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Substrate processing systems, apparatus, and methods with factory interface environmental controls
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Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room
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Substrate processing systems, apparatus, and methods with factory interface environmental controls
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Side Storage Pods, Equipment Front End Modules, And Methods For Operating Efems
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High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods
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Batch Wafer Degas Chamber And Integration Into Factory Interface And Vacuum-based Mainframe
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Side storage pods, equipment front end modules, and methods for operating EFEMs
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Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
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Substrate Processing Systems, Apparatus, And Methods With Substrate Carrier And Purge Chamber Environmental Controls
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Selectable-rate bottom purge apparatus and methods
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Transfer Chambers With An Increased Number Of Sides, Semiconductor Device Manufacturing Processing Tools, And Processing Methods
App 20210143034 - Rice; Michael Robert ; et al. | 2021-05-13 |
Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls
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Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
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Multi-blade Robot Apparatus, Electronic Device Manufacturing Apparatus, And Methods Adapted To Transport Multiple Substrates In Electronic Device Manufacturing
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Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
Grant 10,847,390 - Holeyannavar , et al. November 24, 2 | 2020-11-24 |
Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods
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Selectable-rate Bottom Purge Apparatus And Methods
App 20200201363 - Hruzek; Dean C. ; et al. | 2020-06-25 |
Side Storage Pods, Equipment Front End Modules, And Methods For Operating Efems
App 20200135525 - Reuter; Paul B. ; et al. | 2020-04-30 |
Side Storage Pods, Electronic Device Processing Systems, And Methods For Operating The Same
App 20200135522 - Reuter; Paul B. ; et al. | 2020-04-30 |
Side Storage Pods, Equipment Front End Modules, And Methods For Operating The Same
App 20200135520 - Reuter; Paul ; et al. | 2020-04-30 |
High Flow Velocity, Gas-purged, Side Storage Pod Apparatus, Assemblies, And Methods
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Substrate Manufacturing Apparatus And Methods With Factory Interface Chamber Heating
App 20190362989 - Reuter; Paul B. ; et al. | 2019-11-28 |
Substrate Processing Systems, Apparatus, And Methods With Factory Interface Environmental Controls
App 20190362997 - Koshti; Sushant S. ; et al. | 2019-11-28 |
Substrate Processing Systems, Apparatus, And Methods With Substrate Carrier And Purge Chamber Environmental Controls
App 20190310593 - Rice; Michael R. ; et al. | 2019-10-10 |
Multi-blade Robot Apparatus, Electronic Device Manufacturing Apparatus, And Methods Adapted To Transport Multiple Substrates In
App 20190267266 - Holeyannavar; Devendra Channappa ; et al. | 2019-08-29 |
Side storage pods, equipment front end modules, and methods for processing substrates
Grant 10,388,547 - Holeyannavar , et al. A | 2019-08-20 |
Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls
Grant 10,359,743 - Rice , et al. | 2019-07-23 |
Transfer Chambers With An Increased Number Of Sides, Semiconductor Device Manufacturing Processing Tools, And Processing Methods
App 20190214284 - Rice; Michael Robert ; et al. | 2019-07-11 |
Load Lock Door Assemblies, Load Lock Apparatus, Electronic Device Processing Systems, And Methods
App 20190208907 - Weiss; Eran ; et al. | 2019-07-11 |
Load lock door assembly, load lock apparatus, electronic device processing systems, and methods
Grant 10,278,501 - Weiss , et al. | 2019-05-07 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls
Grant 10,192,765 - Koshti , et al. Ja | 2019-01-29 |
Side Storage Pods, Equipment Front End Modules, And Methods For Processing Substrates
App 20180374725 - Holeyannavar; Devendra Channappa ; et al. | 2018-12-27 |
Substrate Processing Systems, Apparatus, And Methods With Factory Interface Environmental Controls
App 20180366355 - Koshti; Sushant S. ; et al. | 2018-12-20 |
Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods
Grant 10,159,169 - Vincent , et al. Dec | 2018-12-18 |
Flexible Equipment Front End Module Interfaces, Environmentally-controlled Equipment Front End Modules, And Assembly Methods
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Transfer Chambers With An Increased Number Of Sides, Semiconductor Device Manufacturing Processing Tools, And Processing Methods
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Substrate Processing Systems, Apparatus, And Methods With Substrate Carrier And Purge Chamber Environmental Controls
App 20160147235 - Rice; Michael R. ; et al. | 2016-05-26 |
Load Lock Door Assembly, Load Lock Apparatus, Electronic Device Processing Systems, And Methods
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Linked vacuum processing tools and methods of using the same
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Substrate Processing Sequence In A Cartesian Robot Cluster Tool
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Substrate Processing Systems, Apparatus, And Methods With Factory Interface Environmental Controls
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Substrate processing sequence in a cartesian robot cluster tool
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Linked Vacuum Processing Tools And Methods Of Using The Same
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Electrostatic end effector apparatus, systems and methods
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Substrate Processing Sequence In A Cartesian Robot Cluster Tool
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Substrate processing sequence in a Cartesian robot cluster tool
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Substrate Processing Sequence In A Cartesian Robot Cluster Tool
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Substrate processing sequence in a cartesian robot cluster tool
Grant 7,798,764 - Rice , et al. September 21, 2 | 2010-09-21 |
Electrostatic End Effector Apparatus, Systems And Methods
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Cartesian robot cluster tool architecture
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Method of retaining a substrate during a substrate transferring process
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Substrate gripper for a substrate handling robot
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Method of retaining a substrate during a substrate transferring process
App 20070147982 - Rice; Mike ; et al. | 2007-06-28 |
Substrate gripper for a substrate handling robot
App 20070147979 - Rice; Michael ; et al. | 2007-06-28 |
Substrate Processing Sequence In A Cartesian Robot Cluster Tool
App 20070147976 - Rice; Mike ; et al. | 2007-06-28 |
Cartesian robot cluster tool architecture
App 20060182536 - Rice; Mike ; et al. | 2006-08-17 |
Cartesian robot design
App 20060182535 - Rice; Mike ; et al. | 2006-08-17 |
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