Patent | Date |
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Mesoscale System Feedback-induced Dissipation And Noise Suppression App 20210341404 - Gupta; Chaitanya ;   et al. | 2021-11-04 |
Mesoscale system feedback-induced dissipation and noise suppression Grant 11,035,810 - Gupta , et al. June 15, 2 | 2021-06-15 |
Methods and systems for orienting nanomaterials Grant 10,585,096 - Emaminejad , et al. | 2020-03-10 |
Electropermanent magnet activated microfluidic droplet size modulation Grant 10,385,893 - Padovani Blanco , et al. A | 2019-08-20 |
Electro-diffusion enhanced bio-molecule charge detection using electrostatic interaction Grant 9,989,516 - Liu , et al. June 5, 2 | 2018-06-05 |
Electropermanent magnet activated microfluidic droplet size modulation App 20180093265 - Padovani Blanco; Jose I. ;   et al. | 2018-04-05 |
Low work-function, mechanically and thermally robust emitter for thermionic energy converters Grant 9,607,815 - Lee , et al. March 28, 2 | 2017-03-28 |
Electro-diffusion Enhanced Bio-molecule Charge Detection Using Electrostatic Interaction App 20170074854 - Liu; Yang ;   et al. | 2017-03-16 |
MEMS-based integrated inverter for wafer-scale thermionic energy converter Grant 9,590,535 - Bargatin , et al. March 7, 2 | 2017-03-07 |
Electro-diffusion enhanced bio-molecule charge detection using electrostatic interaction Grant 9,470,651 - Liu , et al. October 18, 2 | 2016-10-18 |
Methods And Systems For Orienting Nanomaterials App 20160245807 - EMAMINEJAD; SAM ;   et al. | 2016-08-25 |
Electro-diffusion Enhanced Bio-molecule Charge Detection Using Electrostatic Interaction App 20160103094 - Liu; Yang ;   et al. | 2016-04-14 |
Electro-diffusion enhanced bio-molecule charge detection using electrostatic interaction Grant 9,188,560 - Liu , et al. November 17, 2 | 2015-11-17 |
Low Work-function, Mechanically and Thermally Robust Emitter for Thermionic Energy Converters App 20150325419 - Lee; Jae Hyung ;   et al. | 2015-11-12 |
Gas-diffusion barriers for MEMS encapsulation Grant 9,018,715 - Howe , et al. April 28, 2 | 2015-04-28 |
Electro-diffusion Enhanced Bio-molecule Charge Detection Using Electrostatic Interaction App 20150102830 - Liu; Yang ;   et al. | 2015-04-16 |
Electro-diffusion enhanced bio-molecule charge detection using electrostatic interaction Grant 8,864,969 - Liu , et al. October 21, 2 | 2014-10-21 |
Gas-diffusion Barriers For Mems Encapsulation App 20140151820 - Howe; Roger T. ;   et al. | 2014-06-05 |
MEMS coupler and method to form the same Grant 8,716,815 - Quevy , et al. May 6, 2 | 2014-05-06 |
MEMS-Based Integrated Inverter for Wafer-Scale Thermionic Energy Converter App 20140049135 - Bargatin; Igor ;   et al. | 2014-02-20 |
Strained semiconductor materials, devices and methods therefore Grant 8,633,573 - Jain , et al. January 21, 2 | 2014-01-21 |
Temperature compensated oscillator including MEMS resonator for frequency control Grant 8,427,251 - Quevy , et al. April 23, 2 | 2013-04-23 |
Damascene process for use in fabricating semiconductor structures having micro/nano gaps Grant 8,329,559 - Takeuchi , et al. December 11, 2 | 2012-12-11 |
Planar microshells for vacuum encapsulated devices and damascene method of manufacture Grant 8,313,970 - Quevy , et al. November 20, 2 | 2012-11-20 |
Microshells with integrated getter layer Grant 8,288,835 - Quevy , et al. October 16, 2 | 2012-10-16 |
Planar microshells for vacuum encapsulated devices and damascene method of manufacture Grant 8,273,594 - Quevy , et al. September 25, 2 | 2012-09-25 |
Temperature compensated oscillator including MEMS resonator for frequency control App 20120229220 - Quevy; Emmanuel P. ;   et al. | 2012-09-13 |
Damascene Process For Use In Fabricating Semiconductor Structures Having Micro/nano Gaps App 20120171798 - Takeuchi; Hideki ;   et al. | 2012-07-05 |
MEMS structure having a stress inverter temperature-compensated resonator member Grant 7,956,517 - Motiee , et al. June 7, 2 | 2011-06-07 |
Planar Microshells For Vacuum Encapsulated Devices And Damascene Method Of Manufacture App 20110121416 - Quevy; Emmanuel P. ;   et al. | 2011-05-26 |
Planar Microshells For Vacuum Encapsulated Devices And Damascene Method Of Manufacture App 20110121412 - Quevy; Emmanuel P. ;   et al. | 2011-05-26 |
Planar Microshells For Vacuum Encapsulated Devices And Damascene Method Of Manufacture App 20110121415 - Quevy; Emmanuel P. ;   et al. | 2011-05-26 |
Planar microshells for vacuum encapsulated devices and damascene method of manufacture Grant 7,923,790 - Quevy , et al. April 12, 2 | 2011-04-12 |
Mems coupler and method to form the same App 20110068422 - Quevy; Emmanuel P. ;   et al. | 2011-03-24 |
Electro-diffusion Enhanced Bio-molecule Charge Detection Using Electrostatic Interaction App 20100327874 - Liu; Yang ;   et al. | 2010-12-30 |
MEMS coupler and method to form the same Grant 7,858,422 - Quevy , et al. December 28, 2 | 2010-12-28 |
Strained semiconductor materials, devices and methods therefore App 20100207254 - Jain; Jinendra Raja ;   et al. | 2010-08-19 |
Thin film microshells incorporating a getter layer Grant 7,736,929 - Monadgemi , et al. June 15, 2 | 2010-06-15 |
Microshells for multi-level vacuum cavities Grant 7,659,150 - Monadgemi , et al. February 9, 2 | 2010-02-09 |
Low stress thin film microshells Grant 7,595,209 - Monadgemi , et al. September 29, 2 | 2009-09-29 |
MEMS structure having a compensated resonating member Grant 7,591,201 - Bernstein , et al. September 22, 2 | 2009-09-22 |
Internal electrostatic transduction structures for bulk-mode micromechanical resonators Grant 7,522,019 - Bhave , et al. April 21, 2 | 2009-04-21 |
MEMS structure having a stress inverter temperature-compensated resonating member Grant 7,514,853 - Howe , et al. April 7, 2 | 2009-04-07 |
Damascene process for use in fabricating semiconductor structures having micro/nano gaps Grant 7,256,107 - Takeuchi , et al. August 14, 2 | 2007-08-14 |
Temperature compensated oscillator including MEMS resonator for frequency control Grant 7,211,926 - Quevy , et al. May 1, 2 | 2007-05-01 |
Selective etching of silicon carbide films Grant 7,151,277 - Gao , et al. December 19, 2 | 2006-12-19 |
Temperature compensated oscillator including MEMS resonator for frequency control App 20060261703 - Quevy; Emmanuel P. ;   et al. | 2006-11-23 |
Internal electrostatic transduction structures for bulk-mode micromechanical resonators App 20060017523 - Bhave; Sunil A. ;   et al. | 2006-01-26 |
Manufacturable low-temperature silicon carbide deposition technology App 20060008661 - Wijesundara; Muthu B.J. ;   et al. | 2006-01-12 |
Damascene process for use in fabricating semiconductor structures having micro/nano gaps App 20050250236 - Takeuchi, Hideki ;   et al. | 2005-11-10 |
Selective etching of silicon carbide films App 20050001276 - Gao, Di ;   et al. | 2005-01-06 |
Micro-machined angle-measuring gyroscope Grant 6,481,285 - Shkel , et al. November 19, 2 | 2002-11-19 |
Microfabricated filter and shell constructed with a permeable membrane Grant 6,478,974 - Lebouitz , et al. November 12, 2 | 2002-11-12 |
Polycrystalline silicon-germanium films for micro-electromechanical systems application Grant 6,448,622 - Franke , et al. September 10, 2 | 2002-09-10 |
Method of fabricating a sensor Grant 6,296,779 - Clark , et al. October 2, 2 | 2001-10-02 |
Dual-mass micromachined vibratory rate gyroscope Grant 6,250,156 - Seshia , et al. June 26, 2 | 2001-06-26 |
Polycrystalline silicon germanium films for forming micro-electromechanical systems Grant 6,210,988 - Howe , et al. April 3, 2 | 2001-04-03 |
Wafer-to-wafer transfer of microstructures using break-away tethers Grant 6,142,358 - Cohn , et al. November 7, 2 | 2000-11-07 |
Method of drying passivated micromachines by dewetting from a liquid-based process Grant 6,114,044 - Houston , et al. September 5, 2 | 2000-09-05 |
Micromachined vibratory rate gyroscope Grant 6,067,858 - Clark , et al. May 30, 2 | 2000-05-30 |
Resonant accelerometer with flexural lever leverage system Grant 5,969,249 - Roessig , et al. October 19, 1 | 1999-10-19 |
Q-controlled microresonators and tunable electric filters using such resonators Grant 5,955,932 - Nguyen , et al. September 21, 1 | 1999-09-21 |
Microfabricated filter and shell constructed with a permeable membrane Grant 5,919,364 - Lebouitz , et al. July 6, 1 | 1999-07-06 |
Method of making a sub-ground plane for a micromachined device Grant 5,879,963 - Howe , et al. March 9, 1 | 1999-03-09 |
Conductive plane beneath suspended microstructure Grant 5,858,809 - Chau , et al. January 12, 1 | 1999-01-12 |
Mixing, modulation and demodulation via electromechanical resonators Grant 5,839,062 - Nguyen , et al. November 17, 1 | 1998-11-17 |
Conductive plane beneath suspended microstructure Grant 5,640,039 - Chau , et al. June 17, 1 | 1997-06-17 |
Microelectromechanical signal processor fabrication Grant 5,589,082 - Lin , et al. December 31, 1 | 1996-12-31 |
Sensor with separate actuator and sense fingers Grant 5,565,625 - Howe , et al. October 15, 1 | 1996-10-15 |
Microelectromechanical signal processors Grant 5,537,083 - Lin , et al. July 16, 1 | 1996-07-16 |
Q-controlled microresonators and tunable electronic filters using such resonators Grant 5,491,604 - Nguyen , et al. February 13, 1 | 1996-02-13 |
Microelectromechanical signal processors Grant 5,455,547 - Lin , et al. October 3, 1 | 1995-10-03 |
Method of applying a monolayer lubricant to micromachines Grant 5,403,665 - Alley , et al. April 4, 1 | 1995-04-04 |
Method for fabricating microstructures Grant 5,314,572 - Core , et al. May 24, 1 | 1994-05-24 |
Method for fabricating side drive electrostatic micromotor Grant 5,043,043 - Howe , et al. August 27, 1 | 1991-08-27 |
Laterally driven resonant microstructures Grant 5,025,346 - Tang , et al. June 18, 1 | 1991-06-18 |
Electrostatic micromotor Grant 4,997,521 - Howe , et al. March 5, 1 | 1991-03-05 |
Electrostatic micromotor Grant 4,943,750 - Howe , et al. July 24, 1 | 1990-07-24 |
Turbulent shear force microsensor Grant 4,896,098 - Haritonidis , et al. January 23, 1 | 1990-01-23 |
Digital technique for precise measurement of variable capacitance Grant 4,860,232 - Lee , et al. August 22, 1 | 1989-08-22 |
Resonant accelerometer Grant 4,851,080 - Howe , et al. July 25, 1 | 1989-07-25 |
Released film structures and method of measuring film properties Grant 4,823,607 - Howe , et al. April 25, 1 | 1989-04-25 |
Resonant accelerometer Grant 4,805,456 - Howe , et al. February 21, 1 | 1989-02-21 |
Integrated circuit sensor Grant 4,674,319 - Muller , et al. June 23, 1 | 1987-06-23 |