Patent | Date |
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Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 11,300,890 - Kunnen , et al. April 12, 2 | 2022-04-12 |
Support Table For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20200371447 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2020-11-26 |
Extraction Body For Lithographic Apparatus App 20200285154 - KRAMER; Gijs ;   et al. | 2020-09-10 |
Support apparatus, lithographic apparatus and device manufacturing method Grant 10,747,125 - Lafarre , et al. A | 2020-08-18 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 10,747,126 - Kunnen , et al. A | 2020-08-18 |
Extraction body for lithographic apparatus Grant 10,705,426 - Kramer , et al. | 2020-07-07 |
Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method Grant 10,656,536 - Leenders , et al. | 2020-05-19 |
Lithographic Apparatus, Support Table For A Lithographic Apparatus And Device Manufacturing Method App 20200124993 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2020-04-23 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 10,520,837 - Kunnen , et al. Dec | 2019-12-31 |
Object holder and lithographic apparatus Grant 10,481,502 - Laurent , et al. Nov | 2019-11-19 |
Substrate holder, a lithographic apparatus and method of manufacturing devices Grant 10,453,734 - Poiesz , et al. Oc | 2019-10-22 |
Support Table For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20190294056 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2019-09-26 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 10,324,382 - Kunnen , et al. | 2019-06-18 |
Extraction Body For Lithographic Apparatus App 20190163066 - KRAMER; Gijs ;   et al. | 2019-05-30 |
Support Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20190072863 - Lafarre; Raymond Wilhelmus Louis ;   et al. | 2019-03-07 |
Support apparatus, lithographic apparatus and device manufacturing method Grant 10,120,292 - Lafarre , et al. November 6, 2 | 2018-11-06 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method App 20180284627 - Kunnen; Johan Gertrudis Cornelis ;   et al. | 2018-10-04 |
Object Holder And Lithographic Apparatus App 20180267412 - LAURENT; Thibault Simon Mathieu ;   et al. | 2018-09-20 |
Support Table For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20180239265 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2018-08-23 |
Substrate Holder, A Lithographic Apparatus And Method Of Manufacturing Devices App 20180190534 - POIESZ; Thomas ;   et al. | 2018-07-05 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 9,971,252 - Kunnen , et al. May 15, 2 | 2018-05-15 |
System for positioning an object in lithography Grant 9,946,172 - Hempenius , et al. April 17, 2 | 2018-04-17 |
Substrate holder and support table for lithography Grant 9,939,736 - Houben , et al. April 10, 2 | 2018-04-10 |
Object holder and lithographic apparatus Grant 9,915,877 - Laurent , et al. March 13, 2 | 2018-03-13 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 9,897,928 - Kunnen , et al. February 20, 2 | 2018-02-20 |
Support Table For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20170351187 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2017-12-07 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 9,835,957 - Houben , et al. December 5, 2 | 2017-12-05 |
Object Holder And Lithographic Apparatus App 20170315454 - LAURENT; Thibault Simon Mathieu ;   et al. | 2017-11-02 |
Object holder and lithographic apparatus Grant 9,785,055 - Laurent , et al. October 10, 2 | 2017-10-10 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 9,740,110 - Kunnen , et al. August 22, 2 | 2017-08-22 |
Substrate Support, Method For Loading A Substrate On A Substrate Support Location, Lithographic Apparatus And Device Manufacturing Method App 20170192359 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2017-07-06 |
Support Table For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20170176872 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2017-06-22 |
Support Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20170090304 - Lafarre; Raymond Wilhelmus Louis ;   et al. | 2017-03-30 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 9,575,419 - Kunnen , et al. February 21, 2 | 2017-02-21 |
System For Positioning An Object In Lithography App 20160377996 - HEMPENIUS; Peter Paul ;   et al. | 2016-12-29 |
Support apparatus, lithographic apparatus and device manufacturing method Grant 9,507,275 - Lafarre , et al. November 29, 2 | 2016-11-29 |
Substrate Holder And Support Table For Lithography App 20160334710 - HOUBEN; Martijn ;   et al. | 2016-11-17 |
Support Table For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20160187791 - HOUBEN; Martijn ;   et al. | 2016-06-30 |
Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method Grant 9,280,063 - Kunnen , et al. March 8, 2 | 2016-03-08 |
Support Table For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20150277243 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2015-10-01 |
Object Holder And Lithographic Apparatus App 20150131064 - Laurent; Thibault Simon Mathieu ;   et al. | 2015-05-14 |
Lithographic apparatus and device manufacturing method Grant 9,019,476 - Compen , et al. April 28, 2 | 2015-04-28 |
Support Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20150109599 - Koevoets; Adrianus Hendrik ;   et al. | 2015-04-23 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 8,970,822 - Kunnen , et al. March 3, 2 | 2015-03-03 |
Lithographic apparatus, removable member and device manufacturing method Grant 8,823,919 - Dziomkina , et al. September 2, 2 | 2014-09-02 |
Lithographic apparatus, removable member and device manufacturing method Grant 8,659,741 - De Graaf , et al. February 25, 2 | 2014-02-25 |
Lithographic apparatus and device manufacturing method Grant 8,619,258 - Houben December 31, 2 | 2013-12-31 |
Support Table For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20130094005 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2013-04-18 |
Calibration method and lithographic apparatus for calibrating an optimum take over height of a substrate Grant 8,384,882 - Compen , et al. February 26, 2 | 2013-02-26 |
Lithographic Apparatus, Support Table For A Lithographic Apparatus And Device Manufacturing Method App 20130045447 - Kunnen; Johan Gertrudis Cornelis ;   et al. | 2013-02-21 |
Substrate Table Assembly, An Immersion Lithographic Apparatus And A Device Manufacturing Method App 20130038854 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2013-02-14 |
Lithographic apparatus and device manufacturing method Grant 8,269,949 - Vermeulen , et al. September 18, 2 | 2012-09-18 |
Substrate Table, A Lithographic Apparatus, A Method Of Flattening An Edge Of A Substrate And A Device Manufacturing Method App 20110292369 - LAFARRE; Raymond Wilhelmus Louis ;   et al. | 2011-12-01 |
Lithographic Apparatus And Device Manufacturing Method App 20110222045 - COMPEN; Rene Theodorus Petrus ;   et al. | 2011-09-15 |
Lithographic Apparatus, Removable Member And Device Manufacturing Method App 20110199592 - De Graff; Roelof Frederik ;   et al. | 2011-08-18 |
Lithographic apparatus and device manufacturing method Grant 7,978,308 - Compen , et al. July 12, 2 | 2011-07-12 |
Lithographic Apparatus, Removable Member And Device Manufacturing Method App 20110116060 - Dziomkina; Nina Vladimirovna ;   et al. | 2011-05-19 |
Lithographic Apparatus And Device Manufacturing Method App 20100143832 - HOUBEN; Martijn | 2010-06-10 |
Calibration Method And Lithographic Apparatus For Calibrating An Optimum Take Over Height Of A Substrate App 20100110408 - COMPEN; Rene Theodorus Petrus ;   et al. | 2010-05-06 |
Lithographic Apparatus And Device Manufacturing Method App 20100085551 - VERMEULEN; Marcus Martinus Petrus Adrianus ;   et al. | 2010-04-08 |
Lithographic apparatus and device manufacturing method App 20070263200 - Petrus Compen; Rene Theodorus ;   et al. | 2007-11-15 |