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Patent applications and USPTO patent grants for Houshmand; Farzad.The latest application filed is for "photoresist deposition using independent multichannel showerhead".
Patent | Date |
---|---|
Photoresist Deposition Using Independent Multichannel Showerhead App 20220155689 - Houshmand; Farzad ;   et al. | 2022-05-19 |
Plasma source for rotating susceptor Grant 11,315,769 - Bera , et al. April 26, 2 | 2022-04-26 |
Apparatus Design For Photoresist Deposition App 20220049350 - Houshmand; Farzad ;   et al. | 2022-02-17 |
Methods and apparatus for producing low angle depositions Grant 11,170,982 - Subramani , et al. November 9, 2 | 2021-11-09 |
Symmetric Plasma Source to Generate Pie-Shaped Treatment App 20210210312 - Subramani; Anantha K. ;   et al. | 2021-07-08 |
Plasma Source For Rotating Susceptor App 20210166923 - Bera; Kallol ;   et al. | 2021-06-03 |
Plasma source for rotating susceptor Grant 10,903,056 - Bera , et al. January 26, 2 | 2021-01-26 |
Aperture Design For Uniformity Control In Selective Physical Vapor Deposition App 20210020484 - Miller; Keith ;   et al. | 2021-01-21 |
Symmetric plasma source to generate pie shaped treatment Grant 10,879,042 - Subramani , et al. December 29, 2 | 2020-12-29 |
Symmetric And Irregular Shaped Plasmas Using Modular Microwave Sources App 20200402769 - Chua; Thai Cheng ;   et al. | 2020-12-24 |
Symmetric and irregular shaped plasmas using modular microwave sources Grant 10,707,058 - Chua , et al. | 2020-07-07 |
Methods And Apparatus For Producing Low Angle Depositions App 20200051794 - SUBRAMANI; ANANTHA K. ;   et al. | 2020-02-13 |
Multi-zone Collimator For Selective Pvd App 20190353919 - MEBARKI; BENCHERKI ;   et al. | 2019-11-21 |
Methods And Apparatus For Physical Vapor Deposition Using Directional Linear Scanning App 20190276931 - Mebarki; Bencherki ;   et al. | 2019-09-12 |
Plasma Source For Rotating Susceptor App 20180330927 - Bera; Kallol ;   et al. | 2018-11-15 |
Lateral plasma/radical source Grant 10,121,655 - Subramani , et al. November 6, 2 | 2018-11-06 |
Symmetric And Irregular Shaped Plasmas Using Modular Microwave Sources App 20180294143 - Chua; Thai Cheng ;   et al. | 2018-10-11 |
Symmetric Plasma Source To Generate Pie Shaped Treatment App 20170213701 - Subramani; Anantha K. ;   et al. | 2017-07-27 |
Lateral Plasma/Radical Source App 20170148626 - Subramani; Anantha K. ;   et al. | 2017-05-25 |
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