al. November 12, 2 | 2013-11-12 |
Gate structures Grant 8,575,727 - Lim , et al. November 5, 2 | 2013-11-05 |
Metal gate electrode of a field effect transistor Grant 8,546,885 - Hou , et al. October 1, 2 | 2013-10-01 |
Gate Structures App 20130240979 - Lim; Peng-Soon ;   et al. | 2013-09-19 |
Stress modulation for metal gate semiconductor device Grant 8,530,294 - Lee , et al. September 10, 2 | 2013-09-10 |
Methods for a Gate Replacement Process App 20130149821 - Yeh; Matt ;   et al. | 2013-06-13 |
Gate structures Grant 8,441,107 - Lim , et al. May 14, 2 | 2013-05-14 |
Stress Modulation For Metal Gate Semiconductor Device App 20130102142 - Lee; Wei-Yang ;   et al. | 2013-04-25 |
Semiconductor Deving Having Metal Gate Electrode And Method Of Fabrication Thereof App 20130099320 - Lee; Da-Yuan ;   et al. | 2013-04-25 |
Replacement Gate Semiconductor Device App 20130075827 - Lee; Da-Yuan ;   et al. | 2013-03-28 |
Metal Gate Structure App 20130049109 - Lim; Peng-Soon ;   et al. | 2013-02-28 |
High Temperature Anneal For Stress Modulation App 20130040455 - CHAN; Meng-Hsuan ;   et al. | 2013-02-14 |
Buffer Layer And Method Of Forming Buffer Layer App 20130032900 - HOU; Cheng-Hao ;   et al. | 2013-02-07 |
Methods for a gate replacement process Grant 8,367,563 - Yeh , et al. February 5, 2 | 2013-02-05 |
Metal Gate Electrode Of A Field Effect Transistor App 20130026637 - HOU; Cheng-Hao ;   et al. | 2013-01-31 |
Gate Dielectric Of Semiconductor Device App 20130020630 - Lee; Da-Yuan ;   et al. | 2013-01-24 |
Metal gate fill and method of making Grant 8,357,603 - Chan , et al. January 22, 2 | 2013-01-22 |
Gate Structures App 20120319192 - Lim; Peng-Soon ;   et al. | 2012-12-20 |
Method of fabricating a plurality of gate structures Grant 8,334,198 - Chen , et al. December 18, 2 | 2012-12-18 |
Method of fabricating high-k/metal gate device Grant 8,334,197 - Lee , et al. December 18, 2 | 2012-12-18 |
Modified profile gate structure for semiconductor device and methods of forming thereof Grant 8,329,546 - Lee , et al. December 11, 2 | 2012-12-11 |
Method Of Fabricating A Plurality Of Gate Structures App 20120264281 - CHEN; Jian-Hao ;   et al. | 2012-10-18 |
Method Of Fabricating A Gate Dielectric Layer App 20120261758 - LEE; Wei-Yang ;   et al. | 2012-10-18 |
Method to form a semiconductor device having gate dielectric layers of varying thickness Grant 8,283,222 - Hsu , et al. October 9, 2 | 2012-10-09 |
Method of fabricating gate structures Grant 8,278,173 - Lim , et al. October 2, 2 | 2012-10-02 |
Method And System For Metal Gate Formation With Wider Metal Gate Fill Margin App 20120217578 - Lim; Peng-Soon ;   et al. | 2012-08-30 |
Method and system for metal gate formation with wider metal gate fill margin Grant 8,193,081 - Lim , et al. June 5, 2 | 2012-06-05 |
Modified Profile Gate Structure For Semiconductor Device And Methods Of Forming Thereof App 20120049247 - Lee; Da-Yuan ;   et al. | 2012-03-01 |
Method of forming a metal gate Grant 8,093,117 - Tsau , et al. January 10, 2 | 2012-01-10 |
Gate Structures And Method Of Fabricating Same App 20120001266 - Lim; Peng-Soon ;   et al. | 2012-01-05 |
Method To Form A Semiconductor Device Having Gate Dielectric Layers Of Varying Thickness App 20110306196 - Hsu; Kuang-Yuan ;   et al. | 2011-12-15 |
Method for metal gate N/P patterning Grant 8,048,810 - Tsai , et al. November 1, 2 | 2011-11-01 |
Method For Fabricating A Gate Dielectric Layer App 20110256731 - LEE; Wei-Yang ;   et al. | 2011-10-20 |
Multiple Deposition, Multiple Treatment Dielectric Layer For A Semiconductor Device App 20110256682 - Yu; Xiong-Fei ;   et al. | 2011-10-20 |
Method to form a semiconductor device having gate dielectric layers of varying thicknesses Grant 8,008,143 - Hsu , et al. August 30, 2 | 2011-08-30 |
Method And Apparatus Of Forming A Gate App 20110193180 - Chen; Jian-Hao ;   et al. | 2011-08-11 |
Method For Metal Gate N/p Patterning App 20110189847 - Tsai; Fang Wen ;   et al. | 2011-08-04 |
Method Of Forming A Metal Gate App 20110171820 - Tsau; Hsueh Wen ;   et al. | 2011-07-14 |
Method To Form A Semiconductor Device Having Gate Dielectric Layers Of Varying Thicknesses App 20110159678 - Hsu; Kuang-Yuan ;   et al. | 2011-06-30 |
Metal Gate Structure Of A Field Effect Transistor App 20110147858 - LIM; Peng-Soon ;   et al. | 2011-06-23 |
Metal Gate Fill And Method Of Making App 20110151655 - Chan; Bor-Wen ;   et al. | 2011-06-23 |
Method Of Fabricating High-k/metal Gate Device App 20110143529 - Lee; Da-Yuan ;   et al. | 2011-06-16 |
Method And System For Metal Gate Formation With Wider Metal Gate Fill Margin App 20110089484 - Lim; Peng-Soon ;   et al. | 2011-04-21 |
Methods For A Gate Replacement Process App 20110081774 - Yeh; Matt ;   et al. | 2011-04-07 |
Atomic layer deposition for filling a gap between devices App 20050282350 - Chou, You-Hua ;   et al. | 2005-12-22 |
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