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Patent applications and USPTO patent grants for Hovey; Steven H..The latest application filed is for "lid structure for microdevice and method of manufacture".
Patent | Date |
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Wafer bonding material with embedded conductive particles Grant 7,972,683 - Gudeman , et al. July 5, 2 | 2011-07-05 |
Lid structure for microdevice and method of manufacture Grant 7,968,986 - Hovey , et al. June 28, 2 | 2011-06-28 |
Interconnect structure using through wafer vias and method of fabrication Grant 7,675,162 - Foster , et al. March 9, 2 | 2010-03-09 |
Lid structure for microdevice and method of manufacture App 20080277672 - Hovey; Steven H. ;   et al. | 2008-11-13 |
Interconnect structure using through wafer vias and method of fabrication App 20080079120 - Foster; John S. ;   et al. | 2008-04-03 |
Wafer bonding material with embedded conductive particles App 20070295456 - Gudeman; Christopher S. ;   et al. | 2007-12-27 |
MEMS actuator and method of manufacture for MEMS particle sorting device Grant 7,229,838 - Foster , et al. June 12, 2 | 2007-06-12 |
Method and apparatus for sorting particles with a MEMS device Grant 7,220,594 - Foster , et al. May 22, 2 | 2007-05-22 |
Microfabricated cross flow filter and method of manufacture App 20060266692 - Foster; John S. ;   et al. | 2006-11-30 |
Use of multi-layer thin films as stress sensors Grant 7,059,201 - Prakash , et al. June 13, 2 | 2006-06-13 |
MEMS actuator and method of manufacture for MEMS particle sorting device App 20060062698 - Foster; John S. ;   et al. | 2006-03-23 |
Method and apparatus for sorting particles with a MEMS device App 20050282151 - Foster, John S. ;   et al. | 2005-12-22 |
Method and apparatus for pressure sensing Grant 6,829,950 - Ganapathi , et al. December 14, 2 | 2004-12-14 |
Method and apparatus for pressure sensing Grant 6,578,436 - Ganapathi , et al. June 17, 2 | 2003-06-17 |
Method and apparatus for pressure sensing App 20020166388 - Ganapathi, Srinavasan K. ;   et al. | 2002-11-14 |
Use of multi-layer thin films as stress sensors App 20020073785 - Prakash, Shiva ;   et al. | 2002-06-20 |
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