| Patent | Date |
|---|
Methods, Systems, And Apparatus For Optically Monitoring Individual Lamps
App 20220301904 - HU; Ji-Dih ; et al. | 2022-09-22 |
Atomic Oxygen Detection In Semiconductor Processing Chambers
App 20220093428 - Adams; Bruce E. ; et al. | 2022-03-24 |
Temperature measurement using etalons
Grant 11,280,686 - Howells , et al. March 22, 2 | 2022-03-22 |
Thermal processing chamber with low temperature control
Grant 10,948,353 - Hawrylchak , et al. March 16, 2 | 2021-03-16 |
Continuous Spectra Transmission Pyrometry
App 20210055165 - HOWELLS; Samuel C. | 2021-02-25 |
Continuous spectra transmission pyrometry
Grant 10,845,249 - Howells November 24, 2 | 2020-11-24 |
Thermal Processing Chamber With Low Temperature Control
App 20200149968 - HAWRYLCHAK; Lara ; et al. | 2020-05-14 |
Thermal cooling member with low temperature control
Grant 10,571,337 - Hawrylchak , et al. Feb | 2020-02-25 |
Temperature Measurement Using Etalons
App 20200025631 - HOWELLS; Samuel C. ; et al. | 2020-01-23 |
Fiber array line generator
Grant 10,537,965 - Holmgren , et al. Ja | 2020-01-21 |
Pulsed radiation sources for transmission pyrometry
Grant 10,281,335 - Howells | 2019-05-07 |
Thermal processing apparatus
Grant 10,181,409 - Moffatt , et al. Ja | 2019-01-15 |
Thermal Processing Chamber With Low Temperature Control
App 20180340832 - HAWRYLCHAK; Lara ; et al. | 2018-11-29 |
Continuous Spectra Transmission Pyrometry
App 20180340834 - HOWELLS; Samuel C. | 2018-11-29 |
Pulsed Radiation Sources For Transmission Pyrometry
App 20180340835 - HOWELLS; Samuel C. | 2018-11-29 |
Detector for low temperature transmission pyrometry
Grant 10,072,986 - Howells September 11, 2 | 2018-09-11 |
Process sheet resistance uniformity improvement using multiple melt laser exposures
Grant 9,953,851 - Li , et al. April 24, 2 | 2018-04-24 |
Multiple beam combiner for laser processing apparatus
Grant 9,927,622 - Moffatt , et al. March 27, 2 | 2018-03-27 |
Apparatus and method of improving beam shaping and beam homogenization
Grant 9,908,200 - Adams , et al. March 6, 2 | 2018-03-06 |
Semiconductor Processing Method And Semiconductor Device
App 20170148726 - MOFFATT; Stephen ; et al. | 2017-05-25 |
Optical design for line generation using microlens array
Grant 9,636,778 - Holmgren , et al. May 2, 2 | 2017-05-02 |
Process Sheet Resistance Uniformity Improvement Using Multiple Melt Laser Exposures
App 20170040194 - LI; Jiping ; et al. | 2017-02-09 |
Process sheet resistance uniformity improvement using multiple melt laser exposures
Grant 9,390,926 - Li , et al. July 12, 2 | 2016-07-12 |
Multiple Beam Combiner For Laser Processing Apparatus
App 20160139417 - Moffatt; Stephen ; et al. | 2016-05-19 |
Multiple beam combiner for laser processing apparatus
Grant 9,285,595 - Moffatt , et al. March 15, 2 | 2016-03-15 |
Scanned Pulse Anneal Apparatus And Methods
App 20160020117 - HUNTER; Aaron Muir ; et al. | 2016-01-21 |
Apparatus for speckle reduction, pulse stretching, and beam homogenization
Grant 9,146,337 - Li , et al. September 29, 2 | 2015-09-29 |
Fiber Array Line Generator
App 20150165551 - HOLMGREN; Douglas E. ; et al. | 2015-06-18 |
Optical Design For Line Generation Using Microlens Array
App 20150136755 - HOLMGREN; Douglas E. ; et al. | 2015-05-21 |
Multiple Beam Combiner For Laser Processing Apparatus
App 20150124329 - MOFFATT; Stephen ; et al. | 2015-05-07 |
Multiple beam combiner for laser processing apparatus
Grant 8,970,963 - Moffatt , et al. March 3, 2 | 2015-03-03 |
Apparatus And Method Of Improving Beam Shaping And Beam Homogenization
App 20150053658 - ADAMS; Bruce E. ; et al. | 2015-02-26 |
Optical design for line generation using microlens array
Grant 8,946,594 - Holmgren , et al. February 3, 2 | 2015-02-03 |
Process Sheet Resistance Uniformity Improvement Using Multiple Melt Laser Exposures
App 20140256161 - LI; Jiping ; et al. | 2014-09-11 |
Apparatus For Speckle Reduction, Pulse Stretching, And Beam Homogenization
App 20140254022 - LI; Jiping ; et al. | 2014-09-11 |
Apparatus and method of improving beam shaping and beam homogenization
Grant 8,829,392 - Adams , et al. September 9, 2 | 2014-09-09 |
Novel Thermal Processing Apparatus
App 20140138362 - MOFFATT; Stephen ; et al. | 2014-05-22 |
Method and apparatus for decorrelation of spatially and temporally coherent light
Grant 8,693,095 - Jennings , et al. April 8, 2 | 2014-04-08 |
Method For Partitioning And Incoherently Summing A Coherent Beam
App 20140009829 - JENNINGS; Dean ; et al. | 2014-01-09 |
Thermal processing apparatus
Grant 8,569,187 - Moffatt , et al. October 29, 2 | 2013-10-29 |
Multiple Beam Combiner For Laser Processing Apparatus
App 20130163091 - MOFFATT; STEPHEN ; et al. | 2013-06-27 |
Method And Apparatus For Decorrelation Of Spatially And Temporally Coherent Light
App 20130141788 - JENNINGS; Dean ; et al. | 2013-06-06 |
Optical Design For Line Generation Using Microlens Array
App 20130112667 - Holmgren; Douglas E. ; et al. | 2013-05-09 |
Multi-stage optical homogenization
Grant 8,432,613 - Jennings , et al. April 30, 2 | 2013-04-30 |
Method and apparatus for decorrelation of spatially and temporally coherent light
Grant 8,363,320 - Jennings , et al. January 29, 2 | 2013-01-29 |
Novel Thermal Processing Apparatus
App 20120329178 - Moffatt; Stephen ; et al. | 2012-12-27 |
Novel Thermal Processing Apparatus
App 20120325784 - Moffatt; Stephen ; et al. | 2012-12-27 |
Apparatus And Method Of Improving Beam Shaping And Beam Homogenization
App 20120148701 - Adams; Bruce E. ; et al. | 2012-06-14 |
Apparatus and method of improving beam shaping and beam homogenization
Grant 8,148,663 - Adams , et al. April 3, 2 | 2012-04-03 |
Method And Apparatus For Decorrelation Of Spatially And Temporally Coherent Light
App 20110199683 - Jennings; Dean ; et al. | 2011-08-18 |
Multi-stage Optical Homogenization
App 20100266268 - Jennings; Dean C. ; et al. | 2010-10-21 |
Optical proximity correction in raster scan printing based on corner matching templates
Grant 7,529,421 - Beauchaine , et al. May 5, 2 | 2009-05-05 |
Apparatus and method of improving beam shaping and beam homogenization
App 20090032511 - Adams; Bruce E. ; et al. | 2009-02-05 |
Area Based Optical Proximity Correction In Raster Scan Printing
App 20090037868 - Chabreck; Thomas E. ; et al. | 2009-02-05 |
Method And Apparatus For Decorrelation Of Spatially And Temporally Coherent Light
App 20090034072 - Jennings; Dean ; et al. | 2009-02-05 |
Method For Partitioning And Incoherently Summing A Coherent Beam
App 20090034071 - JENNINGS; DEAN ; et al. | 2009-02-05 |
Area based optical proximity correction in raster scan printing
Grant 7,407,252 - Chabreck , et al. August 5, 2 | 2008-08-05 |
Method for adjusting edges of grayscale pixel-map images
Grant 7,034,963 - Klatchko , et al. April 25, 2 | 2006-04-25 |
Optical proximity correction in raster scan printing based on corner matching templates
App 20060002603 - Beauchaine; Robert J. ; et al. | 2006-01-05 |
Area based optical proximity correction in raster scan printing
App 20060001688 - Chabreck; Thomas E. ; et al. | 2006-01-05 |
Phosphor coated waveguide for efficient collection of electron-generated photons
Grant 6,775,452 - Howells August 10, 2 | 2004-08-10 |
Phosphor coated waveguide for the efficient collection of electron-generated photons
Grant 6,768,836 - Howells July 27, 2 | 2004-07-27 |
Reflective diffraction of radiation beams for image registration
Grant 6,751,000 - Allen , et al. June 15, 2 | 2004-06-15 |
Reflective diffraction of radiation beams for image registration
App 20030117680 - Allen, Paul C. ; et al. | 2003-06-26 |
Algorithm for adjusting edges of grayscale pixel-map images
App 20030107770 - Klatchko, Asher ; et al. | 2003-06-12 |
Image registration apparatus having an adjustable reflective diffraction grating and method
Grant 6,532,097 - Allen , et al. March 11, 2 | 2003-03-11 |
Phosphor coated waveguide for efficient collection of electron-generated photons
App 20020171030 - Howells, Samuel C. | 2002-11-21 |
Electron beam column using high numerical aperture photocathode source illumination
Grant 6,448,568 - Allen , et al. September 10, 2 | 2002-09-10 |
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