Patent | Date |
---|
HDMI apparatus using optical communication Grant 11,240,554 - Lin , et al. February 1, 2 | 2022-02-01 |
HDMI Apparatus Using Optical Communication App 20210314656 - Lin; Shao-Hung ;   et al. | 2021-10-07 |
HDMI apparatus using optical communication Grant 11,039,202 - Lin , et al. June 15, 2 | 2021-06-15 |
Optical Module And Projection Apparatus App 20210026230 - Liu; Chien-Sheng ;   et al. | 2021-01-28 |
Hdmi Apparatus Using Optical Communication App 20200359084 - Lin; Shao-Hung ;   et al. | 2020-11-12 |
Charging-discharging module of energy storage unit and charging-discharging method thereof Grant 10,630,101 - Hsieh , et al. | 2020-04-21 |
Charging-discharging Module Of Energy Storage Unit And Charging-discharging Method Thereof App 20180069428 - HSIEH; Chang-Lin ;   et al. | 2018-03-08 |
Plasma etching carbonaceous layers with sulfur-based etchants Grant 8,133,819 - Wang , et al. March 13, 2 | 2012-03-13 |
In-situ Clean To Reduce Metal Residues After Etching Titanium Nitride App 20110130007 - CHING; CHI-HONG ;   et al. | 2011-06-02 |
Chamber Plasma-cleaning Process Scheme App 20100024840 - HSIEH; CHANG-LIN ;   et al. | 2010-02-04 |
Method of etching an organic low-k dielectric material Grant 7,585,778 - Hsieh , et al. September 8, 2 | 2009-09-08 |
Plasma Etching Carbonaceous Layers With Sulfur-based Etchants App 20090212010 - Wang; Judy ;   et al. | 2009-08-27 |
Method For Fabricating Low K Dielectric Dual Damascene Structures App 20090156012 - HSIEH; CHANG-LIN ;   et al. | 2009-06-18 |
Method Of Etching An Organic Low-k Dielectric Material App 20080237183 - HSIEH; CHANG-LIN ;   et al. | 2008-10-02 |
Dielectric Etch Tool Configured For High Density And Low Bombardment Energy Plasma Providing High Etch Rates App 20080023144 - Delgadino; Gerardo A. ;   et al. | 2008-01-31 |
BARC shaping for improved fabrication of dual damascene integrated circuit features Grant 7,071,112 - Hsieh , et al. July 4, 2 | 2006-07-04 |
Dielectric etch method with high source and low bombardment plasma providing high etch rates App 20060118519 - Delgadino; Gerardo A. ;   et al. | 2006-06-08 |
System level in-situ integrated dielectric etch process particularly useful for copper dual damascene Grant 6,949,203 - Hsieh , et al. September 27, 2 | 2005-09-27 |
Process for selectively etching dielectric layers Grant 6,905,968 - Hsieh , et al. June 14, 2 | 2005-06-14 |
Selective etching of low-k dielectrics Grant 6,897,154 - Leung , et al. May 24, 2 | 2005-05-24 |
Etch process for dielectric materials comprising oxidized organo silane materials Grant 6,762,127 - Boiteux , et al. July 13, 2 | 2004-07-13 |
Barc shaping for improved fabrication of dual damascene integrated circuit features App 20040077175 - Hsieh, Chang-Lin ;   et al. | 2004-04-22 |
Selective etching of low-k dielectrics App 20030235993 - Leung, Terry ;   et al. | 2003-12-25 |
System level in-situ integrated dielectric etch process particularly useful for copper dual damascene App 20030164354 - Hsieh, Chang-Lin ;   et al. | 2003-09-04 |
Method of etching carbon-containing silicon oxide films Grant 6,607,675 - Hsieh , et al. August 19, 2 | 2003-08-19 |
Process for selectively etching dielectric layers App 20030109143 - Hsieh, Chang-Lin ;   et al. | 2003-06-12 |
Monitoring substrate processing with optical emission and polarized reflected radiation Grant 6,559,942 - Sui , et al. May 6, 2 | 2003-05-06 |
Etch process for dielectric materials comprising oxidized organo silane materials App 20030073321 - Boiteux, Yves Pierre ;   et al. | 2003-04-17 |
Method of heating a semiconductor substrate Grant 6,547,978 - Ye , et al. April 15, 2 | 2003-04-15 |
NH3 plasma descumming and resist stripping in semiconductor applications Grant 6,455,431 - Hsieh , et al. September 24, 2 | 2002-09-24 |
Monitoring substrate processing with optical emission and polarized reflected radiation App 20020048019 - Sui, Zhifeng ;   et al. | 2002-04-25 |
Method of heating a semiconductor substrate App 20020045354 - Ye, Yan ;   et al. | 2002-04-18 |
Post-etch treatment of plasma-etched feature surfaces to prevent corrosion Grant 6,153,530 - Ye , et al. November 28, 2 | 2000-11-28 |