loadpatents
Patent applications and USPTO patent grants for HSU; Chia-Lin.The latest application filed is for "cartridge for bioreactor".
Patent | Date |
---|---|
Cartridge For Bioreactor App 20220176372 - YANG; Wen-Shan ;   et al. | 2022-06-09 |
Semiconductor device and method for fabricating the same Grant 11,171,235 - Wei , et al. November 9, 2 | 2021-11-09 |
Snapback Electrostatic Discharge (esd) Circuit, System And Method Of Forming The Same App 20210305235 - HSU; Chia-Lin ;   et al. | 2021-09-30 |
Low-k Dielectric Damage Prevention App 20210233809 - LEE; Chen-Yi ;   et al. | 2021-07-29 |
Structure and method for metal gates with roughened barrier layer Grant 10,978,350 - Chen , et al. April 13, 2 | 2021-04-13 |
Semiconductor Device And Method For Fabricating The Same App 20200266297 - Wei; Cheng-Chang ;   et al. | 2020-08-20 |
Semiconductor device and method for fabricating the same Grant 10,644,153 - Wei , et al. | 2020-05-05 |
Structure and Method for Metal Gates with Roughened Barrier Layer App 20200098641 - Chen; Yen-Ting ;   et al. | 2020-03-26 |
Composite contact plug structure and method of making same Grant 10,504,778 - Lin , et al. Dec | 2019-12-10 |
Structure and method for metal gates with roughened barrier layer Grant 10,497,626 - Chen , et al. De | 2019-12-03 |
Composite contact plug structure and method of making same Grant 10,276,432 - Lin , et al. | 2019-04-30 |
Method for silicide formation Grant 10,263,088 - Lin , et al. | 2019-04-16 |
Composite Contact Plug Structure and Method of Making Same App 20190109044 - Lin; Yu-Hung ;   et al. | 2019-04-11 |
Structure and Method for Metal Gates with Roughened Barrier Layer App 20190067117 - Chen; Yen-Ting ;   et al. | 2019-02-28 |
Composite contact plug structure and method of making same Grant 10,079,174 - Lin , et al. September 18, 2 | 2018-09-18 |
Structure and method for metal gates with roughened barrier layer Grant 10,049,940 - Chen , et al. August 14, 2 | 2018-08-14 |
Composite Contact Plug Structure And Method Of Making Same App 20180144978 - Lin; Yu-Hung ;   et al. | 2018-05-24 |
Method for Silicide Formation App 20180145140 - Lin; Yu-Hung ;   et al. | 2018-05-24 |
Manufacturing method of non-planar FET Grant 9,923,095 - Chien , et al. March 20, 2 | 2018-03-20 |
Method for silicide formation Grant 9,859,390 - Lin , et al. January 2, 2 | 2018-01-02 |
Method for Silicide Formation App 20170338318 - Lin; Yu-Hung ;   et al. | 2017-11-23 |
Semiconductor Device And Method For Fabricating The Same App 20170250279 - Wei; Cheng-Chang ;   et al. | 2017-08-31 |
Composite contact plug structure and method of making same Grant 9,735,050 - Lin , et al. August 15, 2 | 2017-08-15 |
Contact structures and methods of forming the same Grant 9,620,601 - Lin , et al. April 11, 2 | 2017-04-11 |
Manufacturing Method of Non-Planar FET App 20170098710 - Chien; Chin-Cheng ;   et al. | 2017-04-06 |
Interconnect structure and method of forming the same Grant 9,589,892 - Lin , et al. March 7, 2 | 2017-03-07 |
Non-planar FET Grant 9,559,189 - Chien , et al. January 31, 2 | 2017-01-31 |
Interconnect Structure and Method of Forming the Same App 20160268192 - Lin; Yu-Hung ;   et al. | 2016-09-15 |
Composite Contact Plug Structure and Method of Making Same App 20160260633 - Lin; Yu-Hung ;   et al. | 2016-09-08 |
Semiconductor structure and process thereof Grant 9,401,429 - Chien , et al. July 26, 2 | 2016-07-26 |
Interconnect structure and method of forming the same Grant 9,385,080 - Lin , et al. July 5, 2 | 2016-07-05 |
Fabrication method for semiconductor devices Grant 9,318,567 - Chien , et al. April 19, 2 | 2016-04-19 |
Interconnect Structure and Method of Forming the Same App 20160049362 - Lin; Yu-Hung ;   et al. | 2016-02-18 |
Method of fabricating semiconductor patterns Grant 9,263,282 - Lin , et al. February 16, 2 | 2016-02-16 |
Contact Structures And Methods Of Forming The Same App 20160005824 - Lin; Yu-Hung ;   et al. | 2016-01-07 |
Composite Contact Plug Structure and Method of Making Same App 20150318243 - Lin; Yu-Hung ;   et al. | 2015-11-05 |
Multigate field effect transistor and process thereof Grant 9,159,831 - Liu , et al. October 13, 2 | 2015-10-13 |
Method for forming a semiconductor structure Grant 9,147,612 - Huang , et al. September 29, 2 | 2015-09-29 |
Manufacturing Method Of Semiconductor Structure App 20150214114 - Huang; Po-Cheng ;   et al. | 2015-07-30 |
Method of fabricating semiconductor device Grant 9,093,465 - Li , et al. July 28, 2 | 2015-07-28 |
Method Of Fabricating Semiconductor Device App 20150162419 - Li; Yu-Ting ;   et al. | 2015-06-11 |
Method For Forming A Semiconductor Structure App 20150147874 - Huang; Po-Cheng ;   et al. | 2015-05-28 |
Semiconductor Process App 20150140819 - Huang; Po-Cheng ;   et al. | 2015-05-21 |
Manufacturing method for a shallow trench isolation Grant 9,012,300 - Sie , et al. April 21, 2 | 2015-04-21 |
Multi-gate field-effect transistor process Grant 8,999,793 - Liao , et al. April 7, 2 | 2015-04-07 |
Method Of Forming Semiconductor Structure App 20150079780 - Liu; Yl-Liang ;   et al. | 2015-03-19 |
Method for fabricating semiconductor device Grant 8,940,600 - Hsu , et al. January 27, 2 | 2015-01-27 |
Method Of Fabricating Semiconductor Patterns App 20140370701 - Lin; Chin-Fu ;   et al. | 2014-12-18 |
Semiconductor Structure And Process Thereof App 20140367779 - Chien; Chin-Cheng ;   et al. | 2014-12-18 |
Multi-gate Field-effect Transistor Process App 20140295634 - Liao; Chin-I ;   et al. | 2014-10-02 |
Method For Fabricating Semiconductor Device App 20140273371 - Hsu; Chun-Wei ;   et al. | 2014-09-18 |
Method for manufacturing through-silicon via Grant 8,828,745 - Tsao , et al. September 9, 2 | 2014-09-09 |
Method of manufacturing semiconductor device having metal gates Grant 8,802,524 - Liao , et al. August 12, 2 | 2014-08-12 |
Multi-gate field-effect transistor and process thereof Grant 8,796,695 - Liao , et al. August 5, 2 | 2014-08-05 |
Semiconductor device Grant 8,779,526 - Hsu , et al. July 15, 2 | 2014-07-15 |
Multigate Field Effect Transistor And Process Thereof App 20140117455 - Liu; Chih-Chien ;   et al. | 2014-05-01 |
Semiconductor process Grant 8,709,910 - Liao , et al. April 29, 2 | 2014-04-29 |
Semiconductor Device Having Metal Gate And Manufacturing Method Thereof App 20140106558 - Hsu; Chun-Wei ;   et al. | 2014-04-17 |
Manufacturing Method For A Shallow Trench Isolation App 20140094017 - Sie; Wu-Sian ;   et al. | 2014-04-03 |
Semiconductor process Grant 8,674,433 - Liao , et al. March 18, 2 | 2014-03-18 |
Fabrication Method For Semiconductor Devices App 20140065775 - Chien; Chin-Cheng ;   et al. | 2014-03-06 |
Semiconductor process Grant 8,647,986 - Huang , et al. February 11, 2 | 2014-02-11 |
Semiconductor device having metal gate and manufacturing method thereof Grant 8,643,069 - Hsu , et al. February 4, 2 | 2014-02-04 |
Multi-gate Field-effect Transistor And Process Thereof App 20130341638 - Liao; Chin-I ;   et al. | 2013-12-26 |
Semiconductor Process App 20130288448 - Liao; Chin-I ;   et al. | 2013-10-31 |
Non-Planar FET and Manufacturing Method Thereof App 20130270612 - Chien; Chin-Cheng ;   et al. | 2013-10-17 |
Poly opening polish process Grant 8,513,128 - Hsu , et al. August 20, 2 | 2013-08-20 |
Method of manufacturing semiconductor device with silicide Grant 8,476,164 - Lin , et al. July 2, 2 | 2013-07-02 |
Method For Manufacturing Multi-gate Transistor Device App 20130122698 - Liao; Chin-I ;   et al. | 2013-05-16 |
Method for manufacturing multi-gate transistor device Grant 8,440,511 - Liao , et al. May 14, 2 | 2013-05-14 |
Semiconductor Device App 20130105912 - Hsu; Chun-Wei ;   et al. | 2013-05-02 |
Semiconductor Process App 20130052778 - Liao; Chin-I ;   et al. | 2013-02-28 |
Semiconductor Process App 20130052825 - Huang; Po-Cheng ;   et al. | 2013-02-28 |
Semiconductor Device Having Metal Gate And Manufacturing Method Thereof App 20130015524 - Hsu; Chun-Wei ;   et al. | 2013-01-17 |
Method For Manufacturing Through-silicon Via App 20130011938 - TSAO; Wei-Che ;   et al. | 2013-01-10 |
Poly Opening Polish Process App 20120322265 - HSU; Chun-Wei ;   et al. | 2012-12-20 |
Planarization process for pre-damascene structure including metal hard mask Grant 8,314,031 - Hsu November 20, 2 | 2012-11-20 |
Chemical Mechanical Polishing Process App 20120264302 - Hsu; Chun-Wei ;   et al. | 2012-10-18 |
Method of Manufacturing Semiconductor Device Having Metal Gates App 20120244669 - Liao; Po-Jui ;   et al. | 2012-09-27 |
Cleaning Method for Wafer App 20120048296 - Lin; Wen-Chin ;   et al. | 2012-03-01 |
METHOD FOR CLEANING SURFACE CONTAINING Cu App 20110189855 - Lin; Jen-Chieh ;   et al. | 2011-08-04 |
Planarization Process For Pre-damascene Structure Including Metal Hard Mask App 20100184293 - Hsu; Chia-Lin | 2010-07-22 |
Planarization process for pre-damascene structure including metal hard mask Grant 7,718,536 - Hsu May 18, 2 | 2010-05-18 |
Electroplating apparatus including a real-time feedback system Grant 7,368,042 - Hsu , et al. May 6, 2 | 2008-05-06 |
Planarization Process For Pre-damascene Structure Including Metal Hard Mask App 20080026582 - Hsu; Chia-Lin | 2008-01-31 |
Method of removing contaminants from a silicon wafer after chemical-mechanical polishing operation Grant 7,232,752 - Hu , et al. June 19, 2 | 2007-06-19 |
Method For Remote Server Login App 20070056024 - Hsu; Ho-Hsiung ;   et al. | 2007-03-08 |
Method Of Manufacturing Conductive Layer App 20070049009 - Hsu; Chia-Lin ;   et al. | 2007-03-01 |
Method For Electroless Plating Metal Cap Barrier On Copper App 20070037389 - Chen; Shu-Jen ;   et al. | 2007-02-15 |
Method Of Manufacturing Metal Plug And Contact App 20070032077 - Hung; Tzung-Yu ;   et al. | 2007-02-08 |
Planarization Process For Pre-damascene Structure Including Metal Hard Mask App 20060286805 - Hsu; Chia-Lin | 2006-12-21 |
Method Of Forming A Plug App 20060211242 - Hsu; Chia-Lin ;   et al. | 2006-09-21 |
Method for preventing edge peeling defect App 20060172526 - Hsu; Chia-Lin ;   et al. | 2006-08-03 |
Electroplating Apparatus Including A Real-time Feedback System App 20060144698 - Hsu; Chia-Lin ;   et al. | 2006-07-06 |
Method Of Forming Barrier Layer And Method Of Fabricating Interconnect App 20060128146 - Hsu; Chia-Lin ;   et al. | 2006-06-15 |
Method of metallization in the fabrication of integrated circuit devices App 20060110917 - Chen; Shu-Jen ;   et al. | 2006-05-25 |
Chemical mechanical polishing process Grant 7,025,661 - Hsu , et al. April 11, 2 | 2006-04-11 |
Chemical Mechanical Polishing Process App 20060057944 - Hsu; Chia-Lin ;   et al. | 2006-03-16 |
Chemical Mechanical Polishing Process App 20060057945 - Hsu; Chia-Lin ;   et al. | 2006-03-16 |
Method for preventing edge peeling defect App 20050085163 - Hsu, Chia-Lin ;   et al. | 2005-04-21 |
Method of forming a dual damascene via by using a metal hard mask layer Grant 6,831,013 - Tsai , et al. December 14, 2 | 2004-12-14 |
Wafer carrier assembly for a chemical mechanical polishing apparatus and a polishing method using the same Grant 6,797,190 - Hsu , et al. September 28, 2 | 2004-09-28 |
Chemical mechanical polishing system and method for planarizing substrates in fabricating semiconductor devices App 20040092112 - Hsu, Chia-Lin ;   et al. | 2004-05-13 |
Chemical mechanical polishing equipment Grant 6,709,544 - Hu , et al. March 23, 2 | 2004-03-23 |
Control system for in-situ feeding back a polish profile Grant 6,706,140 - Hsu , et al. March 16, 2 | 2004-03-16 |
Post-CMP removal of surface contaminants from silicon wafer Grant 6,696,361 - Hu , et al. February 24, 2 | 2004-02-24 |
Post-CMP removal of surface contaminants from silicon wafer App 20040033696 - Hu, Shao-Chung ;   et al. | 2004-02-19 |
Chemical Mechanical Polishing Equipment App 20040016507 - Hu, Shao-Chung ;   et al. | 2004-01-29 |
Wafer Carrier Assembly For A Chemical Mechanical Polishing Apparatus And A Polishing Method Using The Same App 20030234078 - Hsu, Chia-Lin ;   et al. | 2003-12-25 |
Method for planarization of wafers with high selectivities Grant 6,660,627 - Hu , et al. December 9, 2 | 2003-12-09 |
Embedded capacitor structure applied to logic integrated circuit App 20030213990 - Tsai, Teng-Chun ;   et al. | 2003-11-20 |
Wafer carrier assembly for a chemical mechanical polishing apparatus and a polishing method using the same Grant 6,638,391 - Hsu , et al. October 28, 2 | 2003-10-28 |
Method for fabricating a high-density capacitor Grant 6,638,830 - Tsai , et al. October 28, 2 | 2003-10-28 |
Method for planarization of wafers with high selectivities App 20030181050 - Hu, Shao-Chung ;   et al. | 2003-09-25 |
Chemical mechanical polishing method for copper Grant 6,616,510 - Hsu , et al. September 9, 2 | 2003-09-09 |
Method of forming embedded capacitor structure applied to logic integrated circuit Grant 6,593,185 - Tsai , et al. July 15, 2 | 2003-07-15 |
Method of forming a dual damascene via by using a metal hard mask layer App 20030092279 - Tsai, Teng-Chun ;   et al. | 2003-05-15 |
Slurry composition of chemical mechanical polishing App 20030052308 - Hu, Shao-Chung ;   et al. | 2003-03-20 |
Control system for in-situ feeding back a polish profile App 20030051035 - Hsu, Chia-Lin ;   et al. | 2003-03-13 |
Polishing pad conditioner and application thereof App 20030015215 - Hsu, Chia-Lin ;   et al. | 2003-01-23 |
Method for reducing dishing in copper chemical mechanical polishing process App 20020192941 - Hsu, Chia-Lin ;   et al. | 2002-12-19 |
Chemical mechanical polishing system and method for planarizing substrates in fabricating semiconductor devices App 20020185224 - Hsu, Chia-Lin ;   et al. | 2002-12-12 |
Chemical mechanical polishing system and method for planarizing substrates in fabricating semiconductor devices App 20020162996 - Hsu, Chia-Lin ;   et al. | 2002-11-07 |
Post-CMP removal of surface contaminants from silicon App 20020155681 - Hu, Shao-Chung ;   et al. | 2002-10-24 |
Method of fabricating a damascene structure App 20020137319 - Hsu, Chia-Lin ;   et al. | 2002-09-26 |
Method of fabricating a damascene structure App 20020106877 - Hsu, Chia-Lin ;   et al. | 2002-08-08 |
Method for improving curvature of the polished surface by chemical mechanical polishing App 20020090893 - Hsu, Chia-Lin ;   et al. | 2002-07-11 |
Method for removing carbon-rich particles adhered on a copper surface App 20020068455 - Tsai, Teng-Chun ;   et al. | 2002-06-06 |
Method for removing carbon-rich particles adhered on the exposed copper surface of a copper/low k dielectric dual damascene structure App 20020068435 - Tsai, Teng-Chun ;   et al. | 2002-06-06 |
Chemical mechanical polishing method for copper App 20020065025 - Hsu, Chia-Lin ;   et al. | 2002-05-30 |
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